https://www.patsnap.com/resources/blog/rd-blog/doping-metrology-and-junction-profiling-patent-landscape/ · Patsnap · data cut-off 2026-07-31 · downloaded from the live page
Patent Landscape · Implantation & Annealing
Doping Metrology and Junction Profiling Patents: Who Leads and Where the Field Is Still Open
  • Top 5 filers hold 30.9% of the field. 1,203 of 3,896 records sit with just five assignees, with a long tail of single- and few-filing entrants behind them.
  • Filings peaked in 2022 at 236. The 2021→2024 span shows a 29% pullback (197 to 139), though 2025-2026 counts are still filling in under publication lag.
  • Semiconductor and analytical classes dominate jointly. H01L appears in 44.3% of records and G01N in 25.4%, showing the field sits at the seam between device fabrication and material analysis.
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3,896
Published Records
31%
Top-5 Share of All Records
-29%
Filing Growth 2021→2024
US
Leading Jurisdiction

Filing growth compares 2021 (197 records) with 2024 (139) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field. Top-5 share is the combined record count of the five largest assignees divided by all 3,896 records in scope (CR5), not by the ranked leaders only.

Published byPatsnap Research··7 min readSourced from Patsnap Eureka
Overview

What this patent set covers

Doping metrology and junction profiling patents cover the instruments and methods used to measure where dopant atoms end up inside a semiconductor and how sharply a junction is defined once they get there. The search spans secondary ion mass spectrometry, spreading resistance and sheet resistance mapping techniques, plus the calibration problems that sit underneath all of them: matrix effects, reference samples and profile depth resolution. It is a measurement field grafted onto a device field — most records also carry a semiconductor-device classification, not just an analytical-instrument one.

The dataset spans 3,896 published records filed between 2015 and 2026, with the most recent year necessarily undercounted because publication trails filing by roughly a year and a half. Family-level counts, rather than raw document counts, are used throughout the ranking so that continuation filings and multi-jurisdiction copies of the same invention are not double-counted.

Filing activity and technology composition, 2015-2026
  1. 1SEMICON ENERGY LAB CO LTD404
  2. 2FUJI ELECTRIC CO LTD277
  3. 3KK TOSHIBA228
  4. 4TOSHIBA ELECTRONICS DEVICES & STORAGE CORPORARTION180
  5. 5MICROMASS UK LTD114
  6. 6ELEMENT SIX TECH LTD77
  7. 7ALMAC DIAGNOSTICS LIMITED62
  8. 8THE BROAD INST INC60
  9. 9MASSACHUSETTS INST OF TECH58
  10. 10CANON KK55
Source: Patsnap Eureka. Assignee ranking and totals. Derived from a Patsnap search on Doping Metrology and Junction Profiling covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
The Data

Filing trend and technology composition

Two views of the same 3,896 records: how filing activity has moved year over year, and which IPC subclasses carry the work.

Filing trend, 2017-2026

Filings rose from 164 in 2017 to a peak of 236 in 2022, then eased to 139 by 2024 — a 29% decline over the 2021-2024 span. 2025 and 2026 figures are still incomplete due to publication lag and should not be read as a continued fall.

Filing trend, 2017-202606312518825016420172018201920202021236202220232024202592026Most recent year is partial — publication lag means later filings are not yet visible.

IPC subclass distribution

H01L (semiconductor devices) appears in 44.3% of the 3,896 records, ahead of G01N (material analysis and testing) at 25.4% and H10D (semiconductor devices, general) at 19.2%. Because records commonly carry more than one class, these shares sum to well over 100% and each is read against the full record count, not against one another.

IPC subclass distributionH01L · Semiconductor devices1,72544.3%G01N · Material analysis & testing99025.4%H10D · Semiconductor devices (general)74919.2%H10P52013.3%C12Q · Measuring & testing involving …3248.3%A61K · Medicinal preparations3037.8%H01J · Electron & discharge tubes2977.6%H10B · Memory device manufacture2797.2%Other2,72970.0%

Shares are the percentage of the 3,896 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.

Source: Patsnap Eureka. Filing trend and technology composition. Derived from a Patsnap search on Doping Metrology and Junction Profiling covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.

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Representative Filing

A representative record

Representative Patent
US11430647B22022-08-30

Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry

NOVA MEASURING INSTRUMENTS, INC.

Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. A SIMS system includes a sample stage with a primary ion beam directed to it, an extraction lens providing a low extraction field for secondary ions, and a magnetic sector spectrograph coupled to the extraction lens, itself combining an electrostatic analyzer with a magnetic sector analyzer.Filed by Nova Measuring Instruments, published 2022-08-30.

US11430647B2 — patent drawing 1US11430647B2 — patent drawing 2
View full record
Most-cited records in this set
#Publication no.Patent titleCitations
1US6287988B1Semiconductor device manufacturing method, semiconductor device manufacturing apparatus and semiconductor dev…578
2US20090289300A1Semiconductor device and method for producing the same545
3US20160190137A1Finfet structure and method for manufacturing thereof536
4US20060255341A1Bonded intermediate substrate and method of making same470
5WO2005000324A2Colloidal silver composition having antimicrobial properties413
6US20110062436A1Transistor and display device412
7US7732301B1Bonded intermediate substrate and method of making same406
8US20080248597A1Methods for determining a dose of an impurity implanted in a semiconductor substrate and an apparatus for same401
9US20090278233A1Bonded intermediate substrate and method of making same322
10US20120267681A1Semiconductor device and method for manufacturing semiconductor device216

Citation counts accumulate over time, so older records lead this table by default — treat them as markers of influence on the field rather than as evidence of current relevance.

Each row carries its publication number; clicking a row searches Eureka by that number.

Source: Patsnap Eureka. Citation counts and representative records. Derived from a Patsnap search on Doping Metrology and Junction Profiling covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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Insights

What the numbers say

Three patterns emerge from the filing and citation data that matter for anyone deciding where to file next.

Concentration
30.9%
of 3,896 records held by top 5

The top of the field is dense, the rest is thin

Five assignees hold 1,203 of the 3,896 records in scope, and the top ten extend that to 38.9%. Below the tenth-ranked filer at 55 records, the ranking falls off into a long tail of single- and few-filing entrants — a pattern that rewards a freedom-to-operate search focused narrowly on the leaders rather than a broad sweep.

Based on the 100-company assignee ranking
Momentum
-29%
2021 to 2024 filing change

Filing volume has pulled back from its 2022 peak

Annual filings rose to 236 in 2022 before easing to 139 by 2024, a 29% decline over that three-year window. Because 2025-2026 records are still arriving under normal publication lag, this should be read as a plateau after a filing surge rather than a technology in decline.

2021-2024 is the last complete comparison window
Composition
44.3% / 25.4%
H01L vs G01N share of records

Device and analytical claims overlap heavily

H01L semiconductor-device claims and G01N material-analysis claims co-occur across a large share of the corpus, confirming that most inventions here combine a measurement method with a specific device or process context rather than claiming a standalone instrument.

Class shares sum above 100% because records carry multiple IPC codes
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Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to doping metrology and junction profiling, with the prior art for and against each one.

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Co-filing patterns
AssigneeCo-assigneeShared families
Toshiba CorporationToshiba Electronic Devices & Storage Corporation178
The Broad Institute, Inc.Massachusetts Institute of Technology44
The Broad Institute, Inc.General Hospital Corporation19
The Broad Institute, Inc.Brigham and Women's Hospital19
Massachusetts Institute of TechnologyBrigham and Women's Hospital19
Massachusetts Institute of TechnologyGeneral Hospital Corporation18
The Broad Institute, Inc.Dana-Farber Cancer Institute, Inc.16
Element Six Technologies Ltd.TWITCHEN DANIEL JAMES8

Ten co-assignee pairs appear in the data; the strongest links a device manufacturer's parent and spin-off entity, and separate pairs connect a research institute to an affiliated university and hospital system — a sign that some of this work moves between related legal entities rather than across arm's-length collaborations.

Source: Patsnap Eureka. Co-assignee relationships and derived observations. Derived from a Patsnap search on Doping Metrology and Junction Profiling covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Players

Who is filing, and where the gaps sit

The ranked leaders combine large device manufacturers with specialist metrology and life-sciences filers, but recent-year momentum has cooled across the board.

Leader
404
records

A single filer holds the largest share

The top-ranked assignee accounts for 404 of the 3,896 records in scope, well ahead of the fifth-place filer at 114 — a gap wide enough that displacing the leader on volume alone is unrealistic for a new entrant.

Family-level count
Momentum
-88% to -100%
YoY change, leading filers

Recent-year activity has dropped across the leaders

Several of the most active historical filers show sharp year-on-year declines in the latest year, including drops of -88% and -100%. Given publication lag, part of this is an artefact of incomplete recent data rather than a genuine stop in filing.

Latest-year figures are provisional
Cross-sector reach
8 IPC subclasses
spanning devices to diagnostics

The field touches semiconductor, life-sciences and memory filers alike

Beyond the core semiconductor classes, the corpus also carries meaningful shares in C12Q and A61K, reflecting metrology and reference-sample techniques borrowed from diagnostics and pharmaceutical measurement work.

8.3% and 7.8% of records respectively
🔍
Under-claimed branches worth a closer look
These sub-areas show thinner density in the current filing set relative to the core device and instrument classes.
Matrix-effect correction modelsReference-sample calibration standardsCarrier illumination depth profilingSheet resistance mapping for compound substratesCross-platform SIMS-to-SRP correlation
Rank all filers by momentum →
Recent-year filing momentum by assignee
AssigneeRecent yearYoY
Fuji Electric Co., Ltd.4-88%
Semiconductor Energy Laboratory Co., Ltd.0-100%
Toshiba Corporation0-100%
Toshiba Electronic Devices & Storage Corporation0-100%
Micromass UK Ltd.0—
Almac Diagnostics Limited0—
The Broad Institute, Inc.0—
Massachusetts Institute of Technology0-100%
Source: Patsnap Eureka. Assignee-level momentum. Derived from a Patsnap search on Doping Metrology and Junction Profiling covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
What's Next

Where to take this next

The dataset points to a field with a concentrated top and thinner claim density in a few adjacent measurement branches.

Map the leader's claim boundaries

With the top filer holding 404 of 3,896 records, a targeted claim-chart review of its core filings will tell you more about freedom to operate than a broad landscape sweep.

Explore claims in Eureka →

Test the under-claimed branches

Matrix-effect correction and cross-platform correlation between SIMS and spreading-resistance data show thinner filing density than the core device classes — worth a focused prior-art check before drafting.

Run a white space search →
Source: Patsnap Eureka. Forward-looking reading of the same dataset. Derived from a Patsnap search on Doping Metrology and Junction Profiling covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
FAQ

Common questions on doping metrology patents

Answers are grounded in the same dataset. Derived from a Patsnap search on Doping Metrology and Junction Profiling covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.

Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.

Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.

Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company's registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.

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