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Nanosheet Transistor Scale-Up Patent Landscape 2026

Nanosheet Transistor Scale-Up Patent Landscape 2026
https://www.patsnap.com/resources/blog/rd-blog/nanosheet-transistor-scale-up-and-mass-production-patent-landscape/ · Patsnap · data cut-off 2026-07-31 · downloaded from the live page
Semiconductors & Microelectronics · Patent Landscape
Nanosheet Transistor Scale-Up and Mass Production Patent Landscape 2026
  • Filing activity has flattened, not grown. the 2019 peak of 4 filings has not been exceeded, and the 2022 midpoint sits at the same level — this is a maturing claim set, not an accelerating one.
  • Nearly all activity concentrates in two IPC subclasses. H01L and H10D cover 21 and 16 of the 21 records respectively, while coating/deposition (C23C) and nanotech-application framing (B82Y) remain almost untouched.
  • One record carries outsized influence. US20210013111A1, on selective HKMG deposition for threshold-voltage tuning, is cited 77 times — more than double the next most-cited record in this corpus.
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21
Published Records
-100%
Filing Growth 2021→2024
US
Leading Jurisdiction
10
Active Filers Ranked

Filing growth compares 2021 (4 records) with 2024 (0) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field.

Published byPatsnap Research··7 min readSourced from Patsnap Eureka
Overview

From lab structure to production line

Gate-all-around nanosheet transistors are the structural successor to FinFET, wrapping the gate fully around one or more stacked channel sheets to hold electrostatic control as devices shrink. The patent activity tracked here is not about the base structure — it is about getting that structure through high-volume manufacturing: EUV integration, process sequencing, and yield ramp. This is the layer of intellectual property that determines who can actually build nanosheet devices at scale, not just who first described them.

Across 21 patent families filed between 2015 and the 2026 cut-off, activity concentrates almost entirely in core semiconductor-device classifications, with a small top tier of highly cited records anchoring the field. The pattern below shows a claim landscape that staked out its structural ground early and has since settled into narrower, process-specific filing.

Filing activity and technology composition, 2015–2026
  1. 1Tokyo Electron Limited8
  2. 2Taiwan Semiconductor Manufacturing Company, Ltd. (TSMC)7
  3. 3International Business Machines Corporation (IBM)3
  4. 4Applied Materials, Inc.2
  5. 5VISHWAS ACHARYA1
  6. 6IBM UNITED KINGDOM LTD INTELLECTUAL PROPERTY DEPARTMENT1
  7. 7HIMANSHU MAROTHYA1
  8. 8GAGAN1
  9. 9DEVENDER KUMAR SONI1
  10. 10AKANSHA AGGARWAL1
Source: Patsnap Eureka. Assignee ranking and totals. Derived from a Patsnap search on Nanosheet Transistor Scale-Up and Mass Production covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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Filing data

Filing trend and technology composition

Twenty-one patent families make up this corpus, filed against a backdrop of gate-all-around transistors moving from lab demonstration toward production lines. The trend and the IPC spread below show where the claim activity actually concentrated.

Filings by year

Filings rose to a peak of 4 in 2019, then flattened; the 2022 midpoint is also 4, so there is no sustained growth signal in this window. The most recent year is a partial count and will be revised upward as later filings publish.

Filings by year01234220172018420192020420214202220232024202512026Most recent year is partial — publication lag means later filings are not yet visible.

IPC subclass distribution

All 21 records sit under H01L (semiconductor devices), with 16 also tagged H10D (general semiconductor devices) — the two core structural classes. B82Y (nanotechnology applications) and C23C (coating and surface deposition) each appear in single digits, marking them as thin, largely open adjacent categories rather than contested ground.

IPC subclass distributionH01L · Semiconductor devices21100.0%H10D · Semiconductor devices (general)1676.2%B82Y · Nanotechnology applications314.3%C23C · Coating & surface deposition14.8%

Shares are the percentage of the 21 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.

Source: Patsnap Eureka. Filing trend and technology composition. Derived from a Patsnap search on Nanosheet Transistor Scale-Up and Mass Production covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.

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Key patents

The records other filers had to work around

Representative record
US20230170352A12023-06-01

Self-aligned hybrid substrate stacked gate-all-around transistors

INTERNATIONAL BUSINESS MACHINES CORPORATION

A semiconductor structure including vertically stacked nFETs and pFETs containing suspended semiconductor channel material nanosheets, and a method of forming such a structure. The structure achieves three-dimensional area scaling by vertically stacking nFETs and pFETs, with a first nanosheet transistor located above a second nanosheet transistor; the first nanosheet channel material has a first crystalline orientation and the second has a differing orientation.Filed by International Business Machines Corporation; published 2023-06-01.

US20230170352A1 — patent drawing 1US20230170352A1 — patent drawing 2
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Most-cited records in this corpus
#Publication no.Patent titleCitations
1US20210013111A1Method for threshold voltage tuning through selective deposition of high-k metal gate (HKMG) film stacks77
2US10950731B1Inner spacers for gate-all-around semiconductor devices30
3US20180138291A1Method of forming gate spacer for nanowire FET device22
4US20230170352A1Self-aligned hybrid substrate stacked gate-all-around transistors21
5US20220359208A1Process integration to reduce contact resistance in semiconductor device16
6US20210083091A1Inner spacers for gate-all-around semiconductor devices15
7US20190296128A1Method of forming gate spacer for nanowire FET device12
8WO2023099112A1Self-aligned hybrid substrate stacked gate-all-around transistors5
9US20210202735A1Inner Spacers for Gate-All-Around Semiconductor Devices4
10US12176348B2Self-aligned hybrid substrate stacked gate-all-around transistors3

Ranked by citation count within the searched corpus; older filings accumulate citations by nature of tenure, so treat this as a map of influence rather than current commercial weight.

Each row carries its publication number; clicking a row searches Eureka by that number.

Source: Patsnap Eureka. Citation counts and representative records. Derived from a Patsnap search on Nanosheet Transistor Scale-Up and Mass Production covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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Reading the data

What the filing pattern signals

The numbers point to a field where core structural claims were staked out early and citation weight has already settled on a small number of records. The open questions now sit in integration detail, not architecture.

Filing trajectory
Peak 2019 = 4
filings in peak year

Growth has stalled since the peak

Filings rose to 4 in 2019 and the 2022 midpoint held at 4, with no year in the window exceeding that peak. Combined with an 18-month publication lag, the true 2024-2026 filing level is likely higher than currently visible, but the multi-year plateau before that is real.

21 families tracked, 2015–2026 cut-off
Claim concentration
H01L: 21 of 21
records tagged H01L

Every record sits in the same core subclass

All 21 records carry the H01L semiconductor-device classification, and 16 also carry H10D. That leaves almost no filing activity outside the two dominant structural classes, which is where freedom-to-operate searches should start and where new entrants will meet the densest prior art.

IPC composition, this corpus
Citation weight
77 cites
top-cited record

Influence is concentrated in a handful of records

US20210013111A1's 77 citations dwarf the rest of the most-cited table, where the next closest record sits at 30. High citation counts skew toward older filings in any searched corpus, so read this as historical influence on later filers, not as a live indicator of current commercial priority.

Most-cited records table, this corpus
Collaboration pattern
10 pairs
co-assignee pairs

Collaboration is limited and mostly internal

Only 10 co-assignee pairs appear across 21 families, and the strongest pairs link a company to its own IP department or to individually named inventors rather than to external partners. That points to IP being developed in-house rather than through joint filings.

Co-assignee pairs, this corpus
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Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to nanosheet transistor scale-up and mass production, with the prior art for and against each one.

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Collaboration signal
AssigneeCo-assigneeShared families
International Business Machines Corporation (IBM)IBM UNITED KINGDOM LTD INTELLECTUAL PROPERTY DEPARTMENT1
VISHWAS ACHARYAHIMANSHU MAROTHYA1
VISHWAS ACHARYAGAGAN1
VISHWAS ACHARYADEVENDER KUMAR SONI1
VISHWAS ACHARYAAKANSHA AGGARWAL1
HIMANSHU MAROTHYAGAGAN1
HIMANSHU MAROTHYADEVENDER KUMAR SONI1
HIMANSHU MAROTHYAAKANSHA AGGARWAL1

Co-filing here is thin and largely internal — a company paired with its own IP department, or named inventors paired with each other — rather than a sign of cross-company joint development.

Source: Patsnap Eureka. Co-assignee relationships and derived observations. Derived from a Patsnap search on Nanosheet Transistor Scale-Up and Mass Production covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Who is filing

Assignees and where the activity sits now

The most-cited claim positions in this corpus belong to established semiconductor manufacturers, while the most recent filing year is dominated by individually named filers each contributing a single record — a pattern more consistent with exploratory or academic-adjacent filing than a coordinated commercial push.

Top-cited assignee
77 cites
citations on lead record

Selective-deposition threshold-voltage tuning

The corpus's most-cited record, on selective HKMG film-stack deposition for threshold-voltage tuning, anchors the top of the citation table by a wide margin over the next closest filing.

US20210013111A1
Representative filer
2023-06-01
publication date

3D vertical nFET/pFET stacking

International Business Machines Corporation's self-aligned hybrid-substrate stacking approach is the representative record for this landscape, targeting area scaling through vertical device stacking.

US20230170352A1
Latest-year filers
1 each
filings in latest year

Individually named recent entrants

The most recent filing year is spread across five individually named filers with one filing each, rather than concentrated in a single company — a sign of dispersed, exploratory activity rather than a scaled production push.

Recent-year momentum, this corpus
Collaboration depth
10 pairs
co-assignee pairs

Mostly internal pairings

Co-assignee activity is limited to 10 pairs across the corpus, with the strongest links internal to a single organisation rather than cross-company joint filings.

Co-assignee pairs, this corpus
🔍
Under-claimed sub-areas
Adjacent branches with thin filing coverage relative to the core structural classes — worth checking before assuming the space is occupied.
Channel-release coating chemistryNanoscale material-property claim framingStrain-engineered threshold tuning without HKMGSequential spacer-formation alternativesIndia-first process-integration filings
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Recent-year filing momentum
AssigneeRecent yearYoY
VISHWAS ACHARYA1
HIMANSHU MAROTHYA1
GAGAN1
DEVENDER KUMAR SONI1
AKANSHA AGGARWAL1
Tokyo Electron Limited0
Taiwan Semiconductor Manufacturing Company, Ltd. (TSMC)0-100%
International Business Machines Corporation (IBM)0
Source: Patsnap Eureka. Assignee-level momentum. Derived from a Patsnap search on Nanosheet Transistor Scale-Up and Mass Production covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
What's next

Where to take this analysis

The filing pattern here points to specific next steps depending on whether the goal is freedom-to-operate, white-space filing, or tracking a specific blocking claim.

Run a freedom-to-operate check on H01L/H10D claims

With 21 of 21 records tagged H01L and 16 also under H10D, any new filing in core nanosheet structure or gate-stack integration needs a direct check against this dense prior-art layer before drafting.

Start a freedom-to-operate search in Eureka

Scope a filing in the C23C coating white space

Deposition and surface-coating claims tied to nanosheet channel release sit at just one record in this corpus, leaving room for a specific, well-evidenced first claim.

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Track the top-cited blocking records

US20210013111A1 and US10950731B1 carry the heaviest citation weight in the corpus; monitoring their continuations and any litigation activity is a reasonable ongoing watch item.

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Source: Patsnap Eureka. Forward-looking reading of the same dataset. Derived from a Patsnap search on Nanosheet Transistor Scale-Up and Mass Production covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Questions practitioners ask

Frequently asked questions

Answers are grounded in the same dataset. Derived from a Patsnap search on Nanosheet Transistor Scale-Up and Mass Production covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.

Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.

Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.

Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company’s registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.

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