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The agent works the prompt against patents and technical literature, citing every source.
Run your analysis now →Filing growth compares 2021 (2 records) with 2024 (5) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field. Top-5 share is the combined record count of the five largest assignees divided by all 186 records in scope (CR5), not by the ranked leaders only.
High frequency and RF wafer probing sits at the intersection of test-and-measurement hardware and semiconductor process control: probe cards, ground-signal-ground contact geometries, on-wafer calibration substrates, and the de-embedding methods that separate a device's true response from the parasitics of the fixture around it. The scope here spans 186 published records between 2015 and mid-2026, drawn from filings that combine RF probing or high-frequency probe language with impedance matching, de-embedding, calibration substrates, crosstalk-between-probes, ground-signal-ground contact layouts, or loss compensation.
Because publication trails filing by roughly 18 months, the most recent one to two years in any trend chart will understate real activity — treat the tail as a floor, not a ceiling.
Two views of the same 186 records: how filing activity has moved year over year, and which IPC subclasses carry the underlying claim volume.
Annual filings peaked so far at 17 in 2018, then eased before climbing again — 2021's 2 filings became 2024's 5, a +150% three-year rise. 2024 is the most recent year that can be read as complete; 2025 and 2026 will fill in as publications catch up.
G01R (electric & magnetic measurement) appears in 57.0% of the 186 records, well ahead of H01L semiconductor devices at 21.5% and A61B diagnosis & surgery at 16.1%. Waveguide and microwave hardware (H01P, 9.1%) and general material testing (G01N, 5.4%) are present but much thinner, which is consistent with most of the patenting effort going into measurement methodology and calibration rather than the RF hardware itself.
Shares are the percentage of the 186 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.
This page is one run against one query. Ask Eureka your own question about high frequency and rf wafer probing and every answer comes back with the patent numbers behind it.
Try EurekaA high frequency probe card for probing a photoelectric device includes a substrate having a first opening and at least one first through hole, an interposing plate disposed on the substrate and having a second opening and at least one second through hole, a circuit board disposed on the interposing plate and having a third opening and at least one third through hole, and a probe module mounted to the substrate and having at least one ground probe and at least one high-frequency impedance matching probe having a signal transmitting structure and a grounding structure passing through the through holes and being electrically connected with a signal pad.Filed by MPI Corporation, published 2017-01-03.


| # | Publication no. | Patent title | Citations |
|---|---|---|---|
| 1 | US6714165B2 | Ka/Ku dual band feedhorn and orthomode transduce (OMT) | 268 |
| 2 | US5148103A | Apparatus for testing integrated circuits | 236 |
| 3 | US20130266326A1 | Microlenses for Multibeam Arrays of Optoelectronic Devices for High Frequency Operation | 232 |
| 4 | US5623214A | Multiport membrane probe for full-wafer testing | 162 |
| 5 | US20150340841A1 | Laser arrays for variable optical properties | 148 |
| 6 | US5642054A | Active circuit multi-port membrane probe for full wafer testing | 137 |
| 7 | US6310483B1 | Longitudinal type high frequency probe for narrow pitched electrodes | 120 |
| 8 | US5313157A | Probe for testing an electrical circuit chip | 117 |
| 9 | US20050081245A1 | Method and apparatus for determining channel to which a TV or VCR is tuned | 84 |
| 10 | US20040066181A1 | High-frequency probe tip | 84 |
Citation counts inside this corpus favour older filings that have had more time to accumulate citations — read them as a signal of influence on the field, not of current commercial relevance.
Each row carries its publication number; clicking a row searches Eureka by that number.
When you want the answer in the next five minutes.
The agent works the prompt against patents and technical literature, citing every source.
Run your analysis now →When it has to run inside your own pipeline.
Patent search, landscape analysis and assignee resolution as MCP tools. Drop them into any agent framework, or call REST directly.
Browse MCP servers →Three read-outs from the dataset that matter more than the raw counts on their own.
Five assignees account for 103 of the 186 records in scope, and the leading ten climb to 71.0%. That leaves a long tail of single- or low-count filers working around the edges of territory the leaders already occupy.
The 2018 peak of 17 filings is past, but the more recent 2021→2024 climb from 2 to 5 filings is the growth figure worth tracking, since 2025–2026 data is still incomplete due to publication lag.
G01R (electric & magnetic measurement) touches well over half the records, more than double the share of H01P waveguide and microwave elements. Filing effort in this field concentrates on calibration and measurement technique rather than probe hardware design.
Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to high frequency and rf wafer probing, with the prior art for and against each one.
The leader holds 28 records; by fifth place that drops to 13, and by tenth place to 4 — a steep curve from a dominant leader to a broad field of occasional filers.
The top-ranked assignee holds 28 of the 186 records in scope, more than double the fifth-place count of 13, indicating a filer that has built a broad position across multiple probing sub-areas rather than a single narrow claim family.
Record counts fall from 13 at fifth place to 4 by tenth, meaning the top-10 concentration of 71.0% is carried disproportionately by the first few names rather than spread evenly across the group.
The ranking covers 52 companies in total across the 186 records — this is the complete ranked list the dataset returns, not a top-50 or top-100 cut, and most of those names sit well below the leading ten.
| Assignee | Recent year | YoY |
|---|---|---|
| Mitsubishi Electric Corporation | 0 | — |
| Hughes Aircraft Company | 0 | — |
| MPI Corporation | 0 | — |
| Brilliant Light Power, Inc. | 0 | -100% |
| Newtec CY N.V. | 0 | — |
| TriLumina Corporation | 0 | — |
| University of Virginia Patent Foundation | 0 | — |
| Hitachi, Ltd. | 0 | — |
The dataset points to concentration at the top and thin coverage in a few adjacent branches. Turning either observation into a filing or freedom-to-operate decision means going deeper into specific claim sets.
Before filing near ground-signal-ground contact geometries or calibration substrates, check what the leading assignee's 28 records actually claim, since a broad early position can narrow the room available for new filings.
Explore assignee claims in EurekaCrosstalk-compensated multi-probe arrays and sub-THz calibration substrates show thin filing density in this dataset. Drafting a first claim against that gap is a faster way to test viability than reading abstracts alone.
Draft and check claims in EurekaThis dataset identifies 186 published records between 2015 and mid-2026 that combine RF probing or high-frequency probe language with impedance matching, de-embedding, calibration substrates, crosstalk between probes, ground-signal-ground layouts, or loss compensation. That figure reflects one specific search scope, so a broader or narrower query on the same technology could return a different count. It should be read as the population this landscape is built on, not as an absolute count of every probing-related patent worldwide.
The leading assignee holds 28 of the 186 records in scope, and the top five combined account for 55.4% of all records. Filing counts drop sharply after that: by tenth place the count is down to 4 records, out of 52 companies that appear across the full ranking. That pattern points to one or two dominant filers alongside a long tail of occasional entrants rather than an evenly distributed field.
Filings peaked so far at 17 in 2018, dipped afterward, and have since climbed again — 2021's 2 filings grew to 2024's 5, a +150% increase over that three-year span. 2024 is the most recent year with a largely complete count, because publication typically lags filing by around 18 months. The 2025–2026 figures in any chart should be read as still filling in rather than as a genuine slowdown.
Electric and magnetic measurement (G01R) is the largest single class, appearing in 57.0% of the 186 records, well ahead of semiconductor devices (H01L) at 21.5% and diagnosis and surgery (A61B) at 16.1%. Waveguide and microwave hardware (H01P) and general material testing (G01N) are present but much thinner. Because a single record can carry multiple IPC classes, these shares add up to more than 100% and should not be summed into a single total.
US9535093B2, assigned to MPI Corporation and published in January 2017, claims a high-frequency probe card with a substrate, an interposing plate and a circuit board stacked with aligned through-holes, carrying a probe module with at least one ground probe and one high-frequency impedance-matching probe. It matters because it ties a specific mechanical stack-up to the electrical function of impedance matching in a probe card, which narrows the room for a near-identical structural approach. Anyone designing a probe card with a similar layered through-hole geometry and matched ground/signal probe pairing should review this claim set closely before finalising a design.
Relative to the dense G01R and H01L classes, sub-areas such as crosstalk-compensated multi-probe arrays, calibration substrates suited to sub-THz de-embedding, and loss-compensation methods for flexible membrane probes show thinner filing density in this dataset. These are not guaranteed gaps — they may simply be harder problems with fewer solved approaches — but they are areas where a well-drafted first claim faces less crowded prior art than the core measurement classes.
Go past this page: query the whole high frequency and rf wafer probing corpus yourself, in your own scope.
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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.
Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.
Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company's registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.