https://www.patsnap.com/resources/blog/rd-blog/micromachined-ultrasonic-transducers-patent-landscape/ · Patsnap · data cut-off 2026-07-31 · downloaded from the live page
Patent Landscape · Updated 2026
Micromachined ultrasonic transducer patents: who holds the CMUT and PMUT claim space
  • Top 5 filers hold 43.7% of all 284 records in scope — concentrated but not closed, since more than half the field sits outside that group.
  • Filing has cooled from its 2021 peak of 25 records to 12 in 2024, a -52% swing over three years, even as the underlying technology keeps diversifying across classes.
  • B06B and A61B dominate the IPC mix at 59.9% and 26.4% of records respectively, while MEMS-specific B81B sits at just 11.3% — a narrower, less crowded lane.
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284
Published Records
44%
Top-5 Share of All Records
-52%
Filing Growth 2021→2024
US
Leading Jurisdiction

Filing growth compares 2021 (25 records) with 2024 (12) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field. Top-5 share is the combined record count of the five largest assignees divided by all 284 records in scope (CR5), not by the ranked leaders only.

Published byPatsnap Research··7 min readSourced from Patsnap Eureka
Overview

What this landscape covers

This landscape tracks patent activity naming capacitive micromachined ultrasonic transducers (CMUT) and piezoelectric micromachined ultrasonic transducers (PMUT) in the title, cross-referenced against claim and description language covering membrane collapse mode, bias voltage control, fabrication yield, receive sensitivity, electronics integration and array uniformity. These are the practical levers that separate a working device from a lab demonstration, so the search string is built to surface records that address manufacturing and performance, not just device concepts.

The scope spans filings from 2015 through the middle of 2026, with 284 records in total. Because publication trails filing by roughly 18 months, the most recent one to two years understate real filing activity — treat 2024 as the last complete year for trend reading.

Filing activity and technology composition, 2015-2026
  1. 1THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIV33
  2. 2OLYMPUS CORPORATION(JP)27
  3. 3GEORGIA TECH RES CORP26
  4. 4INVENSENSE INC22
  5. 5KOLO MEDICAL (SUZHOU) CO LTD16
  6. 6KONINKLIJKE PHILIPS NV15
  7. 7ORCHARD ULTRASOUND INNOVATION LLC13
  8. 8UNIVERSITY OF WINDSOR13
  9. 9CANON KK12
  10. 10RES TRIANGLE INST12
Source: Patsnap Eureka. Assignee ranking and totals. Derived from a Patsnap search on Micromachined Ultrasonic Transducers covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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The numbers

Filing trend and technology composition

Two views of the same 284-record dataset: how filing volume has moved year over year, and which IPC subclasses carry the claim density.

A 2021 peak, then a pullback

Filings rose from 17 in 2017 to a peak of 25 in 2021, then declined to 12 by 2024 — a -52% move over that three-year span. Readings for 2025 and 2026 are still incomplete due to publication lag and should not be read as a continued decline.

A 2021 peak, then a pullback06131925172017201820192020252021202220232024202502026Most recent year is partial — publication lag means later filings are not yet visible.

Mechanical vibration and diagnostic imaging classes lead

B06B (generating mechanical vibrations) appears on 59.9% of the 284 records, followed by A61B (diagnosis and surgery) at 26.4%. Solid-state and semiconductor classes (H10N, H01L) each sit near a quarter of records, reflecting how much of the field is fabrication-driven rather than purely acoustic. Because records carry multiple IPC codes, these shares add up to well over 100%.

Mechanical vibration and diagnostic imaging classes leadB06B · Generating mechanical vibratio…17059.9%A61B · Diagnosis & surgery7526.4%H10N · Other electric solid-state dev…6723.6%H01L · Semiconductor devices6522.9%H04R · Loudspeakers & audio transduce…5619.7%G01N · Material analysis & testing4315.1%H02N · Electric machines (other)3412.0%B81B · Microstructural devices (MEMS)3211.3%Other14350.4%

Shares are the percentage of the 284 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.

Source: Patsnap Eureka. Filing trend and technology composition. Derived from a Patsnap search on Micromachined Ultrasonic Transducers covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.

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Key patents

The most-cited records in this space

Representative filing
US20210063553A12021-03-04

Measurement Method of Ultrasonic Wave Using Capacitive Micromachined Ultrasonic Transducer

HITACHI, LTD.

Disclosed is a measurement method of ultrasonic waves using a capacitive micromachined ultrasonic transducer. The method includes measuring an ultrasonic wave by applying a bias voltage to the capacitive micromachined ultrasonic transducer in each of a plurality of first periods, and applying a voltage that is equal to or greater than 0V and smaller than the bias voltage to the capacitive micromachined ultrasonic transducer in a second period between two first periods among the plurality of first periods.Filed by Hitachi, published 2021-03-04 as US20210063553A1.

US20210063553A1 — patent drawing 1US20210063553A1 — patent drawing 2
View full filing
Highest-citation records in scope
#Publication no.Patent titleCitations
1US20050200241A1Multiple element electrode cMUT devices and fabrication methods200
2US20090122651A1Direct wafer bonded 2-D CUMT array159
3US20080048211A1Trench isolated capacitive micromachined ultrasonic transducer arrays with a supporting frame146
4US7449821B2Piezoelectric micromachined ultrasonic transducer with air-backed cavities124
5US7846102B2Direct wafer bonded 2-D CUMT array121
6US20050203397A1Asymetric membrane cMUT devices and fabrication methods121
7US20170021391A1Micromachined ultrasonic transducers with a slotted membrane structure106
8US7612483B2Harmonic cMUT devices and fabrication methods105
9US20060238067A1Piezoelectric micromachined ultrasonic transducer with air-backed cavities104
10US20070161896A1Capacitive micromachined ultrasonic transducer (cMUT) and its production method95

Ranked by citation count within this corpus; older filings accumulate citations simply by being available longer, so treat this as a signal of influence rather than current relevance.

Each row carries its publication number; clicking a row searches Eureka by that number.

Source: Patsnap Eureka. Citation counts and representative records. Derived from a Patsnap search on Micromachined Ultrasonic Transducers covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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Insights

Reading the concentration and the composition together

The ranking and the IPC mix point in the same direction: a handful of filers built early positions around fabrication and bias-voltage control, while the acoustic and imaging-integration layers remain more open.

Concentration
43.7%
of 284 records held by top 5

The top of the field is dense, the rest is a long tail

Five assignees account for 124 of the 284 records in scope. That leaves 56 other ranked companies splitting the remainder, several with only one or two filings — a classic long-tail structure rather than a two-player race.

Top 10 combined reach 66.5% of all records.
Momentum
-52%
2021 to 2024 filing change

Volume has pulled back from its 2021 peak

Filings peaked at 25 in 2021 and fell to 12 by 2024. Several of the most active historical filers show no filings in the latest tracked year, consistent with a maturing first wave of fabrication patents rather than a shrinking field overall.

2025-2026 figures are still filling in due to publication lag.
Technology mix
11.3%
of records in B81B (MEMS structures)

MEMS-specific claims are a narrower lane than the acoustic ones

B06B and A61B carry the bulk of filing activity, but B81B — the microstructural/MEMS device class most directly tied to wafer-level fabrication — covers just 32 of 284 records. That is a comparatively open lane for process and yield claims.

H02N (electric machines) sits close behind at 12.0%.
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Looking for what nobody has claimed yet?

Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to micromachined ultrasonic transducers, with the prior art for and against each one.

Find the white space →
Source: Patsnap Eureka. Co-assignee relationships and derived observations. Derived from a Patsnap search on Micromachined Ultrasonic Transducers covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Who is filing

Assignee landscape

The ranking covers 57 companies across academic, medical-imaging and semiconductor backgrounds. Ranking position moves quickly outside the leading group, since single-digit filing counts separate mid-table entrants.

Leader
33
records

A clear single leader at the top

The top-ranked assignee holds 33 records, well ahead of the fifth-place filer at 16 — a gap that marks a genuine leadership position rather than a marginal one.

Tenth place sits at 12 records, close behind fifth.
Co-filing
10
co-assignee pairs

Collaboration is limited and mostly institutional

Only ten co-assignee pairs appear in the dataset. The strongest pairing links a research institute with an individual inventor, and academic-industry pairs among the recurring names suggest sponsored or licensed research rather than broad joint ventures.

Co-filing is the exception here, not the norm.
Momentum
0
latest-year filings for several leaders

Several historical leaders have gone quiet in the latest year

A number of the most active assignees by cumulative count show zero filings in the most recent tracked year. Given publication lag, this is as likely to reflect filings still working through the pipeline as an actual pullback.

Read latest-year-zero figures alongside the 2024 trend, not in isolation.
🔍
Under-claimed sub-areas worth checking before filing
These branches carry lower density in the current IPC mix and are worth a freedom-to-operate check before assuming the space is open.
Trench-isolated array framesElectronics-on-membrane integrationCollapse-mode bias control circuitsWafer-level yield testing methodsMulti-frequency array uniformity
Rank all filers by momentum →
Recent-year filing momentum by assignee
AssigneeRecent yearYoY
The Board of Trustees of the Leland Stanford Junior University0-100%
Georgia Tech Research Corporation0
Koninklijke Philips N.V.0
Olympus Medical Systems Corp.0
Kolo Technologies, Inc.0
University of Windsor0
Orchard Ultrasound Innovation LLC0
Olympus Corporation0
Source: Patsnap Eureka. Assignee-level momentum. Derived from a Patsnap search on Micromachined Ultrasonic Transducers covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
What's next

Where to take this analysis

The dataset points to specific next steps depending on whether the goal is freedom-to-operate, licensing, or identifying a filing gap.

Check freedom-to-operate against the leading five

With 43.7% of records held by five assignees, any new fabrication or bias-control filing should be checked against their claim scope before drafting.

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Track the momentum shift year over year

Several top-cumulative filers show zero activity in the latest tracked year. Watching whether that continues past the publication-lag window will show whether the field is consolidating or just pausing.

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Scope the MEMS and electronics-integration lanes

B81B and array-uniformity claims sit at lower density than the acoustic classes, which is where a narrower, defensible filing is more likely.

Explore white space in Eureka
Source: Patsnap Eureka. Forward-looking reading of the same dataset. Derived from a Patsnap search on Micromachined Ultrasonic Transducers covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
FAQ

Common questions on CMUT and PMUT patents

Answers are grounded in the same dataset. Derived from a Patsnap search on Micromachined Ultrasonic Transducers covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.

Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.

Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.

Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company's registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.