Etch Endpoint Detection Patents: Top Companies & Trends 2026
Etch Endpoint Detection and Chamber Matching Patents
65.9% concentration. The top 5 assignees alone account for 507 of the 769 records in scope, leaving a long tail of single- and low-filing entrants behind them. Filings climbed from 38 in 2017 to a peak of 117 in 2025, though 2025 and 2026 figures will keep rising as more publications clear the 18-month lag. The last complete year-over-year comparison available, 2021 to 2024, shows a -17% move (30 to 25) — a cooling rather than a collapse.
- 1TOKYO ELECTRON LTD158
- 2APPLIED MATERIALS INC137
- 3SILVEBROOK KIA100
- 4LAM RES CORP66
- 5VERITY INSTRUMENTS INC46
See the full etch endpoint detection and chamber matching analysis in Eureka
- The complete ranking, not just the top five
- Every IPC branch with its share of the corpus
- The most-cited records, and where claim space is still thin
Common questions on this landscape
Who holds the most patents in etch endpoint detection and chamber matching?
The assignee ranking, covering 100 companies across 769 records, shows one leader well ahead of the rest at 158 records, with fifth place at 46 and tenth place at 17. This is a leader-and-long-tail structure rather than an even split: the top 5 assignees combined hold 65.9% of all records in scope, and the top 10 hold 79.5%. Equipment and instrumentation makers dominate the upper ranks, with fabs and individual inventors appearing further down through co-filed records.
Is patent filing in this field growing or slowing?
Filings moved from 30 in 2021 to 25 in 2024, a -17% change over that span, which is the most recent comparison not distorted by publication lag. The raw yearly counts show a peak of 117 in 2025, but because publication trails filing by roughly 18 months, 2025 and 2026 figures are still incomplete and should not be read as a real-time picture. The honest read is a field that cooled somewhat through the early 2020s rather than one that collapsed.
What technology areas get the most patent claims in this space?
H01L (semiconductor devices) covers 32.8% of the 769 records, the largest single class, followed by H10P at 23.1% and H01J (electron and discharge tube hardware, largely OES sensor components) at 22.8%. Material analysis and testing under G01N sits close behind at 22.4%. Software-side classes like G06F (18.1%) and G05B control systems (8.6%) are less densely claimed, which is worth noting since records can carry multiple classes and these percentages sum past 100%.
Disclaimer. This analysis is based on Patsnap Eureka data drawn from a limited snapshot of global patent records and is provided for general information and reference only. Patent data carries inherent limitations — recent filings are under-counted because of publication lag, counts may be on a record or family basis, classification and applicant-name data may contain errors or duplicates, and the underlying search query defines the scope shown — so the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
Nothing here is an exhaustive prior-art, novelty, freedom-to-operate or validity search, nor does it constitute legal, financial or professional advice, and it should not be relied upon as such. Verify independently and review with qualified patent and legal professionals before acting on it.
Method: Filing trend and technology composition. Derived from a Patsnap search on Etch Endpoint Detection and Chamber Matching covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish. Every share divides by all records in scope. Data: Patsnap Eureka. See the full landscape report.