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GaN HEMT Lithography Patents: Who Leads, Where the Gaps Are 2026

GaN HEMT Lithography Patents: Who Leads, Where the Gaps Are 2026
https://www.patsnap.com/resources/blog/rd-blog/gallium-nitride-hemt-lithography-patent-landscape/ · Patsnap · data cut-off 2026-07-31 · downloaded from the live page
Semiconductors & Microelectronics · Patent Landscape
Gallium Nitride HEMT Lithography Patents: Gate Patterning Filing Trends and Claim Concentration
  • Filing already peaked. Activity hit 17 families in 2019 and has run flat-to-declining since, with the midpoint 2022 year at just 6 families.
  • One assignee's citation record dominates. US20200083167A1 on low-capacitance gate contacts with copper damascene structures draws 33 citations, more than double the next most-cited record.
  • Filing is US- and IL-anchored. United States (17) and Israel (12) together account for most receiving-office activity, ahead of PCT, EPO, Singapore and Australia combined.
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49
Published Records
US
Leading Jurisdiction
9
Active Filers Ranked
2019
Peak Filing Year
Published byPatsnap Research··8 min readSourced from Patsnap Eureka
Overview

What this landscape covers

Gate lithography is the process bottleneck that separates a GaN HEMT on a datasheet from one that survives high-frequency, high-voltage operation. This landscape tracks patent families where gate patterning methods — T-gate patterning, sub-100 nm gate definition, gate-recess etch and contact metallization sequencing — are claimed specifically against gallium nitride HEMT or GaN transistor structures, rather than general III-V process disclosures. The corpus spans 49 patent families filed between 2015 and the 2026 data cut-off.

Because publication lags filing by roughly 18 months, the 2026 count of zero and the thin 2025 figures understate real activity; the more reliable signal is the run-up to the 2019 peak and the plateau that followed it. Most disclosures classify under H01L (semiconductor devices), with meaningful overlap into H10W and H10D device subclasses and a small but persistent C30B crystal-growth thread tied to substrate quality ahead of the gate module.

Filing activity by year, 2017-2026
  1. 1Raytheon Company26
  2. 2Agency for Science, Technology and Research (A*STAR)9
  3. 3Massachusetts Institute of Technology (MIT)4
  4. 4Texas Instruments Incorporated4
  5. 5The Board of Trustees of the Leland Stanford Junior University4
  6. 6PALACIOS TOMAS APOSTOL2
  7. 7MOTSENBOCKER MARVIN2
  8. 8MING XU2
  9. 9CHUNG JINWOOK2
Source: Patsnap Eureka. Assignee ranking and totals. Derived from a Patsnap search on Gallium Nitride HEMT Lithography covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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The data

Filing trend and technology composition

The dataset's own shape argues against a technology still in its land-grab phase: filings rose quickly, peaked once, and have not recovered.

A single peak, not a growth curve

Filings moved from 2 in 2017 to a peak of 17 in 2019, then fell back toward the 2022 midpoint of 6. That pattern — a sharp rise followed by a plateau rather than repeated cycles — is more consistent with a wave of process patents filed around a specific manufacturing node than with an actively expanding claim frontier. Treat the final one to two years as incomplete rather than as a genuine decline.

A single peak, not a growth curve0510152022017201817201920202021202220232024202502026Most recent year is partial — publication lag means later filings are not yet visible.

H01L carries nearly the whole corpus

48 of 49 records touch H01L, with H10W (12) and H10D (10) as the dominant secondary buckets, both device-structure classes rather than process-only ones. C30B crystal growth appears in only 3 records and H02H protective-circuit and H10P classes appear twice each — thin enough that claims combining gate lithography with substrate engineering or protection-circuit integration are still comparatively rare.

H01L carries nearly the whole corpusH01L · Semiconductor devices4898.0%H10W1224.5%H10D · Semiconductor devices (general)1020.4%C30B · Crystal growth36.1%H02H · Protective circuit arrangements24.1%H10P24.1%

Shares are the percentage of the 49 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.

Source: Patsnap Eureka. Filing trend and technology composition. Derived from a Patsnap search on Gallium Nitride HEMT Lithography covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.

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Key patents

The prior art doing the most citation work

Representative filing
US20170222030A12017-08-03

Semiconductor device fabrication (US20170222030A1)

AGENCY FOR SCIENCE

Describes a method for fabricating a semiconductor device by growing first and second nucleation layers on a substrate, depositing a binary layer over them, and annealing that layer to form two contact areas. The annealed layer draws on a group 14 element (Si, Ge, or a combination) to lower contact resistance for current flow through the device, with the intermediate layer positioned to support the fabrication sequence around the contact regions.Filed by AGENCY FOR SCIENCE, published 2017-08-03 — one of several Singapore-linked filings in this dataset.

US20170222030A1 — patent drawing 1US20170222030A1 — patent drawing 2
View full record
Most-cited records in this corpus
#Publication no.Patent titleCitations
1US20200083167A1Nitride structures having low capacitance gate contacts integrated with copper damascene structures33
2US20160233325A1Semiconductor device fabrication15
3US20190237552A1Method for forming gate structures for group iii-v field effect transistors14
4US7692222B2Atomic layer deposition in the formation of gate structures for III-V semiconductor10
5US9954088B2Semiconductor device fabrication9
6US20120012894A1Performance of nitride semiconductor devices8
7US10566428B2Method for forming gate structures for group III-V field effect transistors6
8WO2015057171A1Semiconductor device fabrication4
9US8921892B2High-performance nitride semiconductor devices3
10US20250098266A1Group iii-n device including source contact connected to substrate through trench2

Citation counts here are a signal of influence within this searched corpus, not of current commercial relevance — older filings accumulate citations simply by having been public longer.

Each row carries its publication number; clicking a row searches Eureka by that number.

Source: Patsnap Eureka. Citation counts and representative records. Derived from a Patsnap search on Gallium Nitride HEMT Lithography covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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Insights

What the numbers mean for a filing decision

Three patterns in this dataset matter more than the headline count of 49 families.

Filing momentum
17 in 2019 → 6 by 2022
peak to midpoint

The wave has already crested

Filing activity rose sharply into 2019 and has not returned to that level since. A plateau this pronounced, in a corpus this small, suggests the core patterning approaches that mattered for this node are already staked out, and new entrants are more likely to be designing around existing claims than opening new ground.

Based on the 2017-2026 filing trend
Citation concentration
33 citations
top-cited record

One structural approach anchors the field

US20200083167A1, on low-capacitance gate contacts integrated with copper damascene structures, is cited more than double the next most-referenced record. Any freedom-to-operate review in gate-contact integration should start there rather than with a broad keyword sweep.

Citation counts favour earlier filings
Jurisdictional footprint
US 17 · IL 12
leading receiving offices

Filing is concentrated in two offices

United States and Israel together outweigh PCT, EPO, Singapore and Australia filings combined. A competitor building a defensive position purely through PCT or EPO routes would be filing into comparatively open territory relative to where the incumbents already sit.

Receiving office counts, all years
Collaboration pattern
4 co-assignee pairs
shared filings

Collaboration is narrow and academic

Co-assigned filings are limited to four pairs, all centred on the same MIT-affiliated inventor network. There is no evidence in this corpus of broad industry consortia; most filings are single-assignee, which lowers the chance of blocking cross-licences but also means fewer signals of where joint development is heading.

Based on co-assignee pair counts
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Looking for what nobody has claimed yet?

Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to gallium nitride hemt lithography, with the prior art for and against each one.

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Source: Patsnap Eureka. Co-assignee relationships and derived observations. Derived from a Patsnap search on Gallium Nitride HEMT Lithography covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Players

Who is filing, and who has gone quiet

Every tracked assignee in the recent-year momentum data shows zero filings in the latest year, including established names like Raytheon, Texas Instruments and the Stanford board of trustees. That is consistent with the corpus-wide plateau rather than any single company's retreat, but it means recent momentum cannot be used to pick a leader — the ranking table should be read on cumulative family counts instead.

Academic core
4 co-assignee pairs
shared filings

MIT-centred inventor network

The strongest co-filing relationships in the dataset all link MIT with the same two named inventors, Tomas Apostol Palacios and Jinwook Chung, each pairing appearing twice. This is a research-lab filing pattern rather than a corporate one.

Co-assignee pair analysis
State research
Singapore filings present
A*STAR-linked

Agency for Science, Technology and Research

Singapore's national research agency appears both as a receiving-office contributor (Singapore: 4) and as the assignee on the representative record in this dataset, indicating a sustained state-backed research push into GaN contact and gate fabrication methods.

Representative record and SG office count
Defense and semiconductor incumbents
0 in latest year
across tracked assignees

Raytheon, TI and Stanford's IP office

All three show zero filings in the most recent tracked year, Texas Instruments with a -100% YoY figure specifically noted. Given the 18-month publication lag, this understates true 2025-2026 activity, but it confirms none of these assignees pushed a late-cycle filing surge.

Recent-year momentum table
🔍
Under-claimed sub-areas worth checking before filing
Thin IPC coverage in these branches suggests open claim space rather than settled prior art.
Gate-recess etch depth controlCopper damascene gate-contact integrationSubstrate-to-gate crystal quality couplingProtective circuit co-integration with T-gate structures
Rank all filers by momentum →
Recent-year filing momentum by assignee
AssigneeRecent yearYoY
Raytheon Company0
Agency for Science, Technology and Research (A*STAR)0
Massachusetts Institute of Technology (MIT)0
Texas Instruments Incorporated0-100%
The Board of Trustees of the Leland Stanford Junior University0
PALACIOS TOMAS APOSTOL0
MOTSENBOCKER MARVIN0
MING XU0
Source: Patsnap Eureka. Assignee-level momentum. Derived from a Patsnap search on Gallium Nitride HEMT Lithography covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
What's next

Where to take this analysis

The dataset points to specific next steps rather than a general monitoring exercise.

Clear the top-cited claim set first

Before drafting new gate-patterning claims, run a design-around check against US20200083167A1's copper damascene gate-contact structure — it is the single most-cited document in this corpus and the most likely blocking reference.

Explore prior art in Eureka

Test the under-claimed branches

Gate-recess etch depth control and substrate-to-gate crystal coupling both show thin IPC coverage (C30B at just 3 records). Draft a claim there and check freedom-to-operate before committing R&D spend to a more crowded structural approach.

Run a white space search in Eureka

Watch for the lag-delayed 2025-2026 wave

Because publication trails filing by about 18 months, the apparent 2025-2026 falloff may reverse once pending applications publish. Re-run this landscape in six to twelve months to confirm whether the plateau is real or an artefact of the data cut-off.

Set up monitoring in Eureka
Source: Patsnap Eureka. Forward-looking reading of the same dataset. Derived from a Patsnap search on Gallium Nitride HEMT Lithography covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
FAQ

Common questions about GaN HEMT gate lithography patents

Answers are grounded in the same dataset. Derived from a Patsnap search on Gallium Nitride HEMT Lithography covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.

Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.

Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.

Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company’s registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.

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