Fluorinated Gas Abatement Patents: Top Companies & Trends 2026
Fluorinated Gas Abatement and Emission Control Patents
48.3% of all 939 records sit with just five assignees, so most of the claim space in scrubber and abatement-system design is already staked out by a small group. Filings ran from 53 in 2017 to a peak of 76 in 2021, then declined to 34 by 2024 — a -55% move over that three-year span. 2025 and 2026 figures (down to 3 by 2026) are not yet complete and understate true recent activity due to publication lag.
- 1APPLIED MATERIALS INC212
- 2EDWARDS LTD130
- 3XYLECO INC56
- 4ENGELHARD CORP30
- 5ADVANCED TECH MATERIALS INC26
See the full fluorinated gas abatement and emission control analysis in Eureka
- The complete ranking, not just the top five
- Every IPC branch with its share of the corpus
- The most-cited records, and where claim space is still thin
Common questions about this landscape
Who holds the most patents in fluorinated gas abatement?
One assignee leads this landscape with 212 of the 939 records in scope, well ahead of the fifth-place holder at 26 and tenth place at 20. That leader’s filings concentrate on integrated abatement-system design, validation and control methods rather than a single piece of hardware. The top five assignees combined account for 48.3% of all records, so the field is concentrated but not a single-company monopoly.
Is fluorinated gas abatement patent activity growing or slowing?
Filing peaked in 2021 at 76 records and had fallen to 34 by 2024, a -55% move over that complete-year span. That is a genuine cooling trend rather than an artefact of recent data, since 2024 is the most recent year that can be treated as fully published. Figures for 2025 and 2026 are still filling in due to the roughly 18-month lag between filing and publication, so they should not yet be read as a continued decline.
What technology areas dominate fluorinated gas abatement patents?
Separation processes under IPC class B01D cover 47.9% of the 939 records, making it the single largest technology bucket, followed by chemical and catalytic processes under B01J at 17.0%. Coating and surface deposition (C23C) and semiconductor device claims (H01L) each sit above 11%, reflecting the tie between abatement hardware and the fabrication tools it serves. Because a single record can carry multiple IPC classes, these shares add up to more than 100% and should be read individually rather than summed.
Disclaimer. This analysis is based on Patsnap Eureka data drawn from a limited snapshot of global patent records and is provided for general information and reference only. Patent data carries inherent limitations — recent filings are under-counted because of publication lag, counts may be on a record or family basis, classification and applicant-name data may contain errors or duplicates, and the underlying search query defines the scope shown — so the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
Nothing here is an exhaustive prior-art, novelty, freedom-to-operate or validity search, nor does it constitute legal, financial or professional advice, and it should not be relied upon as such. Verify independently and review with qualified patent and legal professionals before acting on it.
Method: Filing trend and technology composition. Derived from a Patsnap search on Fluorinated Gas Abatement and Emission Control covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish. Every share divides by all records in scope. Data: Patsnap Eureka. See the full landscape report.