Electron Microscopy Patents: Top Companies & Filing Trends 2026
- Filings have cooled since the 2018 peak of 54, with the 2022 midpoint at 31 and a further decline into the most recent partial year — a maturing, not a growing, claim space.
- H01J and G01N dominate the IPC mix (491 and 362 records respectively), while adjacent fields like G01Q scanning-probe and G03F photolithography sit far behind at under 50 each.
- The largest named assignees show zero filings in the latest year, including a -100% YoY drop for the University of California system — a sign the field's core claims are already staked out.
Filing growth compares 2021 (9 records) with 2024 (29) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field. Top-5 share is the combined record count of the five largest assignees divided by all 661 records in scope (CR5), not by the ranked leaders only.
What this landscape covers
This landscape tracks patent families filed against transmission and scanning electron microscopy techniques applied to materials characterization — sample preparation by focused ion beam, beam damage mitigation, in-situ observation, resolution enhancement and elemental mapping. The search spans H01J37 (electron and discharge tubes), G01N23 and G01N1 (material analysis and sample handling), capturing both instrument-side and sample-side innovation.
Filing activity runs from 2015 through a partial 2026 cut, with 661 total published families in the assignee ranking. Publication typically lags filing by around 18 months, so the last one to two years of the trend will always look thinner than they eventually turn out to be once the backlog clears.
Filing trend and technology composition
Two views of the same 661-family dataset: how filing volume has moved year over year, and how that volume splits across IPC subclasses.
A field past its filing peak
Filings ran at 38 in 2017, climbed to a peak of 54 in 2018, then eased back toward the 2022 midpoint of 31 before continuing to soften into the most recent partial year at 3. That shape reads as flat-to-declining rather than an emerging area still building momentum — most of the foundational claim space was staked out in the 2017-2019 window.
Instrument core versus adjacent disciplines
H01J (491 records) and G01N (362) between them anchor almost the entire corpus, confirming this is fundamentally an instrument-and-sample-prep field rather than a downstream-imaging one. G06T image processing (54), G01Q scanning-probe (46) and H01L semiconductor devices (45) each carry a meaningful but secondary presence, while G02B optics (30), G01B dimensional measurement (19) and G03F photolithography (17) are thin enough to suggest those intersections are still open for focused claims.
Shares are the percentage of the 661 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.
Go deeper on Electron Microscopy for Materials Characterization with Eureka
This page is one run against one query. Ask Eureka your own question about electron microscopy for materials characterization and every answer comes back with the patent numbers behind it.
Try EurekaThe most-cited prior art in this space
Standard sample for TEM elemental mapping (US20050184233A1)
A standard sample for transmission electron microscopy elemental mapping built from a substrate, a heavy-atom crystalline thin film, a light-atom amorphous oxide or nitride layer at defined thicknesses, and a second heavy-atom crystalline layer — used to correct TEM, EDS and EELS mapping results and to optimize mapping conditions on multi-layered nanometer-scale films.Filed by Hitachi High-Tech Corporation; a calibration-standard approach rather than an instrument or beam-column claim.


| # | Publication no. | Patent title | Citations |
|---|---|---|---|
| 1 | US5973323A | Apparatus and method for secondary electron emission microscope | 150 |
| 2 | US6914244B2 | Ion beam milling system and method for electron microscopy specimen preparation | 125 |
| 3 | JP2009158222A | Sample holder, method of observation and inspection, and apparatus for observation and inspection | 87 |
| 4 | US20090166536A1 | Sample Holder, Method for Observation and Inspection, and Apparatus for Observation and Inspection | 86 |
| 5 | US20110266440A1 | SEM Imaging Method | 84 |
| 6 | US5414261A | Enhanced imaging mode for transmission electron microscopy | 78 |
| 7 | US6054710A | Method and apparatus for obtaining two- or three-dimensional information from scanning electron microscopy | 71 |
| 8 | US4618767A | Low-energy scanning transmission electron microscope | 70 |
| 9 | US7002152B2 | Sample preparation for transmission electron microscopy | 67 |
| 10 | US8232523B2 | SEM imaging method | 66 |
Citation counts accumulate over time and favour older filings; treat them as markers of foundational influence rather than of what matters most today.
Each row carries its publication number; clicking a row searches Eureka by that number.
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Three read-throughs from the trend, the IPC split and the citation table, aimed at where effort is and isn't likely to pay off.
The core claim space is largely staked
A peak in 2018 followed by a steady slide through the 2022 midpoint of 31 down to single digits signals that the foundational instrument and sample-prep claims in this field were filed years ago. New entrants are more likely to find freedom to operate in specific technique combinations than in broad apparatus claims.
Instrument and sample-prep claims dominate
H01J and G01N together account for the large majority of the corpus, meaning most competitive pressure sits in electron-optical column design and material-analysis methodology rather than in downstream image processing or measurement.
Photolithography and scanning-probe intersections are thin
G03F photolithography (17), G01B dimensional measurement (19) and G01Q scanning-probe (46) each carry a fraction of the filings seen in the core subclasses, which points to under-claimed territory at the boundary between electron microscopy and these adjacent measurement disciplines.
Established players have gone quiet in the latest year
Every one of the most active named assignees in the ranking, including a major university system down -100% year over year, shows zero filings in the most recent year. Given the ~18-month publication lag this partly reflects reporting delay, but the multi-year decline preceding it is a real signal of a settled field.
Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to electron microscopy for materials characterization, with the prior art for and against each one.
Who holds the claim space
Filing activity concentrates among a handful of instrument makers, semiconductor-equipment firms and research institutions, with co-assignment pairs suggesting a mix of corporate and university collaboration.
Equipment vendors anchor the corpus
Names like FEI, ASML and Thermo Fisher Scientific's Bremen unit appear among the largest filers and in co-assignee pairs, consistent with instrument OEMs protecting column design, detector and sample-handling claims.
Academic assignees show a sharp pullback
The University of California system and partners such as Lawrence Livermore National Security and Harvard appear repeatedly in co-assignee pairs, but the University of California's own filing rate has dropped to zero in the latest year after a long decline.
Chipmakers file at the microscopy-semiconductor boundary
IBM and other semiconductor-linked assignees show up where H01L overlaps with electron-microscopy IPC codes, reflecting inspection and metrology needs specific to chip fabrication rather than general materials science.
| Assignee | Recent year | YoY |
|---|---|---|
| KLA Corporation | 0 | — |
| FEI Company (USA) | 0 | — |
| ASML Netherlands B.V. | 0 | — |
| International Business Machines Corporation (IBM) | 0 | — |
| JEOL Ltd. | 0 | — |
| The Regents of the University of California | 0 | -100% |
| President and Fellows of Harvard College | 0 | — |
| Lawrence Livermore National Security, LLC | 0 | — |
Where to take this analysis
The filing trend and IPC split point to a field with settled core claims and thinner activity at its edges. Two directions follow from that.
Map technique-level claims, not just assignees
Because H01J and G01N carry most of the volume, differentiating a new filing means going down to specific technique combinations — beam-damage mitigation paired with a named sample class, for instance — rather than broad apparatus claims.
Explore technique claims in EurekaWatch the adjacent subclasses for movement
G01Q, G03F and G01B carry a fraction of the core filing volume today; a shift in filing rate there would be an early signal of the field's next growth direction.
Track adjacent IPC activity in EurekaCommon questions about this landscape
The assignee ranking is led by instrument OEMs and semiconductor-equipment firms alongside several university systems, with the University of California appearing repeatedly in co-assignee pairs. Filing activity from the largest named assignees has dropped to zero in the most recent year, which reflects both the roughly 18-month publication lag and a genuine multi-year slowdown. No single assignee holds a dominant share of the 661 families in this corpus, so the field reads as competitively distributed rather than concentrated in one company's hands.
Filing volume peaked in 2018 at 54 records, eased to 31 by the 2022 midpoint, and has continued to soften into the most recent partial year. That pattern is consistent with a field where the foundational instrument and sample-preparation claims were largely filed in the 2017-2019 window. New filings now are more likely to be refinements on established techniques than entirely new approaches, though the most recent year's low count is partly an artefact of publication delay rather than a sudden stop.
H01J, covering electron and discharge tubes, and G01N, covering material analysis and testing, together account for the bulk of the 661-family corpus. Image processing under G06T, scanning-probe measurement under G01Q and semiconductor-device applications under H01L each have a smaller but real presence. Optics, dimensional measurement and photolithography subclasses carry comparatively few filings, suggesting those intersections are less contested.
That filing, from Hitachi High-Tech Corporation, covers a specific standard-sample construction used to calibrate TEM, EDS and EELS elemental mapping — a layered structure of heavy-atom crystalline films around a thin light-atom amorphous layer. It does not block elemental mapping methods generally; it blocks calibration approaches that rely on this particular layered heavy-atom/light-atom sample architecture. Developers working on different calibration standards, or on mapping methods that don't depend on a physical reference sample of this design, sit outside its claims.
The thinnest IPC subclasses in this dataset — G03F photolithography, G01B dimensional measurement and G01Q scanning-probe — each carry well under 50 records against the 491 and 362 seen in the core H01J and G01N subclasses. That gap suggests under-claimed territory at the boundary between electron microscopy and these adjacent measurement disciplines, particularly for hybrid inspection methods that combine electron-beam imaging with scanning-probe or lithography-linked metrology.
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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.
Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
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Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company’s registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.