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Complementary FET Patents: Who Leads, Where the Gaps Are 2026

Complementary FET Patents: Who Leads, Where the Gaps Are 2026
https://www.patsnap.com/resources/blog/rd-blog/complementary-fet-transistor-architecture-patent-landscape/ · Patsnap · data cut-off 2026-07-31 · downloaded from the live page
Semiconductors & Microelectronics · Patent Landscape
Complementary FET Transistor Architecture Patents
  • Small, concentrated field. Only 41 patent families exist worldwide across the stacked nFET/pFET architecture search, with filing peaking at 23 in 2023 and no clear year-on-year growth trend before that.
  • US-centred filing. 18 of the tracked records entered via the United States receiving office, ahead of Europe (9) and the WIPO/PCT route (8), with China, Germany and India each in single digits.
  • Most cited work is process-focused, not device-only. The highest-cited record concerns sequential 3D logic fabrication temperature control rather than the transistor stack itself, suggesting integration process claims currently carry more weight than architecture claims alone.
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41
Published Records
-38%
Filing Growth 2021→2024
US
Leading Jurisdiction
10
Active Filers Ranked

Filing growth compares 2021 (8 records) with 2024 (5) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field.

Published byPatsnap Research··7 min readSourced from Patsnap Eureka
Overview

What the CFET patent record actually shows

Complementary FET (CFET) architecture stacks an nFET directly over a pFET within a single footprint, and the patent record around it is still small relative to mainstream transistor technologies. Across the tracked window, 41 patent families match a search built around stacked nFET/pFET architecture, monolithic CFET, and sequential CFET claim language, filtered to the semiconductor-device IPC classes most relevant to gate and junction structure. That is a narrow, still-forming field rather than a mature one, and filing activity reflects it: growth from 2017 was effectively flat until a peak in 2023 at 23 filings, with no single year since showing sustained acceleration.

Because publication typically lags filing by around 18 months, the most recent years in any CFET trend chart will understate real filing activity — 2025 and 2026 figures should be read as provisional, not as a slowdown.

Filing activity by year, 2017-2026
  1. 1Interuniversity Microelectronics Centre (IMEC)9
  2. 2Taiwan Semiconductor Manufacturing Company Limited (TSMC)8
  3. 3Applied Materials, Inc.6
  4. 4QUALCOMM Incorporated5
  5. 5Intel Corporation5
  6. 6Huawei Technologies Co., Ltd.5
  7. 7Tokyo Electron Limited5
  8. 8Semiconductor Manufacturing International (Beijing) Corporation (SMIC Beijing)1
  9. 9Semiconductor Manufacturing International (Shanghai) Corporation (SMIC Shanghai)1
  10. 10Tokyo Electron U.S. Holdings, Inc.1
Source: Patsnap Eureka. Assignee ranking and totals. Derived from a Patsnap search on Complementary FET Transistor Architecture covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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The data

Filing trends and technology composition

The IPC spread and receiving-office mix point to a technology still concentrated in a handful of jurisdictions and a handful of adjacent subclasses, rather than one spread widely across the semiconductor stack.

A flat-to-declining filing curve after a 2023 peak

Filings were at zero as recently as 2017, rose gradually, and peaked at 23 in 2023; the 2022 midpoint of 5 shows the field was still small just before that peak, and later years show no confirmed continuation of growth once publication lag is accounted for.

A flat-to-declining filing curve after a 2023 peak0613192502017201820192020202120222320232024202502026Most recent year is partial — publication lag means later filings are not yet visible.

H01L dominates, with H10D and H10W as the next tier

Every tracked record sits under H01L (semiconductor devices), and a meaningful secondary cluster sits in H10D (general semiconductor devices, 9 records) and H10W (7 records); single records touching welding/soldering (B23K), pulse/logic circuits (H03K) and memory device manufacture (H10B) mark the outer edge of where CFET claims currently reach.

H01L dominates, with H10D and H10W as the next tierH01L · Semiconductor devices41100.0%H10D · Semiconductor devices (general)922.0%H10W717.1%B23K · Welding, soldering & brazing12.4%H03K · Pulse technique & logic circui…12.4%H10B · Memory device manufacture12.4%

Shares are the percentage of the 41 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.

Source: Patsnap Eureka. Filing trend and technology composition. Derived from a Patsnap search on Complementary FET Transistor Architecture covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.

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Key patents

The most-cited records in this dataset

Representative record
EP4569539A12025-06-18

Monolithic 3D CFET circuits and manufacturing methods (EP4569539A1)

QUALCOMM INCORPORATED

Filed by QUALCOMM INCORPORATED and published 2025-06-18, this record describes monolithic three-dimensional complementary field-effect transistor circuits together with their manufacturing method — squarely inside the monolithic CFET branch of this landscape.Representative of the monolithic (single-tier, sequentially processed) CFET filing route rather than the sequential-wafer-bonding alternative.

EP4569539A1 — patent drawing 1EP4569539A1 — patent drawing 2
View full record
Top-cited CFET patent families
#Publication no.Patent titleCitations
1US20220122892A1Method of 3D logic fabrication to sequentially decrease processing temperature and maintain material thermal …26
2US20230178435A1Complementary FET (CFET) devices and methods21
3US20230377998A1Method of forming confined growth s/d contact with selective deposition of inner spacer for cfet19
4US20230326925A1Monolithic complementary field-effect transistors having carbon-doped release layers17
5US20250048690A1A complementary field-effect transistor device14
6US20230178554A1Complementary Field-Effect Transistor Device11
7US20240047455A1Monolithic three-dimensional (3D) complementary field effect transistor (CFET) circuits and method of manufac…11
8US20240222429A1Semiconductor device structure and methods of forming the same9
9US20240321646A1Threshold voltage tuning using a multiple dipole loop process for CFET devices5
10CN115132727A半导体结构及其形成方法4

Citation counts are drawn from the searched corpus only and favour older filings; treat them as a signal of influence within this dataset, not as a current-importance ranking.

Patent titles are shown in the language they were filed in, not translated, so that each record stays verifiable against the original filing — a translated title will not match in Eureka or in any national register. Each row carries its publication number; clicking a row searches Eureka by that number.

Source: Patsnap Eureka. Citation counts and representative records. Derived from a Patsnap search on Complementary FET Transistor Architecture covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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Insights

What the citation and filing pattern signals

Reading the top-cited records alongside the filing curve suggests process integration, not the basic stacked-transistor concept, is where current CFET patent value concentrates.

Citation leader
26 citations
US20220122892A1

Process sequencing outranks pure architecture claims

The single most-cited record in this dataset claims a method for sequentially decreasing processing temperature during 3D logic fabrication — a thermal-budget process claim, not a transistor-stack architecture claim. That it leads the citation table suggests integration-process patents are proving more foundational, or at least more frequently referenced, than device-geometry patents alone.

Based on in-corpus citation counts
Peak filing year
23 filings
2023

A short, sharp filing peak rather than sustained growth

Filing rose from zero in 2017 to a peak of 23 in 2023, roughly quadruple the 2022 midpoint of 5. A single peak year followed by a flatter trend is more consistent with a wave of early architecture claims being staked out than with an industry still in an accelerating filing race.

2026 figures are partial due to publication lag
Filing geography
18 of 41
United States filings

US filing dominance, with PCT as the main alternate route

Eighteen of the 41 tracked families entered via the United States receiving office, more than double the next-largest single office (EPO, 9). The WIPO/PCT route accounts for 8 families, indicating many applicants are keeping options open for later national-phase entry rather than filing directly in multiple jurisdictions.

Receiving office counts, current dataset
Collaboration signal
3 co-assignee pairs
across the dataset

Collaboration is rare and mostly regional

Only three co-assignee pairings appear in the dataset, the strongest linking an inter-university microelectronics centre with a Chinese telecoms equipment maker. Co-filing is not yet a common strategy in this niche — most families carry a single assignee.

Strongest pair: 3 shared filings
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Co-filing pairs are thin on the ground
AssigneeCo-assigneeShared families
Interuniversity Microelectronics Centre (IMEC)Huawei Technologies Co., Ltd.3
Tokyo Electron LimitedTokyo Electron U.S. Holdings, Inc.1
Semiconductor Manufacturing International (Beijing) Corporation (SMIC Beijing)Semiconductor Manufacturing International (Shanghai) Corporation (SMIC Shanghai)1

With only three co-assignee pairs identified and the strongest at just 3 shared filings, CFET patenting so far looks like largely independent corporate R&D rather than joint-venture-driven filing.

Source: Patsnap Eureka. Co-assignee relationships and derived observations. Derived from a Patsnap search on Complementary FET Transistor Architecture covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Players

Who is filing, and how recently

The named assignees span foundries, IDMs, equipment suppliers and a university-linked microelectronics centre, but recent-year momentum is muted across the board — every listed assignee shows zero filings in the latest tracked year, consistent with publication lag rather than a genuine pullback.

Leading filer type
41 families
total dataset size

Foundries and IDMs anchor the field

The assignee list is dominated by large-scale chipmakers and foundries rather than fabless design houses, matching the process-heavy, integration-focused nature of CFET claims seen in the citation leaders.

Ranking rendered separately
Equipment suppliers
H10D + H10W = 16
secondary IPC records

Equipment and tooling players sit close behind device makers

Semiconductor equipment suppliers appear among the tracked assignees, reflecting that CFET's tight nFET/pFET stacking depends as much on deposition and etch tooling claims as on the transistor geometry itself.

See H10D/H10W composition
Co-filing pattern
3 pairs
co-assignee pairs

Cross-border collaboration is the exception

The one multi-filing co-assignee pair spans an inter-university microelectronics centre and a major Chinese telecoms equipment maker; other pairs link a Japanese equipment group with its US holding entity, and a Chinese foundry with its own subsidiary — internal or regional links, not broad industry alliances.

Strongest pair: 3 shared filings
🔍
Under-claimed sub-areas worth watching
Sub-branches with thin current filing density, based on the IPC and citation spread in this dataset
Confined source/drain contact formation for CFETCarbon-doped sacrificial release layersSequential low-thermal-budget 3D logic integrationInner-spacer selective deposition for stacked gatesMonolithic CFET wafer-bonding alternatives
Rank all filers by momentum →
Recent-year filing momentum by assignee
AssigneeRecent yearYoY
Interuniversity Microelectronics Centre (IMEC)0
Taiwan Semiconductor Manufacturing Company Limited (TSMC)0
Applied Materials, Inc.0
QUALCOMM Incorporated0
Intel Corporation0
Huawei Technologies Co., Ltd.0
Tokyo Electron Limited0
Semiconductor Manufacturing International (Beijing) Corporation (SMIC Beijing)0
Source: Patsnap Eureka. Assignee-level momentum. Derived from a Patsnap search on Complementary FET Transistor Architecture covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
What's next

Where to take this analysis

The filing and citation pattern raises follow-up questions that are easier to answer with claim-level search than with aggregate counts alone.

Map the monolithic vs. sequential CFET split

The dataset mixes monolithic (single-tier, sequential low-temperature processing) and wafer-bonded sequential CFET approaches under one search string; separating them would show which route is actually being claimed more heavily.

Explore in Eureka →

Track the process-vs-architecture citation gap

Because the top-cited record is a thermal-budget process claim rather than a device-geometry claim, a deeper claim-scope comparison could clarify whether new entrants should target process integration or structural geometry first.

Run a claim comparison in Eureka →

Watch publication-lag-affected recent years

2025 and 2026 filings are undercounted in this snapshot; revisiting the trend in a future cut will reveal whether the 2023 peak was a one-off or the start of a new filing wave.

Set up monitoring in Eureka →
Source: Patsnap Eureka. Forward-looking reading of the same dataset. Derived from a Patsnap search on Complementary FET Transistor Architecture covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
FAQ

Common questions about CFET patents

Answers are grounded in the same dataset. Derived from a Patsnap search on Complementary FET Transistor Architecture covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.

Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.

Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.

Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company’s registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.

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