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Electron Microscopy Patents: Top Companies & Filing Trends 2026

Electron Microscopy Patents: Top Companies & Filing Trends 2026
https://www.patsnap.com/resources/blog/rd-blog/electron-microscopy-for-materials-characterization-patent-landscape/ · Patsnap · data cut-off 2026-07-31 · downloaded from the live page
Patent Landscape · Sensors & Instrumentation
Electron Microscopy Patents for Materials Characterization
  • Filings have cooled since the 2018 peak of 54, with the 2022 midpoint at 31 and a further decline into the most recent partial year — a maturing, not a growing, claim space.
  • H01J and G01N dominate the IPC mix (491 and 362 records respectively), while adjacent fields like G01Q scanning-probe and G03F photolithography sit far behind at under 50 each.
  • The largest named assignees show zero filings in the latest year, including a -100% YoY drop for the University of California system — a sign the field's core claims are already staked out.
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661
Published Records
29%
Top-5 Share of All Records
+222%
Filing Growth 2021→2024
US
Leading Jurisdiction

Filing growth compares 2021 (9 records) with 2024 (29) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field. Top-5 share is the combined record count of the five largest assignees divided by all 661 records in scope (CR5), not by the ranked leaders only.

Published byPatsnap Research··7 min readSourced from Patsnap Eureka
Overview

What this landscape covers

This landscape tracks patent families filed against transmission and scanning electron microscopy techniques applied to materials characterization — sample preparation by focused ion beam, beam damage mitigation, in-situ observation, resolution enhancement and elemental mapping. The search spans H01J37 (electron and discharge tubes), G01N23 and G01N1 (material analysis and sample handling), capturing both instrument-side and sample-side innovation.

Filing activity runs from 2015 through a partial 2026 cut, with 661 total published families in the assignee ranking. Publication typically lags filing by around 18 months, so the last one to two years of the trend will always look thinner than they eventually turn out to be once the backlog clears.

Filing activity by year, 2017-2026
  1. 1KLA CORP83
  2. 2FEI CO44
  3. 3ASML NETHERLANDS BV26
  4. 4INTERNATIONAL BUSINESS MACHINE CORPORATION21
  5. 5JEOL LTD16
  6. 6RGT UNIV OF CALIFORNIA16
  7. 7MOCHII VOXA13
  8. 8PRESIDENT & FELLOWS OF HARVARD COLLEGE12
  9. 9GATAN INC12
  10. 10LAWRENCE LIVERMORE NAT SECURITY LLC11
Source: Patsnap Eureka. Assignee ranking and totals. Derived from a Patsnap search on Electron Microscopy for Materials Characterization covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
The Data

Filing trend and technology composition

Two views of the same 661-family dataset: how filing volume has moved year over year, and how that volume splits across IPC subclasses.

A field past its filing peak

Filings ran at 38 in 2017, climbed to a peak of 54 in 2018, then eased back toward the 2022 midpoint of 31 before continuing to soften into the most recent partial year at 3. That shape reads as flat-to-declining rather than an emerging area still building momentum — most of the foundational claim space was staked out in the 2017-2019 window.

A field past its filing peak015304560382017542018201920202021202220232024202532026Most recent year is partial — publication lag means later filings are not yet visible.

Instrument core versus adjacent disciplines

H01J (491 records) and G01N (362) between them anchor almost the entire corpus, confirming this is fundamentally an instrument-and-sample-prep field rather than a downstream-imaging one. G06T image processing (54), G01Q scanning-probe (46) and H01L semiconductor devices (45) each carry a meaningful but secondary presence, while G02B optics (30), G01B dimensional measurement (19) and G03F photolithography (17) are thin enough to suggest those intersections are still open for focused claims.

Instrument core versus adjacent disciplinesH01J · Electron & discharge tubes49174.3%G01N · Material analysis & testing36254.8%G06T · Image data processing & genera…548.2%G01Q · Scanning-probe & nanometric me…467.0%H01L · Semiconductor devices456.8%G02B · Optical elements & systems304.5%G01B · Measuring length & dimensions192.9%G03F · Photolithography & photomechan…172.6%Other20330.7%

Shares are the percentage of the 661 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.

Source: Patsnap Eureka. Filing trend and technology composition. Derived from a Patsnap search on Electron Microscopy for Materials Characterization covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.

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Key Patents

The most-cited prior art in this space

Representative Filing
US20050184233A12005-08-25

Standard sample for TEM elemental mapping (US20050184233A1)

HITACHI HIGH-TECH CORPORATION

A standard sample for transmission electron microscopy elemental mapping built from a substrate, a heavy-atom crystalline thin film, a light-atom amorphous oxide or nitride layer at defined thicknesses, and a second heavy-atom crystalline layer — used to correct TEM, EDS and EELS mapping results and to optimize mapping conditions on multi-layered nanometer-scale films.Filed by Hitachi High-Tech Corporation; a calibration-standard approach rather than an instrument or beam-column claim.

US20050184233A1 — patent drawing 1US20050184233A1 — patent drawing 2
View full filing
Highest-citation records in the corpus
#Publication no.Patent titleCitations
1US5973323AApparatus and method for secondary electron emission microscope150
2US6914244B2Ion beam milling system and method for electron microscopy specimen preparation125
3JP2009158222ASample holder, method of observation and inspection, and apparatus for observation and inspection87
4US20090166536A1Sample Holder, Method for Observation and Inspection, and Apparatus for Observation and Inspection86
5US20110266440A1SEM Imaging Method84
6US5414261AEnhanced imaging mode for transmission electron microscopy78
7US6054710AMethod and apparatus for obtaining two- or three-dimensional information from scanning electron microscopy71
8US4618767ALow-energy scanning transmission electron microscope70
9US7002152B2Sample preparation for transmission electron microscopy67
10US8232523B2SEM imaging method66

Citation counts accumulate over time and favour older filings; treat them as markers of foundational influence rather than of what matters most today.

Each row carries its publication number; clicking a row searches Eureka by that number.

Source: Patsnap Eureka. Citation counts and representative records. Derived from a Patsnap search on Electron Microscopy for Materials Characterization covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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Insights

What the numbers mean for a filing decision

Three read-throughs from the trend, the IPC split and the citation table, aimed at where effort is and isn't likely to pay off.

Filing momentum
54 → 3
peak (2018) to latest partial year

The core claim space is largely staked

A peak in 2018 followed by a steady slide through the 2022 midpoint of 31 down to single digits signals that the foundational instrument and sample-prep claims in this field were filed years ago. New entrants are more likely to find freedom to operate in specific technique combinations than in broad apparatus claims.

Based on year-by-year filing counts, 2017-2026
Technology concentration
491 + 362
records in H01J + G01N alone

Instrument and sample-prep claims dominate

H01J and G01N together account for the large majority of the corpus, meaning most competitive pressure sits in electron-optical column design and material-analysis methodology rather than in downstream image processing or measurement.

IPC subclass distribution across 661 families
Adjacent white space
17-46 records
in G03F, G01B and G01Q combined

Photolithography and scanning-probe intersections are thin

G03F photolithography (17), G01B dimensional measurement (19) and G01Q scanning-probe (46) each carry a fraction of the filings seen in the core subclasses, which points to under-claimed territory at the boundary between electron microscopy and these adjacent measurement disciplines.

IPC subclass counts, full corpus
Assignee activity
0 filings
latest-year count for the largest named assignees

Established players have gone quiet in the latest year

Every one of the most active named assignees in the ranking, including a major university system down -100% year over year, shows zero filings in the most recent year. Given the ~18-month publication lag this partly reflects reporting delay, but the multi-year decline preceding it is a real signal of a settled field.

Recent-year momentum by assignee
Eureka AI Agent
Looking for what nobody has claimed yet?

Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to electron microscopy for materials characterization, with the prior art for and against each one.

Find the white space →
Source: Patsnap Eureka. Co-assignee relationships and derived observations. Derived from a Patsnap search on Electron Microscopy for Materials Characterization covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Players

Who holds the claim space

Filing activity concentrates among a handful of instrument makers, semiconductor-equipment firms and research institutions, with co-assignment pairs suggesting a mix of corporate and university collaboration.

Instrument makers
10 co-assignee pairs
across the dataset

Equipment vendors anchor the corpus

Names like FEI, ASML and Thermo Fisher Scientific's Bremen unit appear among the largest filers and in co-assignee pairs, consistent with instrument OEMs protecting column design, detector and sample-handling claims.

Assignee ranking, 661 families
University and public research
-100% YoY
for University of California filings

Academic assignees show a sharp pullback

The University of California system and partners such as Lawrence Livermore National Security and Harvard appear repeatedly in co-assignee pairs, but the University of California's own filing rate has dropped to zero in the latest year after a long decline.

Recent-year momentum by assignee
Semiconductor-adjacent filers
45 records
in H01L semiconductor devices

Chipmakers file at the microscopy-semiconductor boundary

IBM and other semiconductor-linked assignees show up where H01L overlaps with electron-microscopy IPC codes, reflecting inspection and metrology needs specific to chip fabrication rather than general materials science.

IPC cross-reference, H01L subset
🔍
Under-claimed technique intersections
Sub-areas where filing density is thin relative to the core H01J/G01N space
in-situ beam-damage compensationelemental mapping calibration standardsFIB sample-prep automationscanning-probe/electron hybrid imagingphotolithography-linked inspection metrology
Rank all filers by momentum →
Recent-year filing momentum by assignee
AssigneeRecent yearYoY
KLA Corporation0
FEI Company (USA)0
ASML Netherlands B.V.0
International Business Machines Corporation (IBM)0
JEOL Ltd.0
The Regents of the University of California0-100%
President and Fellows of Harvard College0
Lawrence Livermore National Security, LLC0
Source: Patsnap Eureka. Assignee-level momentum. Derived from a Patsnap search on Electron Microscopy for Materials Characterization covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
What's Next

Where to take this analysis

The filing trend and IPC split point to a field with settled core claims and thinner activity at its edges. Two directions follow from that.

Map technique-level claims, not just assignees

Because H01J and G01N carry most of the volume, differentiating a new filing means going down to specific technique combinations — beam-damage mitigation paired with a named sample class, for instance — rather than broad apparatus claims.

Explore technique claims in Eureka

Watch the adjacent subclasses for movement

G01Q, G03F and G01B carry a fraction of the core filing volume today; a shift in filing rate there would be an early signal of the field's next growth direction.

Track adjacent IPC activity in Eureka
Source: Patsnap Eureka. Forward-looking reading of the same dataset. Derived from a Patsnap search on Electron Microscopy for Materials Characterization covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
FAQ

Common questions about this landscape

Answers are grounded in the same dataset. Derived from a Patsnap search on Electron Microscopy for Materials Characterization covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.

Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.

Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.

Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company’s registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.

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