Chamber Coatings Patents: Top Companies & Filing Trends 2026
Chamber Coatings and Plasma Resistant Parts Patents
One filer holds 650 of 800 records in scope, and the top five together account for 92.0% of all filings — this is a field with a dominant incumbent, not a fragmented one. Annual filings climbed to a peak of 91 in 2017. The 2021-to-2024 window, the most recent span with complete publication, shows filings falling from 34 to 21 — a -38% move. Years after 2024 are still being backfilled by publication lag and should not be read as a continued decline.
- 1APPLIED MATERIALS INC650
- 2LAM RES CORP49
- 3MOORE JOHN CLEAON15
- 4FM IND INC11
- 5TOKYO ELECTRON LTD11
See the full chamber coatings and plasma resistant parts analysis in Eureka
- The complete ranking, not just the top five
- Every IPC branch with its share of the corpus
- The most-cited records, and where claim space is still thin
Common questions on this landscape
Who holds the most patents on plasma-resistant chamber coatings?
One assignee holds 650 of the 800 records in this dataset, and the top five assignees combined account for 92.0% of all records in scope. That level of concentration means the field behaves more like a single-incumbent market than a competitive race between several similarly sized filers. Anyone assessing freedom to operate should start by mapping the leader’s claim scope before looking at the rest of the ranking.
Is patent filing in this field growing or slowing down?
Filings peaked at 91 in 2017 and, over the most recent complete window, fell from 34 in 2021 to 21 in 2024 — a -38% change. Because patent publication typically lags the actual filing date by around 18 months, the 2025 and 2026 figures in any dataset are still incomplete and should not be read as evidence of a continued slowdown. The honest read is that documented volume has eased off its 2017 peak, with the true current trend not yet visible.
What technology areas dominate chamber coating patents?
C23C, the IPC subclass covering coating and surface deposition, appears in 60.3% of the 800 records, making it the single largest technical category. H01L semiconductor-device claims (39.0%) and H01J electron-and-discharge-tube claims (33.9%) follow, with C04B ceramics at 17.0%. Because a single patent record can carry more than one IPC class, these shares add up to well over 100% and should be read as overlapping coverage rather than a strict breakdown.
Disclaimer. This analysis is based on Patsnap Eureka data drawn from a limited snapshot of global patent records and is provided for general information and reference only. Patent data carries inherent limitations — recent filings are under-counted because of publication lag, counts may be on a record or family basis, classification and applicant-name data may contain errors or duplicates, and the underlying search query defines the scope shown — so the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
Nothing here is an exhaustive prior-art, novelty, freedom-to-operate or validity search, nor does it constitute legal, financial or professional advice, and it should not be relied upon as such. Verify independently and review with qualified patent and legal professionals before acting on it.
Method: Filing trend and technology composition. Derived from a Patsnap search on Chamber Coatings and Plasma Resistant Parts covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish. Every share divides by all records in scope. Data: Patsnap Eureka. See the full landscape report.