Patent Drafting Analysis of Taiwan Semiconductor Manufacturing Company’s Fan-Out Chip Package Structure | US 2024/0203893 A1
Patent Drafting Analysis of TSMC's Fan-Out Chip Package with Interposer Substrate | US 2024/0203893 A1
A structural and strategic analysis of US 2024/0203893 A1 covering claim architecture, drafting quality signals, critical gaps, and prosecution positioning for TSMC's fan-out semiconductor packaging technology.
Structural Overview
The detailed description overwhelmingly dominates at approximately 72% of total specification words (~7,200 of ~9,200 words), spread across 41 drawing sheets depicting numerous cross-sectional process stages. The patent presents 20 total claims — 3 independent and 17 dependent — yielding a 5.67:1 dependent-to-independent ratio, which sits at the lower end for semiconductor packaging IPC classes that typically see broader dependent claim sets. Figure coverage is extensive with 41 sheets spanning eight distinct embodiment families (FIGS. 1A–1G, 2, 3A–3H, 4A–4F, 5A–5F, 6A–6D, 7A–7G, 8A–8G, and 9), providing strong visual support for nearly every structural element recited in the claims.
Section Word Distribution
↗ Click bars to exploreFigure Inventory — 41 Sheets
| Figure | Description | Role |
|---|---|---|
| FIG. 1A | Cross-sectional view showing initial process stage with redistribution structure 102 formed over carrier substrate 100, including insulating layers 104, conductive features 106, and conductive pillars 112.Search in Eureka ↗ | Key embodiment |
| FIG. 1B | Cross-section showing semiconductor die 114 stacked over redistribution structure 102, bonded via conductive features 116 and underfill material 118, with device elements 120 including electrodes 121a and 121b.Search in Eureka ↗ | Key embodiment |
| FIG. 1C | Cross-section showing interposer substrate 122 (comprising board 124 and conductive elements 126) stacked over redistribution structure 102 and bonded via conductive structures 128, with device element 130 added.Search in Eureka ↗ | Key embodiment |
| FIG. 1D | Cross-section showing device elements 132 disposed over interposer substrate 122 and interconnection structure 136 with redistribution structure 132 added, illustrating the fan-out feature assembly.Search in Eureka ↗ | Key embodiment |
| FIG. 1E | Cross-section showing module 134 carried by interconnection structure 136 stacked over interposer substrate 122, bonded via solder elements 142 to conductive pillars 112.Search in Eureka ↗ | Claim support |
| FIG. 1F | Cross-section showing formation of protective layer 144 surrounding semiconductor die 114, interposer substrate 122, device elements 132, conductive pillars 112 and solder elements 142.Search in Eureka ↗ | Claim support |
| FIG. 1G | Cross-section of completed package structure showing second semiconductor die 148 stacked over redistribution structure 102 with conductive features 150 and underfill 152, plus conductive bumps 146.Search in Eureka ↗ | Key embodiment |
| FIG. 2 | Cross-sectional view of package structure variant where semiconductor die 148 is not bonded onto redistribution structure 102, showing conductive bumps 146 on the bottom surface.Search in Eureka ↗ | Key embodiment |
| FIG. 3A | Cross-section showing alternative process embodiment with conductive pillars 112' formed over redistribution structure 102 on carrier substrate 100, no die yet placed.Search in Eureka ↗ | Claim support |
| FIG. 3B | Cross-section showing semiconductor die 302 bonded via conductive features 304 and underfill 306, device elements 308 placed on redistribution structure 102, with alternative carrier substrate 112'.Search in Eureka ↗ | Claim support |
| FIG. 3C | Cross-section showing interposer substrate 310 (board 314, conductive elements 312) stacked over redistribution structure 102 and bonded via conductive structures 316, with protective layer 318 formed.Search in Eureka ↗ | Key embodiment |
| FIG. 3D | Cross-section showing protective layer 318 formation surrounding semiconductor die 302, device elements 308, conductive pillars 112' and conductive structures 316 on interposer substrate 310.Search in Eureka ↗ | Claim support |
| FIG. 3E | Cross-section showing carrier substrate 320 bonded to interposer substrate 310 and subsequent removal of original carrier substrate 100 to expose redistribution structure 102 surface.Search in Eureka ↗ | Flow diagram |
| FIG. 3F | Cross-section showing conductive bumps 322, additional semiconductor die 324 and second die package structure bonded via conductive features 326 and underfill 328 onto exposed redistribution structure 102.Search in Eureka ↗ | Key embodiment |
| FIG. 3G | Cross-section showing removal of carrier substrate 320 to expose interposer substrate 310 surface, with semiconductor die 330 and device elements 336 then disposed over interposer substrate 310.Search in Eureka ↗ | Flow diagram |
| FIG. 3H | Cross-section of completed package structure after singulation, showing semiconductor die 330 and device elements 336 on interposer substrate 310, with second semiconductor die 324 on opposite side.Search in Eureka ↗ | Key embodiment |
| FIG. 4A | Cross-section showing redistribution structure 102 formed over carrier substrate 101 with release film 101, initial stage for an alternative fan-out package process flow.Search in Eureka ↗ | Flow diagram |
| FIG. 4B | Cross-section showing semiconductor die 402 bonded via conductive features 404, underfill 406 formed, and device elements 408 placed over redistribution structure 102 with release film 101.Search in Eureka ↗ | Claim support |
| FIG. 4C | Cross-section showing module 416 on interconnection structure 410 stacked over redistribution structure 102, bonded via conductive structures 418, with protective layer 420 formed surrounding all elements.Search in Eureka ↗ | Key embodiment |
| FIG. 4D | Cross-section showing package structure flipped and attached to tape carrier 422, with carrier substrate 100 and release film 101 removed to expose redistribution structure 102.Search in Eureka ↗ | Flow diagram |
| FIG. 4E | Cross-section showing conductive bumps 424 formed over exposed redistribution structure 102 surface, and second semiconductor die 426 bonded via conductive features 428 and underfill 430.Search in Eureka ↗ | Key embodiment |
| FIG. 4F | Cross-section of singulated, completed package structure after tape carrier 422 removal, showing the full fan-out package with dies on both sides of redistribution structure 102.Search in Eureka ↗ | Key embodiment |
| FIG. 5A | Cross-section showing alternative embodiment start with redistribution structure 102 on carrier substrate 101 and a second redistribution structure substrate 502 prepared separately.Search in Eureka ↗ | Flow diagram |
| FIG. 5B | Cross-section showing semiconductor die 503 attached via adhesive element 506 (die attach tape) to redistribution structure substrate 502 with conductive pillars 504 facing upward and protective layer 508 formed.Search in Eureka ↗ | Claim support |
| FIG. 5C | Cross-section showing second redistribution structure 510 (insulating layers 512, conductive features 514, conductive elements 516 and 518) formed over protective layer 508 with protective layer 516 added.Search in Eureka ↗ | Key embodiment |
| FIG. 5D | Cross-section showing semiconductor die 520 bonded via conductive features 522, underfill 524, device elements 526 placed, and interconnection structure 528 with module 534 stacked over redistribution structure 510.Search in Eureka ↗ | Key embodiment |
| FIG. 5E | Cross-section showing protective layer 538 formed surrounding semiconductor die 520, device elements 526, interconnection structure 528 and conductive structures 536 over redistribution structure 510.Search in Eureka ↗ | Claim support |
| FIG. 5F | Cross-section of completed package structure after carrier substrate 100 and release film 101 removal with conductive bumps 540 formed, showing the singulated fan-out package with double redistribution layers.Search in Eureka ↗ | Key embodiment |
| FIG. 6A | Cross-section showing similar structure to FIG. 5D provided or received, as a starting point for yet another package process embodiment series with redistribution structure 510 and substrate 502.Search in Eureka ↗ | Flow diagram |
| FIG. 6B | Cross-section showing interposer substrate 602 (board 604, conductive elements 606) stacked over redistribution structure 510, bonded via conductive structures 608, with protective layer 610 formed.Search in Eureka ↗ | Key embodiment |
| FIG. 6C | Cross-section showing module 618 on interconnection structure 612 stacked over interposer substrate 602 via conductive structures 620, underfill 622 formed, and conductive bumps 624 added after carrier removal.Search in Eureka ↗ | Key embodiment |
| FIG. 6D | Cross-section of singulated completed package structure from the FIG. 6 series, showing fan-out package with interposer, two redistribution layers, and conductive bumps 624 on the bottom.Search in Eureka ↗ | Key embodiment |
| FIG. 7A | Cross-section showing redistribution structure 102 on carrier substrate 101 with semiconductor die 702 and device element 708 stacked over it, initiating a further process embodiment series.Search in Eureka ↗ | Flow diagram |
| FIG. 7B | Cross-section showing interposer substrate 710 (board 712, conductive elements 714, protective dielectric layer 718) stacked over redistribution structure 102 via conductive structures 716, with protective layer 718 formed.Search in Eureka ↗ | Key embodiment |
| FIG. 7C | Cross-section showing package flipped and attached to carrier substrate 720 via release film 722, with carrier substrate 100 and release film 101 removed to expose redistribution structure 102 bottom.Search in Eureka ↗ | Flow diagram |
| FIG. 7D | Cross-section showing conductive pillars 724 formed over redistribution structure 102, semiconductor die 726 bonded via conductive features 728, with second die protective layer 730 formed.Search in Eureka ↗ | Key embodiment |
| FIG. 7E | Cross-section showing redistribution structure 732 (insulating layers 734, conductive features 736) formed over protective layer 730 after planarization, with conductive bumps 738 to be formed.Search in Eureka ↗ | Claim support |
| FIG. 7F | Cross-section showing conductive bumps 738 formed over redistribution structure 732, and module 748 on interconnection structure 742 attached to interposer substrate 710 via conductive structures 750, underfill 752.Search in Eureka ↗ | Key embodiment |
| FIG. 7G | Cross-section of singulated completed package after tape carrier 740 removal, showing the full multi-die fan-out package with redistribution structures on both sides and interposer substrate 710 with module 748.Search in Eureka ↗ | Key embodiment |
| FIG. 8A | Cross-section showing redistribution structure 102 formed over carrier substrate 101 with release film 101, initial stage for the FIG. 8 process series using pre-bonded interposer substrate 802.Search in Eureka ↗ | Flow diagram |
| FIG. 8B | Cross-section showing interposer substrate 802 (board 804, conductive elements 806) stacked over redistribution structure 102 via conductive structures 814, with semiconductor die 808 pre-bonded to interposer substrate 802 via conductive features 810 and underfill 812.Search in Eureka ↗ | Key embodiment |
| FIG. 8C | Cross-section showing conductive pillars 820 formed over interposer substrate 802, semiconductor die 822 bonded via conductive features 826 on interposer substrate 802, with device element 830 disposed and protective layer 816 present.Search in Eureka ↗ | Key embodiment |
| FIG. 8D | Cross-section showing protective layer 832 formed surrounding semiconductor die 822, device element 830 and conductive pillars 820 over interposer substrate 802, with planarization applied.Search in Eureka ↗ | Claim support |
| FIG. 8E | Cross-section showing redistribution structure 834 (insulating layers 836, conductive features 838) formed over protective layer 832, with module 846 on interconnection structure 840 stacked and bonded via conductive structures 848, underfill 850.Search in Eureka ↗ | Key embodiment |
| FIG. 8F | Cross-section showing package after removal of carrier substrate 100 and release film 101, with second redistribution structure visible and interconnection structure 840 with module 846 at top, and conductive elements 844, 842 labeled.Search in Eureka ↗ | Flow diagram |
| FIG. 8G | Cross-section of singulated completed FIG. 8 series package structure showing the full multi-die fan-out package with conductive bumps 852 on redistribution structure 102 bottom surface.Search in Eureka ↗ | Key embodiment |
| FIG. 9 | Enlarged cross-sectional view near device element 120 showing electrodes 121a' and 121b' with C-shape profile bonded to pad regions 902a and 902b in redistribution structure 102, with underfill element 904 protecting joints.Search in Eureka ↗ | Claim support |
Claim Architecture Analysis
The patent presents 3 independent claims: Claim 1 (apparatus — package structure), Claim 8 (apparatus — package structure with alternative configuration), and Claim 15 (method — forming a package structure). The 17 dependent claims across 3 independent claims yield a 5.67:1 ratio, below the typical semiconductor packaging norm of 6–10:1, suggesting room for broader fallback claim layers. The dual apparatus/method structure ensures enforcement coverage across both product and process infringement theories, though the absence of a computer-readable medium or system-level claim leaves some infringement vectors open.
Independent Claim Dissection
| Claim | Preamble | Transition | Key Body Elements |
|---|---|---|---|
| Claim 1 | A package structure, comprising: | comprising | a redistribution structure; an interposer substrate disposed over the redistribution structure; a first semiconductor die disposed between the redistribution structure and the interposer substrate; a second semiconductor die partially overlapping the first semiconductor die in a direction perpendicular to a surface of the redistribution structure; a first protective layer surrounding the first semiconductor dieSearch prior art ↗ |
| Claim 8 | A package structure, comprising: | comprising | an interposer substrate; a first semiconductor die; a first protective layer surrounding the first semiconductor die and in contact with the interposer substrate; a second semiconductor die overlapping the first semiconductor die and separated from the first protective layer; a first conductive structure disposed on the first semiconductor die; a first underfill material, wherein the first protective layer and the first conductive structure are separated by the first underfill materialSearch prior art ↗ |
| Claim 15 | A method for forming a package structure, comprising: | comprising | forming conductive features in a dielectric material layer; disposing a first semiconductor die on a first side of the dielectric material layer; disposing a second semiconductor die on a second side of the dielectric material layer, wherein a projection of the first semiconductor die over the dielectric material layer covers a part of a projection of the second semiconductor die over the dielectric material layer; forming a first protective layer in contact with the first semiconductor dieSearch prior art ↗ |
Claim Dependency Tree
| Metric | This Application | Semiconductor Packaging Norm |
|---|---|---|
| Total claims | 20 | 15 – 30 |
| Independent claim count | 3 | 2 – 4 |
| Dependent : Independent ratio | 5.67 : 1 | 6 – 10 : 1 |
| Method claims present? | Yes — Claim 15 | Common |
| System / apparatus claims? | Yes — Claims 1, 8 | Always |
Drafting Quality Signals
The patent demonstrates strong structural clarity in Claims 1 and 8, with each independent claim reciting well-defined geometric relationships — the partial overlap limitation in Claim 1 and the underfill separation limitation in Claim 8 — that directly distinguish over prior packaging structures. However, the relatively thin dependent claim set (only 17 dependent claims across 3 independent claims) and the absence of material composition claims for the protective layer or conductive features creates unnecessary prosecution vulnerability if the geometric claim elements face anticipation rejections.
Strategic Intent Scorecard
Multi-dimensional assessment of this application's patent strategy quality, based on claim structure, specification depth, and prosecution positioning.
3 Critical Gaps in This Claim Set
A senior-attorney lens on the three highest-priority structural weaknesses — what each exposes in prosecution and litigation, and what a stronger filing would have done differently.
3 Critical Gaps in This Claim Set
See the full attorney-level analysis of what this application leaves unprotected — and how to draft it more defensively for your own filings.
US 2024/0203893 A1 — key questions answered
Disclaimer: This analysis is generated by PatSnap Eureka AI based on publicly available patent data from the USPTO. It does not constitute legal advice and should not be relied upon as such. Patent data may be subject to change as prosecution progresses. Scores and assessments reflect automated analysis and may not capture all relevant legal or technical nuances. Always consult a qualified patent attorney for formal legal opinions on patentability, freedom to operate, or infringement.
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