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Run your analysis now →Filing growth compares 2021 (23 records) with 2024 (17) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field. Top-5 share is the combined record count of the five largest assignees divided by all 357 records in scope (CR5), not by the ranked leaders only.
Area selective deposition (ASD) covers methods that grow or inhibit film growth on specific regions of a substrate without a full mask-and-etch cycle — using self-assembled monolayers, selective inhibitors, or growth-rate differentials between exposed materials. The dataset in scope spans 357 published records from 2015 through the 2026-07-31 cut-off, drawn from a search string that combines core ASD terms with bottom-up fill, edge placement error and selectivity-loss language.
Filing is not evenly spread. A small group of assignees — spanning foundries, deposition-tool makers and a research university — account for the majority of records, while a long tail files once or twice. The technology composition leans hard on semiconductor device classes, which is expected given ASD's primary use in advanced logic and memory patterning, but the secondary classes show where the same inhibitor and monolayer chemistry is being adapted for other film stacks.
Pick a task. Every answer cites the patents behind it.
The chart below tracks published records by year against the eight leading IPC subclasses found in the corpus. Both series use the same 357-record base described above.
Annual filings rose to a peak of 45 records in 2023. The 2021-to-2024 span moved from 23 to 17 records, a -26% change; treat 2025 and 2026 as undercounted rather than declining, since publication typically lags filing by roughly 18 months.
H01L (semiconductor devices) appears in 84.3% of the 357 records, far ahead of H10P (26.9%), C23C coating and surface deposition (21.0%), and H10D (19.6%). Because a single record can carry several IPC codes, these shares sum to well over 100% and should be read as overlap, not as a partition of the field.
Shares are the percentage of the 357 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.
This page is one run against one query. Ask Eureka your own question about area selective deposition and every answer comes back with the patent numbers behind it.
Try EurekaProvided is a method for manufacturing integrated circuit (IC) devices including the operations of forming a first metal pattern (Mx) on a semiconductor substrate, forming a first via pattern (Vx) on the first metal pattern using an area selective deposition (ASD) that includes first and second vias formed adjacent opposed edges or terminal portions of the first metal pattern, and forming a second metal pattern (Mx+1) on the first via pattern with substantially no pattern overlap to form a zero enclosure and wherein a pair of adjacent vias are separated by a distance corresponding to the smallest end-to-end metal pattern spacing permitted under a set of design rules applied during the design.Filed by Taiwan Semiconductor Manufacturing Company, published 2023-09-07.


| # | Publication no. | Patent title | Citations |
|---|---|---|---|
| 1 | US20050167742A1 | Power semiconductor devices and methods of manufacture | 722 |
| 2 | US20020130311A1 | Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors and fabric… | 639 |
| 3 | US7345342B2 | Power semiconductor devices and methods of manufacture | 421 |
| 4 | WO2002017362A2 | Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors and fabric… | 273 |
| 5 | US20060214221A1 | Power semiconductor devices and methods of manufacture | 249 |
| 6 | WO2005065385A2 | Power semiconductor devices and methods of manufacture | 183 |
| 7 | US20060214222A1 | Power semiconductor devices and methods of manufacture | 181 |
| 8 | US7211464B2 | Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors and fabric… | 151 |
| 9 | US8143124B2 | Methods of making power semiconductor devices with thick bottom oxide layer | 149 |
| 10 | US20200083080A1 | Self-aware and correcting heterogenous platform incorporating integrated semiconductor processing modules and… | 132 |
Citation counts accumulate over time, so older records dominate this table by construction — read it as a map of influential prior art, not a ranking of current technical importance.
Each row carries its publication number; clicking a row searches Eureka by that number.
When you want the answer in the next five minutes.
The agent works the prompt against patents and technical literature, citing every source.
Run your analysis now →When it has to run inside your own pipeline.
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Browse MCP servers →Three figures matter most for anyone deciding where to file or license in ASD: how concentrated the field already is, how the growth curve is bending, and where citation-heavy prior art actually sits.
The five leading assignees combined account for 195 of the 357 records in scope, or 54.6% of the field. The top ten extend that to 267 records, 74.8% of the total. That leaves a long tail of single- or double-filing entrants working around a densely claimed core.
Filings rose to a peak of 45 records in 2023, then the comparable 2021-to-2024 window moved from 23 down to 17 records, a -26% change. Treat 2025 and 2026 counts as provisional rather than confirming a further decline, since publication lag understates the most recent one to two years.
The most-cited records in this corpus concern power semiconductor devices and doped elongated semiconductor growth, both filed well before the ASD-specific search terms became common claim language. That reflects how citation counts favour age within a searched corpus, not that these are the most relevant filings to current ASD work.
H01L covers the large majority of records, consistent with ASD's core use in transistor and interconnect patterning. Smaller but non-trivial shares in C30B crystal growth (10.1%) and H10K organic semiconductors (9.0%) mark where the same inhibitor chemistry is being extended beyond logic manufacturing.
Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to area selective deposition, with the prior art for and against each one.
The assignee ranking returned by the data endpoint covers 100 companies counted in records — this is the full ranking available, not a curated top-50 or top-100 list. A handful of names dominate the count while most of the ranking files only once or twice.
The leading assignee holds 64 records, more than double the fifth-place count of 31. That gap suggests a foundry-scale filer treating ASD as core process IP rather than an exploratory line.
Fifth place holds 31 records and tenth place holds 9 — a sharper decline than the top-five-to-top-ten aggregate suggests on its own. Firms entering around rank six to ten are filing at a fraction of the leader's rate.
Ten co-assignee pairs appear in the data, with the strongest links tied to the same three-person inventor cluster repeating across pairings at a count of 12 each. That pattern points to a specific internal team rather than broad industry co-development.
| Assignee | Recent year | YoY |
|---|---|---|
| Intel Corporation | 0 | -100% |
| President and Fellows of Harvard College | 0 | — |
| Tokyo Electron Limited | 0 | — |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 0 | -100% |
| Applied Materials, Inc. | 0 | -100% |
| Fairchild Semiconductor | 0 | — |
| NELSON SHELBY F | 0 | — |
| LEVY DAVID H | 0 | — |
The figures above describe where filing has already happened. Deciding where to file next, or how to design around a blocking claim, needs a closer read of specific families.
With one assignee holding 64 of 357 records, a freedom-to-operate check against that portfolio should come before committing engineering resources to a similar inhibitor or monolayer approach.
Explore the leader's portfolio in Eureka →OLED-adjacent inhibitor chemistry and crystal-growth applications show thinner filing density than the H01L core. Confirm whether your process falls inside or outside that thinner-claimed space.
Run a white-space search in Eureka →Because publication lags filing by roughly 18 months, the apparent slowdown after 2023 will firm up over the next reporting cycles. Re-check the trend once 2025 filings finish publishing.
Set a filing alert in Eureka →Area selective deposition (ASD) claims describe methods for depositing or inhibiting film growth on chosen regions of a substrate without a full lithographic mask-and-etch step, typically using self-assembled monolayers or selective growth inhibitors. This distinguishes ASD claims from general thin-film deposition, which usually covers blanket film formation. In this dataset, the search string combines ASD-specific terms like deposition inhibitor and selective growth with process markers such as bottom-up fill, non-growth area and edge placement error, which is how the 357 records in scope were identified.
The assignee ranking in this dataset covers 100 companies counted by record, with one leading assignee holding 64 records — more than double the fifth-place count of 31. The top five assignees combined account for 54.6% of all 357 records in scope, and the top ten account for 74.8%. That leaves a long tail of assignees filing only one or two records each, so the field is concentrated at the top but not closed to new entrants.
Filings rose year over year to a peak of 45 records in 2023. Looking at the most recent span that can be treated as complete, 2021 to 2024, the count moved from 23 to 17 records, a -26% change. Because patent publication typically lags filing by around 18 months, the lower counts showing for 2025 and 2026 are still filling in and should not be read as confirmation of a further decline.
H01L, the general semiconductor device class, appears in 84.3% of the 357 records in scope, reflecting ASD's core use in transistor and interconnect patterning. Coating and surface deposition (C23C) appears in 21.0% of records, and crystal growth (C30B) in 10.1%, while organic semiconductor applications (H10K) sit at 9.0%. Since a single record can carry multiple IPC codes, these percentages overlap rather than sum to a whole, and the smaller categories mark where ASD chemistry is being adapted beyond mainstream logic manufacturing.
Based on IPC composition, branches like organic semiconductor applications (H10K, 9.0% of records) and material analysis and testing (G01N, 8.7%) carry far fewer filings than the dominant H01L class, suggesting thinner claim density there relative to core logic-process ASD work. Sub-areas such as inhibitor chemistry for OLED stacks, selectivity-loss in-line detection, and etch-back correction for edge placement error show up as gate points worth checking before assuming the space is fully claimed. A proper freedom-to-operate search against the specific assignee portfolios active in those classes is still the necessary next step.
Go past this page: query the whole area selective deposition corpus yourself, in your own scope.
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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.
Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.
Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company's registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.
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