Megasonic Cleaning Patents: Top Companies & Filing Trends 2026
Megasonic and Physical Particle Removal Patents
19.2% concentration at the top. The five leading assignees combine for 279 of the 1,451 records in scope, a meaningful but not overwhelming share of the field. Filings peaked at 47 in 2017 and have since settled into a lower but climbing band — 16 in 2021 rising to 21 in 2024, a +31% increase. The 2025 and 2026 figures are undercounts because publication trails filing by roughly 18 months; do not read the tail-off as a slowdown.
- 1LAM RES CORP8.2%
- 2APPLIED MATERIALS INC4.5%
- 3FONTANA TECH2.3%
- 4TECH SONIC LLP2.3%
- 5KYOCERA CORP2.0%
See the full megasonic and physical particle removal analysis in Eureka
- The complete ranking, not just the top five
- Every IPC branch with its share of the corpus
- The most-cited records, and where claim space is still thin
Common questions on megasonic cleaning patents
Who holds the most patents in megasonic and physical particle removal?
One assignee leads the ranked list with 119 records, well ahead of fifth place at 29 and tenth at 24. The top five combined hold 279 of the 1,451 records in scope, which is 19.2% of the field — a real lead but not a lockout, since the drop-off from the leader to the rest of the ranked field is gradual rather than a cliff. Anyone assessing competitive risk should look at the full ranked list of 100 companies rather than assuming the top handful controls the space.
Is megasonic cleaning patent activity growing or slowing down?
Filings are growing on the most reliable recent measure available: 16 records in 2021 rose to 21 in 2024, a +31% increase. Filings peaked earlier at 47 in 2017 and dipped afterward, so the shape is a decline-then-recovery rather than steady growth throughout. Figures for 2025 and 2026 look lower, but that reflects the roughly 18-month lag between filing and publication, not an actual slowdown.
What technology areas dominate megasonic cleaning patent claims?
B08B, the general cleaning classification, appears on 38.8% of the 1,451 records, the single largest IPC share in this dataset. H01L semiconductor-device claims follow at 29.0% and H10P at 20.2%, with smaller but notable shares in C11D detergents (6.0%), G03F photolithography (5.7%) and B06B mechanical vibration generation (5.4%). Because records can carry multiple IPC codes, these percentages overlap rather than sum to 100%, showing that most innovation here is claimed jointly across cleaning method and semiconductor device.
Disclaimer. This analysis is based on Patsnap Eureka data drawn from a limited snapshot of global patent records and is provided for general information and reference only. Patent data carries inherent limitations — recent filings are under-counted because of publication lag, counts may be on a record or family basis, classification and applicant-name data may contain errors or duplicates, and the underlying search query defines the scope shown — so the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
Nothing here is an exhaustive prior-art, novelty, freedom-to-operate or validity search, nor does it constitute legal, financial or professional advice, and it should not be relied upon as such. Verify independently and review with qualified patent and legal professionals before acting on it.
Method: Filing trend and technology composition. Derived from a Patsnap search on Megasonic and Physical Particle Removal covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish. Every share divides by all records in scope. Data: Patsnap Eureka. See the full landscape report.