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When you want the answer in the next five minutes.
The agent works the prompt against patents and technical literature, citing every source.
Run your analysis now →Filing growth compares 2021 (197 records) with 2024 (139) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field. Top-5 share is the combined record count of the five largest assignees divided by all 3,896 records in scope (CR5), not by the ranked leaders only.
Doping metrology and junction profiling patents cover the instruments and methods used to measure where dopant atoms end up inside a semiconductor and how sharply a junction is defined once they get there. The search spans secondary ion mass spectrometry, spreading resistance and sheet resistance mapping techniques, plus the calibration problems that sit underneath all of them: matrix effects, reference samples and profile depth resolution. It is a measurement field grafted onto a device field — most records also carry a semiconductor-device classification, not just an analytical-instrument one.
The dataset spans 3,896 published records filed between 2015 and 2026, with the most recent year necessarily undercounted because publication trails filing by roughly a year and a half. Family-level counts, rather than raw document counts, are used throughout the ranking so that continuation filings and multi-jurisdiction copies of the same invention are not double-counted.
Two views of the same 3,896 records: how filing activity has moved year over year, and which IPC subclasses carry the work.
Filings rose from 164 in 2017 to a peak of 236 in 2022, then eased to 139 by 2024 — a 29% decline over the 2021-2024 span. 2025 and 2026 figures are still incomplete due to publication lag and should not be read as a continued fall.
H01L (semiconductor devices) appears in 44.3% of the 3,896 records, ahead of G01N (material analysis and testing) at 25.4% and H10D (semiconductor devices, general) at 19.2%. Because records commonly carry more than one class, these shares sum to well over 100% and each is read against the full record count, not against one another.
Shares are the percentage of the 3,896 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.
This page is one run against one query. Ask Eureka your own question about doping metrology and junction profiling and every answer comes back with the patent numbers behind it.
Try EurekaSystems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. A SIMS system includes a sample stage with a primary ion beam directed to it, an extraction lens providing a low extraction field for secondary ions, and a magnetic sector spectrograph coupled to the extraction lens, itself combining an electrostatic analyzer with a magnetic sector analyzer.Filed by Nova Measuring Instruments, published 2022-08-30.


| # | Publication no. | Patent title | Citations |
|---|---|---|---|
| 1 | US6287988B1 | Semiconductor device manufacturing method, semiconductor device manufacturing apparatus and semiconductor dev… | 578 |
| 2 | US20090289300A1 | Semiconductor device and method for producing the same | 545 |
| 3 | US20160190137A1 | Finfet structure and method for manufacturing thereof | 536 |
| 4 | US20060255341A1 | Bonded intermediate substrate and method of making same | 470 |
| 5 | WO2005000324A2 | Colloidal silver composition having antimicrobial properties | 413 |
| 6 | US20110062436A1 | Transistor and display device | 412 |
| 7 | US7732301B1 | Bonded intermediate substrate and method of making same | 406 |
| 8 | US20080248597A1 | Methods for determining a dose of an impurity implanted in a semiconductor substrate and an apparatus for same | 401 |
| 9 | US20090278233A1 | Bonded intermediate substrate and method of making same | 322 |
| 10 | US20120267681A1 | Semiconductor device and method for manufacturing semiconductor device | 216 |
Citation counts accumulate over time, so older records lead this table by default — treat them as markers of influence on the field rather than as evidence of current relevance.
Each row carries its publication number; clicking a row searches Eureka by that number.
When you want the answer in the next five minutes.
The agent works the prompt against patents and technical literature, citing every source.
Run your analysis now →When it has to run inside your own pipeline.
Patent search, landscape analysis and assignee resolution as MCP tools. Drop them into any agent framework, or call REST directly.
Browse MCP servers →Three patterns emerge from the filing and citation data that matter for anyone deciding where to file next.
Five assignees hold 1,203 of the 3,896 records in scope, and the top ten extend that to 38.9%. Below the tenth-ranked filer at 55 records, the ranking falls off into a long tail of single- and few-filing entrants — a pattern that rewards a freedom-to-operate search focused narrowly on the leaders rather than a broad sweep.
Annual filings rose to 236 in 2022 before easing to 139 by 2024, a 29% decline over that three-year window. Because 2025-2026 records are still arriving under normal publication lag, this should be read as a plateau after a filing surge rather than a technology in decline.
H01L semiconductor-device claims and G01N material-analysis claims co-occur across a large share of the corpus, confirming that most inventions here combine a measurement method with a specific device or process context rather than claiming a standalone instrument.
Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to doping metrology and junction profiling, with the prior art for and against each one.
| Assignee | Co-assignee | Shared families |
|---|---|---|
| Toshiba Corporation | Toshiba Electronic Devices & Storage Corporation | 178 |
| The Broad Institute, Inc. | Massachusetts Institute of Technology | 44 |
| The Broad Institute, Inc. | General Hospital Corporation | 19 |
| The Broad Institute, Inc. | Brigham and Women's Hospital | 19 |
| Massachusetts Institute of Technology | Brigham and Women's Hospital | 19 |
| Massachusetts Institute of Technology | General Hospital Corporation | 18 |
| The Broad Institute, Inc. | Dana-Farber Cancer Institute, Inc. | 16 |
| Element Six Technologies Ltd. | TWITCHEN DANIEL JAMES | 8 |
Ten co-assignee pairs appear in the data; the strongest links a device manufacturer's parent and spin-off entity, and separate pairs connect a research institute to an affiliated university and hospital system — a sign that some of this work moves between related legal entities rather than across arm's-length collaborations.
The ranked leaders combine large device manufacturers with specialist metrology and life-sciences filers, but recent-year momentum has cooled across the board.
The top-ranked assignee accounts for 404 of the 3,896 records in scope, well ahead of the fifth-place filer at 114 — a gap wide enough that displacing the leader on volume alone is unrealistic for a new entrant.
Several of the most active historical filers show sharp year-on-year declines in the latest year, including drops of -88% and -100%. Given publication lag, part of this is an artefact of incomplete recent data rather than a genuine stop in filing.
Beyond the core semiconductor classes, the corpus also carries meaningful shares in C12Q and A61K, reflecting metrology and reference-sample techniques borrowed from diagnostics and pharmaceutical measurement work.
| Assignee | Recent year | YoY |
|---|---|---|
| Fuji Electric Co., Ltd. | 4 | -88% |
| Semiconductor Energy Laboratory Co., Ltd. | 0 | -100% |
| Toshiba Corporation | 0 | -100% |
| Toshiba Electronic Devices & Storage Corporation | 0 | -100% |
| Micromass UK Ltd. | 0 | — |
| Almac Diagnostics Limited | 0 | — |
| The Broad Institute, Inc. | 0 | — |
| Massachusetts Institute of Technology | 0 | -100% |
The dataset points to a field with a concentrated top and thinner claim density in a few adjacent measurement branches.
With the top filer holding 404 of 3,896 records, a targeted claim-chart review of its core filings will tell you more about freedom to operate than a broad landscape sweep.
Explore claims in Eureka →Matrix-effect correction and cross-platform correlation between SIMS and spreading-resistance data show thinner filing density than the core device classes — worth a focused prior-art check before drafting.
Run a white space search →The dataset ranks 100 assignees, and filing is concentrated at the top: the leading filer alone holds 404 of the 3,896 records in scope, and the top five combined hold 30.9% of all records. Below the tenth-ranked filer at 55 records, the field spreads into a long tail of companies with only a handful of filings each. This means competitive tracking is more useful when focused on the handful of dominant filers than spread evenly across the full ranking.
Filings peaked in 2022 at 236 and eased to 139 by 2024, a 29% decline over that three-year span. However, 2025 and 2026 figures are still incomplete because publication typically lags actual filing by around 18 months, so it is too early to call this a sustained slowdown rather than a plateau after a filing surge. Anyone tracking momentum should watch the 2024-2025 window fill in over the next reporting cycle before drawing conclusions.
Semiconductor device claims under H01L appear in 44.3% of the 3,896 records, the single largest class, followed by material analysis and testing under G01N at 25.4% and general semiconductor devices under H10D at 19.2%. Because many records carry multiple IPC codes, these percentages overlap rather than sum to a whole, reflecting that most inventions pair a measurement method with a specific device application rather than claiming a standalone technique.
US11430647B2, assigned to Nova Measuring Instruments and published in 2022, claims a secondary ion mass spectrometry system built around a specific hardware chain: a sample stage, a primary ion beam, an extraction lens tuned for low extraction field, and a magnetic sector spectrograph combining an electrostatic analyzer with a magnetic sector analyzer. It blocks that particular instrument architecture, not SIMS-based junction profiling generally, so alternative ion-optics configurations or non-SIMS profiling methods sit outside its claims. A design-around review should focus specifically on the extraction-lens and spectrograph coupling described in the claims.
The clearest thinner areas relative to the core semiconductor and analytical classes are matrix-effect correction methods, reference-sample calibration standards, and techniques that correlate results across measurement platforms such as SIMS and spreading resistance profiling. These sit adjacent to the dense H01L and G01N core rather than inside it, meaning a claim drafted around cross-platform correlation or improved reference standards is less likely to run into the concentrated prior art held by the top filers.
Go past this page: query the whole doping metrology and junction profiling corpus yourself, in your own scope.
Every answer comes back with patent numbers you can open.
Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.
Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.
Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company's registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.
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