GaN HEMT Lithography Patents: Who Leads, Where the Gaps Are 2026
- Filing already peaked. Activity hit 17 families in 2019 and has run flat-to-declining since, with the midpoint 2022 year at just 6 families.
- One assignee's citation record dominates. US20200083167A1 on low-capacitance gate contacts with copper damascene structures draws 33 citations, more than double the next most-cited record.
- Filing is US- and IL-anchored. United States (17) and Israel (12) together account for most receiving-office activity, ahead of PCT, EPO, Singapore and Australia combined.
What this landscape covers
Gate lithography is the process bottleneck that separates a GaN HEMT on a datasheet from one that survives high-frequency, high-voltage operation. This landscape tracks patent families where gate patterning methods — T-gate patterning, sub-100 nm gate definition, gate-recess etch and contact metallization sequencing — are claimed specifically against gallium nitride HEMT or GaN transistor structures, rather than general III-V process disclosures. The corpus spans 49 patent families filed between 2015 and the 2026 data cut-off.
Because publication lags filing by roughly 18 months, the 2026 count of zero and the thin 2025 figures understate real activity; the more reliable signal is the run-up to the 2019 peak and the plateau that followed it. Most disclosures classify under H01L (semiconductor devices), with meaningful overlap into H10W and H10D device subclasses and a small but persistent C30B crystal-growth thread tied to substrate quality ahead of the gate module.
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Filing trend and technology composition
The dataset's own shape argues against a technology still in its land-grab phase: filings rose quickly, peaked once, and have not recovered.
A single peak, not a growth curve
Filings moved from 2 in 2017 to a peak of 17 in 2019, then fell back toward the 2022 midpoint of 6. That pattern — a sharp rise followed by a plateau rather than repeated cycles — is more consistent with a wave of process patents filed around a specific manufacturing node than with an actively expanding claim frontier. Treat the final one to two years as incomplete rather than as a genuine decline.
H01L carries nearly the whole corpus
48 of 49 records touch H01L, with H10W (12) and H10D (10) as the dominant secondary buckets, both device-structure classes rather than process-only ones. C30B crystal growth appears in only 3 records and H02H protective-circuit and H10P classes appear twice each — thin enough that claims combining gate lithography with substrate engineering or protection-circuit integration are still comparatively rare.
Shares are the percentage of the 49 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.
Go deeper on Gallium Nitride HEMT Lithography with Eureka
This page is one run against one query. Ask Eureka your own question about gallium nitride hemt lithography and every answer comes back with the patent numbers behind it.
Try EurekaThe prior art doing the most citation work
Semiconductor device fabrication (US20170222030A1)
Describes a method for fabricating a semiconductor device by growing first and second nucleation layers on a substrate, depositing a binary layer over them, and annealing that layer to form two contact areas. The annealed layer draws on a group 14 element (Si, Ge, or a combination) to lower contact resistance for current flow through the device, with the intermediate layer positioned to support the fabrication sequence around the contact regions.Filed by AGENCY FOR SCIENCE, published 2017-08-03 — one of several Singapore-linked filings in this dataset.


| # | Publication no. | Patent title | Citations |
|---|---|---|---|
| 1 | US20200083167A1 | Nitride structures having low capacitance gate contacts integrated with copper damascene structures | 33 |
| 2 | US20160233325A1 | Semiconductor device fabrication | 15 |
| 3 | US20190237552A1 | Method for forming gate structures for group iii-v field effect transistors | 14 |
| 4 | US7692222B2 | Atomic layer deposition in the formation of gate structures for III-V semiconductor | 10 |
| 5 | US9954088B2 | Semiconductor device fabrication | 9 |
| 6 | US20120012894A1 | Performance of nitride semiconductor devices | 8 |
| 7 | US10566428B2 | Method for forming gate structures for group III-V field effect transistors | 6 |
| 8 | WO2015057171A1 | Semiconductor device fabrication | 4 |
| 9 | US8921892B2 | High-performance nitride semiconductor devices | 3 |
| 10 | US20250098266A1 | Group iii-n device including source contact connected to substrate through trench | 2 |
Citation counts here are a signal of influence within this searched corpus, not of current commercial relevance — older filings accumulate citations simply by having been public longer.
Each row carries its publication number; clicking a row searches Eureka by that number.
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Browse MCP servers →What the numbers mean for a filing decision
Three patterns in this dataset matter more than the headline count of 49 families.
The wave has already crested
Filing activity rose sharply into 2019 and has not returned to that level since. A plateau this pronounced, in a corpus this small, suggests the core patterning approaches that mattered for this node are already staked out, and new entrants are more likely to be designing around existing claims than opening new ground.
One structural approach anchors the field
US20200083167A1, on low-capacitance gate contacts integrated with copper damascene structures, is cited more than double the next most-referenced record. Any freedom-to-operate review in gate-contact integration should start there rather than with a broad keyword sweep.
Filing is concentrated in two offices
United States and Israel together outweigh PCT, EPO, Singapore and Australia filings combined. A competitor building a defensive position purely through PCT or EPO routes would be filing into comparatively open territory relative to where the incumbents already sit.
Collaboration is narrow and academic
Co-assigned filings are limited to four pairs, all centred on the same MIT-affiliated inventor network. There is no evidence in this corpus of broad industry consortia; most filings are single-assignee, which lowers the chance of blocking cross-licences but also means fewer signals of where joint development is heading.
Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to gallium nitride hemt lithography, with the prior art for and against each one.
Who is filing, and who has gone quiet
Every tracked assignee in the recent-year momentum data shows zero filings in the latest year, including established names like Raytheon, Texas Instruments and the Stanford board of trustees. That is consistent with the corpus-wide plateau rather than any single company's retreat, but it means recent momentum cannot be used to pick a leader — the ranking table should be read on cumulative family counts instead.
MIT-centred inventor network
The strongest co-filing relationships in the dataset all link MIT with the same two named inventors, Tomas Apostol Palacios and Jinwook Chung, each pairing appearing twice. This is a research-lab filing pattern rather than a corporate one.
Agency for Science, Technology and Research
Singapore's national research agency appears both as a receiving-office contributor (Singapore: 4) and as the assignee on the representative record in this dataset, indicating a sustained state-backed research push into GaN contact and gate fabrication methods.
Raytheon, TI and Stanford's IP office
All three show zero filings in the most recent tracked year, Texas Instruments with a -100% YoY figure specifically noted. Given the 18-month publication lag, this understates true 2025-2026 activity, but it confirms none of these assignees pushed a late-cycle filing surge.
| Assignee | Recent year | YoY |
|---|---|---|
| Raytheon Company | 0 | — |
| Agency for Science, Technology and Research (A*STAR) | 0 | — |
| Massachusetts Institute of Technology (MIT) | 0 | — |
| Texas Instruments Incorporated | 0 | -100% |
| The Board of Trustees of the Leland Stanford Junior University | 0 | — |
| PALACIOS TOMAS APOSTOL | 0 | — |
| MOTSENBOCKER MARVIN | 0 | — |
| MING XU | 0 | — |
Where to take this analysis
The dataset points to specific next steps rather than a general monitoring exercise.
Clear the top-cited claim set first
Before drafting new gate-patterning claims, run a design-around check against US20200083167A1's copper damascene gate-contact structure — it is the single most-cited document in this corpus and the most likely blocking reference.
Explore prior art in EurekaTest the under-claimed branches
Gate-recess etch depth control and substrate-to-gate crystal coupling both show thin IPC coverage (C30B at just 3 records). Draft a claim there and check freedom-to-operate before committing R&D spend to a more crowded structural approach.
Run a white space search in EurekaWatch for the lag-delayed 2025-2026 wave
Because publication trails filing by about 18 months, the apparent 2025-2026 falloff may reverse once pending applications publish. Re-run this landscape in six to twelve months to confirm whether the plateau is real or an artefact of the data cut-off.
Set up monitoring in EurekaCommon questions about GaN HEMT gate lithography patents
T-gate patterning is the lithography step that defines a narrow gate foot for short channel length while keeping a wider gate head to reduce gate resistance, which matters directly for RF performance in GaN HEMTs. Because the geometry trade-off is process-specific rather than a property of the semiconductor material itself, patent offices treat the patterning method as a distinct invention from the device structure it produces. That is why this landscape searches gate lithography and T-gate patterning terms specifically, rather than relying on general GaN HEMT device claims, and why H01L filings dominate even though the underlying material science sits closer to crystal growth classes like C30B.
The corpus shows academic and state-research filers, including an MIT-affiliated inventor network and Singapore's national research agency, alongside established semiconductor and defense names such as Raytheon, Texas Instruments and Stanford's licensing office. None of these assignees show filings in the most recent tracked year, so recent momentum does not identify a current leader — cumulative family counts in the ranking table are the more reliable measure. Filing concentration by receiving office is also notable: the United States and Israel together account for most of the activity.
Yes, based on the data available: filings rose from 2 in 2017 to a peak of 17 in 2019, then fell back to 6 by the 2022 midpoint. That is a single wave rather than sustained growth. Remember that publication lags filing by roughly 18 months, so the very low 2025 and 2026 figures are partly a reporting artefact and should not be read as a sudden stop — but the multi-year plateau before that lag window is a genuine signal that the core patterning approaches for this generation of devices are largely staked out.
US20200083167A1 covers nitride structures with low-capacitance gate contacts integrated with copper damascene structures, and it is the most-cited record in this corpus at 33 citations, more than double the next-highest reference. Any team using damascene-style copper integration for the gate contact in a GaN HEMT process should review this claim set closely before finalizing a process flow, since it appears to anchor a meaningful share of the citing prior art in this field. Designing around it likely means either a different contact metallization sequence or a different capacitance-reduction mechanism than the damascene approach it claims.
The IPC composition shows thin coverage in a few specific branches: only 3 of 49 records touch C30B crystal growth, and only 2 each touch H02H protective circuits and H10P, despite the dense H01L coverage across the rest of the corpus. That suggests claim space combining gate-lithography methods with substrate-quality engineering, or with protective-circuit co-integration at the gate module level, is comparatively open. A first claim there would likely need to tie a specific gate-recess or T-gate step to a measurable substrate or protection-circuit outcome, rather than claiming the gate structure alone.
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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.
Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.
Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company’s registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.