MEMS & NEMS Patents: Who Leads, Where the Gaps Are 2026
- Concentrated but not locked up. the ranked leader holds 159 records and the top 5 combined account for just 19.3% of all 3,591 records in scope — no single filer controls the field.
- Diagnosis and surgery, not raw MEMS structure, is the biggest single class. A61B carries 28.5% of records, well ahead of B81B microstructural devices at 8.5%, showing where MEMS sensing is actually being claimed — inside bigger medical systems.
- Filing growth has cooled from its 2018 peak. output fell from 212 in 2021 to 150 in 2024, a 29% decline over that span, though 2025-2026 figures are still filling in and will read low regardless.
Filing growth compares 2021 (212 records) with 2024 (150) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field. Top-5 share is the combined record count of the five largest assignees divided by all 3,591 records in scope (CR5), not by the ranked leaders only.
What this dataset covers
This landscape draws on 3,591 published records filed between 2015 and 2026 that combine MEMS or NEMS system claims with transducer, sensing-platform, signal-conditioning or calibration language. The search deliberately pairs the physical device (a microelectromechanical or nanoelectromechanical system) with a functional claim element, so the corpus captures applied sensing systems rather than bare fabrication process patents.
Because publication lags filing by roughly 18 months, the most recent one to two years in any trend chart will always look thinner than they eventually turn out to be. Treat 2024 as the last year with a reasonably complete picture, and read 2025-2026 as provisional.
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Filing trend and technology composition
Two views of the same 3,591-record corpus: how filing volume has moved year over year, and which IPC subclasses carry the claim weight.
A 2018 peak followed by a multi-year pullback
Filings ran from 159 in 2017 to a peak of 257 in 2018, then eased. The 2021-to-2024 window shows a clean, comparable decline — 212 down to 150, a 29% drop — because both years are past the publication lag and safe to compare directly.
Medical and diagnostic systems dominate the class mix
A61B (diagnosis and surgery) appears on 28.5% of all records, more than three times the share of B81B (microstructural devices, 8.5%), the subclass closest to MEMS fabrication itself. G01N material testing, G01S positioning, H01L semiconductor, G02B optics, H04R audio transducers and G06F data processing each sit in the 6.5%-8.9% range, showing MEMS sensing spread thinly across many host systems rather than concentrated in one.
Shares are the percentage of the 3,591 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.
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Try EurekaA representative claim and the most-cited prior art
US20150125003A1 — System and Method for a MEMS Transducer (Infineon Technologies AG, filed 2015-05-07)
An embodiment as described herein includes a microelectromechanical system (MEMS) with a first MEMS transducer element, a second MEMS transducer element, and a semiconductor substrate. The first and second MEMS transducer elements are disposed at a top surface of the semiconductor substrate and the semiconductor substrate includes a shared cavity acoustically coupled to the first and second MEMS transducer elements.The claim ties two transducer elements to a single shared, acoustically coupled cavity on one substrate — a specific structural arrangement, not a generic dual-transducer MEMS claim.


| # | Publication no. | Patent title | Citations |
|---|---|---|---|
| 1 | US20190201045A1 | Method for smoke evacuation for surgical hub | 1,327 |
| 2 | US20190201047A1 | Method for smart energy device infrastructure | 1,272 |
| 3 | US20160270656A1 | Methods and systems for diagnosing and treating health ailments | 1,201 |
| 4 | US20090152664A1 | Materials, Systems and Methods for Optoelectronic Devices | 660 |
| 5 | US20120083705A1 | Activity Monitoring Systems and Methods of Operating Same | 553 |
| 6 | US20190201090A1 | Capacitive coupled return path pad with separable array elements | 507 |
| 7 | US20190201091A1 | Radio frequency energy device for delivering combined electrical signals | 394 |
| 8 | US20140113828A1 | Electrical, mechanical, computing/ and/or other devices formed of extremely low resistance materials | 350 |
| 9 | US7530948B2 | Tethered capsule endoscope for Barrett's Esophagus screening | 350 |
| 10 | US20050017602A1 | Shaft mounted energy harvesting for wireless sensor operation and data transmission | 333 |
Citation counts favour older filings that have had more years to accumulate citations within this searched set — read them as a signal of influence on the field, not of current filing activity.
Each row carries its publication number; clicking a row searches Eureka by that number.
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Three patterns stand out once volume, timing and classification are laid side by side.
No single assignee controls the field
The leader holds 159 records and the top 5 combined reach 692, only 19.3% of all 3,591 records in scope. The top 10 combined reach 32.2%. That leaves roughly two-thirds of the corpus spread across a long tail of the remaining ranked assignees and unranked filers.
Volume has pulled back from its 2018 peak
Filings peaked at 257 in 2018 and the last fully comparable window, 2021 to 2024, shows a 29% decline. Because publication lags filing by around 18 months, 2025 and 2026 figures will keep revising upward and should not yet be read as continuing the decline.
Sensing claims sit inside host systems, not bare MEMS structure
A61B diagnosis-and-surgery claims outnumber B81B microstructural-device claims by more than three to one. MEMS and NEMS elements in this corpus are most often claimed as a component inside a larger medical, positioning, or audio system rather than as a freestanding device class.
Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to mems & nems patent landscape, with the prior art for and against each one.
Who is filing, and where activity has slowed
The ranked leaders span medical imaging, surgical navigation, semiconductor sensing and automotive suppliers — a mix that reflects how widely MEMS sensing has been absorbed into other product categories.
Even active filers show single-digit recent output
Infineon Technologies shows 1 filing in the latest year, down 83% year over year, in line with the broader cooling seen since the 2021-2024 window. This is consistent with a maturing claim landscape rather than an exit from the space.
The strongest co-assignee link is intra-group
The single strongest co-assignee pair in this corpus links Koninklijke Philips with its Image Guided Therapy subsidiary at 17 shared filings, reflecting internal cross-filing between parent and business unit rather than external collaboration.
Filing is heavily routed through the US and EPO
The United States receives 1,775 filings, well ahead of Europe (EPO) at 514 and WIPO/PCT at 340. Australia, Canada and Germany each sit in the 130-153 range, indicating a secondary tier of jurisdictions for follow-on protection.
| Assignee | Recent year | YoY |
|---|---|---|
| Koninklijke Philips N.V. | 1 | — |
| Philips Image Guided Therapy Corp | 1 | -50% |
| Infineon Technologies AG | 1 | -83% |
| Robert Bosch GmbH | 1 | 0% |
| NAVICO HLDG | 0 | — |
| Magic Leap Inc | 0 | -100% |
| Johnson & Johnson Vision Care Inc | 0 | — |
| Edwards Lifesciences Corp | 0 | -100% |
Where to take this analysis
This landscape is a starting point for a freedom-to-operate check or a competitive filing review, not a substitute for either.
Run a claim-level FTO check
The IPC composition shows where filing density sits, but only a claim-by-claim read of the records in a target subclass will show whether a specific design is blocked.
Explore in Patsnap Eureka →Track the ranked leaders' recent filings
Momentum figures here are annual snapshots; a standing watch on the ranked assignees will catch new filings as they publish, including the 2025-2026 records still working through the lag.
Set up a watch in Patsnap Eureka →Common questions about MEMS and NEMS patents
Across this 3,591-record corpus, the ranked leader holds 159 records, but no single company dominates the field: the top 5 assignees combined account for only 19.3% of all records in scope, and the top 10 combined reach 32.2%. The ranking covers 100 companies, so it should be read as a broad field map rather than a short list of dominant players. Names span medical imaging and surgical navigation firms alongside semiconductor and automotive-sensor suppliers, reflecting how widely MEMS sensing has been embedded into other product categories.
Filing peaked in 2018 at 257 records and has pulled back since; the most recent fully comparable window, 2021 to 2024, shows a 29% decline from 212 to 150. Figures for 2025 and 2026 currently look lower still, but that is expected: publication lags filing by roughly 18 months, so the newest years are always undercounted at the point of measurement. A fair read is a cooling trend through 2024, with the last two years not yet settled.
A61B, the diagnosis-and-surgery class, appears on 28.5% of all 3,591 records, making it the single largest category by a wide margin. B81B, the microstructural-devices class most directly associated with MEMS fabrication, sits at 8.5%, on par with G01N material testing, G01S positioning and H01L semiconductor devices. This spread indicates that most MEMS and NEMS claims in this corpus describe sensing components embedded in larger systems, particularly medical devices, rather than standalone MEMS hardware.
Relative to the density in A61B and the broader host classes, sub-areas like shared-cavity multi-transducer packaging, NEMS-scale resonant sensing, and calibration routines for multi-sensor fusion carry comparatively thinner direct claim coverage. That does not mean these areas are unclaimed, but that filing density is lower than in the dominant medical and semiconductor classes, which is where a first claim is more likely to find open space. Any specific design should still be checked against the relevant assignees' full portfolios before relying on apparent white space.
US20150125003A1, assigned to Infineon Technologies AG and filed 2015-05-07, claims a MEMS device with two transducer elements on a shared semiconductor substrate connected to a single acoustically coupled cavity. The specificity of that arrangement — two elements, one shared cavity, acoustic coupling — means it blocks that particular structural configuration rather than dual-transducer MEMS designs generally. Designs using separate cavities per transducer, or coupling mechanisms other than acoustic, would sit outside its literal claim scope, though a full freedom-to-operate review should check the granted claim language directly rather than the abstract.
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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.
Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.
Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company’s registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.