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Run your analysis now →https://www.patsnap.com/resources/blog/rd-blog/mems-timing-oscillator-technology-landscape-patent-landscape/ · Patsnap · data cut-off 2026-07-31 · downloaded from the live page
Patent Landscape · Sensors & MEMSMEMS timing oscillator patents: mapping who filed, what they claimed, and where the field has gone quiet
- Filing has flattened, not grown. Activity peaked at 5 families in 2023 after a 2017 base of 4, with the 2022 midpoint at just 1 — this is a mature, not accelerating, field.
- Filing is split three ways by geography. United States (13), China (8) and WIPO/PCT (3) each host a distinct slice of the record, with Europe and South Korea contributing single digits.
- No assignee shows current momentum. Every tracked assignee, including the most active filers, shows zero activity in the latest year — the leaderboard reflects historical position, not present filing.
26
Published Records
69%
Top-5 Share of All Records
+100%
3-Yr Growth (lag-adjusted)
US
Leading Jurisdiction
Published byPatsnap Research··7 min readSourced from Patsnap Eureka
Overview
What the dataset covers
This landscape draws on 26 published patent families filed between 2015 and mid-2026 that claim MEMS oscillator, MEMS timing device or silicon resonator oscillator technology, narrowed to records also touching silicon MEMS resonator design, temperature compensation, phase noise reduction or frequency stability under IPC classes H03H9/24, H03B5/30 and H03L1. The corpus is small relative to broader MEMS or timing-circuit searches, which is itself informative: this is a specialised, well-defined niche rather than a sprawling one.
Because publication typically lags filing by around 18 months, the 2025-2026 figures in any trend line understate real filing activity; the drop shown at the most recent year is partly a reporting artefact rather than a clean signal of retreat.
Filing activity by year, 2017-2026
Source: Patsnap Eureka. Assignee ranking and totals. Derived from a Patsnap search on MEMS Timing Oscillator Technology Landscape covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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The Data
Filing trend and technology composition
Two views of the same 26-family dataset: how filing volume moved year over year, and how those filings distribute across IPC subclasses.
A flat trajectory with a mid-decade peak
Filings opened at 4 in 2017, dropped through a low point of 1 in 2022, then recovered to a peak of 5 in 2023 before tapering toward the partial 2026 count of 0. That shape reads as a mature technology being periodically refreshed by specific product cycles rather than one experiencing sustained new-entrant growth.
Concentration in filtering and oscillation control
H03H (impedance networks and filters) and H03B (oscillation generation) dominate at 16 and 13 records respectively, with H03L (automatic frequency/phase control) close behind at 9. MEMS-specific manufacturing classes B81B and B81C appear in only 3 and 2 records, suggesting most of the claimed value sits in the circuit and control layer built around the resonator rather than in the resonator's microstructure itself.
Shares are the percentage of the 26 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.
Source: Patsnap Eureka. Filing trend and technology composition. Derived from a Patsnap search on MEMS Timing Oscillator Technology Landscape covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.
Go deeper on MEMS Timing Oscillator Technology Landscape with Eureka
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The most-cited records in this corpus
Representative filing
Oven controlled MEMS oscillator and system and method for calibrating the same
MURATA MANUFACTURING CO., LTD.
A calibration system is provided for an oven controlled MEMS oscillator. The calibration system includes control circuitry that separately selects predetermined target set-point values and controls a heater inside the oven controlled MEMS oscillator based on each of the selected target set-point values to adjust a set-point of the oven controlled MEMS oscillator. The system further includes an oscillation measurement circuit that measures respective oscillation frequencies at each adjusted set-point corresponding to each of the selected predetermined target set-point values.Filed by Murata Manufacturing, published 2019-09-24 as US10425084B2.
Highest-citation families
| # | Publication no. | Patent title | Citations |
|---|---|---|---|
| 1 | CN112953435A | 一种基于参数泵的MEMS振荡器 | 13 |
| 2 | US20180019754A1 | Oven controlled MEMS oscillator | 12 |
| 3 | US20140159826A1 | MEMS oscillators | 11 |
| 4 | EP2530836A1 | Oven controlled MEMS oscillator | 10 |
| 5 | US9209746B2 | MEMS oscillators | 5 |
| 6 | CN114785310A | 一种硅MEMS谐振器及其本体压阻热实现频率漂移自补偿方法 | 4 |
| 7 | US11811380B2 | Micro-resonator design implementing internal resonance for MEMS applications | 4 |
| 8 | US20220158602A1 | Micro-resonator design implementing internal resonance for MEMS applications | 4 |
| 9 | CN117318706A | 基于模态耦合和相位控制的振荡器频率稳定性提升系统 | 3 |
| 10 | CN118367867A | MEMS振荡器及电子设备 | 3 |
Citation counts inside a searched corpus skew toward older filings simply because they have had more time to accumulate references; treat this as a measure of historical influence, not current relevance.
Patent titles are shown in the language they were filed in, not translated, so that each record stays verifiable against the original filing — a translated title will not match in Eureka or in any national register. Each row carries its publication number; clicking a row searches Eureka by that number.
Source: Patsnap Eureka. Citation counts and representative records. Derived from a Patsnap search on MEMS Timing Oscillator Technology Landscape covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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What the numbers mean for a filing decision
Three patterns stand out once the raw counts are read against what they imply for a team deciding where to file next.
Filing trend
5 filings in 2023
peak year
The field refreshes in bursts, not a steady climb
A 2022 low of 1 followed by a 2023 peak of 5 points to episodic filing tied to specific product launches rather than continuous R&D investment across the field. A new entrant should expect competitive filings to cluster, not trickle in.
Based on 26 families, 2017-2026
Geography
13 US, 8 China, 3 PCT
receiving offices
US and China carry most of the record, but neither dominates outright
With Europe and South Korea each contributing a single filing, protection strategy so far has concentrated on the two largest end markets. A filer targeting Europe alone would be entering comparatively open ground.
By receiving office, all years
Technology mix
16 H03H vs 3 B81B
filter/circuit vs MEMS structure
Claim density sits in the circuit layer, not the resonator
Impedance-network and oscillation-generation classes account for most of the corpus, while MEMS structural and manufacturing classes (B81B, B81C) are thin. That imbalance suggests resonator microstructure claims face less prior art than the surrounding calibration and control circuitry.
IPC subclass distribution, 26 records
Momentum
0 latest-year filings
across all tracked assignees
No assignee currently shows active momentum
Every assignee reviewed for recent-year activity, including the most historically prolific ones, recorded zero filings in the latest year, with at least one showing a -100% year-over-year drop. Read alongside the publication lag, this is as likely to reflect a reporting gap as a genuine pullback.
Recent-year momentum by assignee
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Looking for what nobody has claimed yet?
Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to mems timing oscillator technology landscape, with the prior art for and against each one.
Source: Patsnap Eureka. Co-assignee relationships and derived observations. Derived from a Patsnap search on MEMS Timing Oscillator Technology Landscape covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Players
Who holds the claim space
The assignee base is small and includes both corporate filers and academic or individual inventors, with a handful of two-inventor collaborations rather than large filing teams.
Corporate filer
Co-filing pair
Murata + Kaajakari
Murata Manufacturing
Murata appears both in the most-cited table (via oven-controlled oscillator filings) and in the strongest co-assignee pairing in the dataset, alongside inventor Ville Kaajakari. Its filings concentrate on oven-controlled calibration, a sub-area with dense citation activity.
Co-assignee strength: 2
Academic filer
0 latest-year
filings
Xi'an Jiaotong University
Among the academic entrants in this corpus, filing activity has not extended into the most recent year, consistent with the broader flat momentum pattern across all tracked assignees.
Recent-year momentum: 0
Corporate filer
-100% YoY
momentum
Huawei Technologies
Huawei shows the sharpest recorded pullback in the dataset, moving to zero filings in the latest year after prior activity, a -100% year-over-year change that stands out even against a generally flat field.
Recent-year momentum by assignee
Individual inventor group
2 co-assignee pairs
Seth Manu network
Seth Manu, Quevy Emmanuel P, Motiee Mehrnaz
This inventor group forms two of the five co-assignee pairs in the corpus, suggesting a small internal team working related MEMS oscillator claims rather than a single large corporate programme.
Co-assignee pairs: 2 each
Recent-year filing momentum
| Assignee | Recent year | YoY |
|---|---|---|
| Murata Manufacturing Co., Ltd. | 0 | — |
| Ohio State Innovation Foundation | 0 | — |
| Xi'an Jiaotong University | 0 | — |
| NXP B.V. | 0 | — |
| Huawei Technologies Co., Ltd. | 0 | -100% |
| SETH MANU | 0 | — |
| QUEVY EMMANUEL P | 0 | — |
| MOTIEE MEHRNAZ | 0 | — |
Source: Patsnap Eureka. Assignee-level momentum. Derived from a Patsnap search on MEMS Timing Oscillator Technology Landscape covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
What's Next
Where to take this analysis
The dataset points to a stable but narrow claim landscape. The next steps depend on whether the goal is freedom-to-operate, white-space filing, or monitoring a specific competitor.
Run a freedom-to-operate check on oven-controlled calibration
The most-cited records in this corpus, including the Murata and EP-family filings, concentrate on oven-controlled oscillator calibration. Any product using set-point calibration logic should be checked against this cluster specifically.
Check claims in EurekaModel a first claim in the resonator microstructure gap
B81B and B81C representation is thin against H03H and H03B volume. A claim anchored in resonator microstructure or wafer-level packaging, rather than surrounding circuitry, has more room to establish novelty.
Draft a claim scenario in EurekaTrack whether the 2026 dip reverses
Given the roughly 18-month publication lag, the apparent 2025-2026 falloff may resolve upward as more filings publish. Re-running this trend in two quarters will separate a real slowdown from a reporting gap.
Set a monitoring alert in EurekaSource: Patsnap Eureka. Forward-looking reading of the same dataset. Derived from a Patsnap search on MEMS Timing Oscillator Technology Landscape covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
FAQ
Common questions about MEMS timing oscillator patents
This dataset identifies 26 published patent families filed between 2015 and mid-2026 that specifically combine MEMS oscillator or silicon resonator claims with temperature compensation, phase noise reduction or frequency stability language under IPC classes H03H9/24, H03B5/30 and H03L1. That is a narrow, well-defined slice of the broader MEMS and timing-circuit patent space, not a count of every MEMS-related filing. Broader searches without the IPC and abstract-language restrictions would return a larger number.
Murata Manufacturing appears prominently in this corpus, both through highly cited oven-controlled oscillator filings and through the strongest co-assignee collaboration recorded. Other organisations present include Xi'an Jiaotong University, NXP, and Huawei Technologies, alongside individual inventor groups such as Seth Manu's team. None of the tracked assignees, however, show filings in the most recent year, so current leadership by filing volume differs from historical leadership by citation.
Filing volume in this dataset is flat to declining rather than growing: it opened at 4 families in 2017, dipped to 1 at the 2022 midpoint, recovered to a peak of 5 in 2023, and shows 0 in the partial 2026 year. Because patent publication typically lags filing by about 18 months, the most recent one to two years understate true activity, so the 2026 figure should not be read as a hard stop. Even accounting for that lag, the multi-year pattern is one of maturity rather than expansion.
The clearest gap sits in MEMS structural and manufacturing classes: B81B and B81C together account for only 5 of the 26 records, against 16 in H03H and 13 in H03B. That means most claimed value concentrates in the surrounding filter and oscillation-control circuitry rather than in resonator microstructure or wafer-level packaging design. A filer with a genuinely novel resonator geometry or packaging approach is likely to face less crowded prior art than one filing on calibration or phase-noise circuitry.
US10425084B2, assigned to Murata Manufacturing and published 2019-09-24, covers a calibration system for an oven-controlled MEMS oscillator that selects target set-point values, drives an internal heater to reach each one, and measures the resulting oscillation frequencies to determine an optimal operating set-point. It sits within the most-cited cluster of this dataset alongside related oven-controlled oscillator filings from the same period. Anyone designing temperature-compensation or oven-control logic for a MEMS oscillator should review this family specifically rather than relying on general phase-noise or frequency-stability art.
Answers are grounded in the same dataset. Derived from a Patsnap search on MEMS Timing Oscillator Technology Landscape covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.
Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.
Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company's registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.