Nanosheet Transistor Scale-Up Patent Landscape 2026
- Filing activity has flattened, not grown. the 2019 peak of 4 filings has not been exceeded, and the 2022 midpoint sits at the same level — this is a maturing claim set, not an accelerating one.
- Nearly all activity concentrates in two IPC subclasses. H01L and H10D cover 21 and 16 of the 21 records respectively, while coating/deposition (C23C) and nanotech-application framing (B82Y) remain almost untouched.
- One record carries outsized influence. US20210013111A1, on selective HKMG deposition for threshold-voltage tuning, is cited 77 times — more than double the next most-cited record in this corpus.
Filing growth compares 2021 (4 records) with 2024 (0) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field.
From lab structure to production line
Gate-all-around nanosheet transistors are the structural successor to FinFET, wrapping the gate fully around one or more stacked channel sheets to hold electrostatic control as devices shrink. The patent activity tracked here is not about the base structure — it is about getting that structure through high-volume manufacturing: EUV integration, process sequencing, and yield ramp. This is the layer of intellectual property that determines who can actually build nanosheet devices at scale, not just who first described them.
Across 21 patent families filed between 2015 and the 2026 cut-off, activity concentrates almost entirely in core semiconductor-device classifications, with a small top tier of highly cited records anchoring the field. The pattern below shows a claim landscape that staked out its structural ground early and has since settled into narrower, process-specific filing.
Let an AI agent run this analysis on your own technology
Pick a task. Every answer cites the patents behind it.
Filing trend and technology composition
Twenty-one patent families make up this corpus, filed against a backdrop of gate-all-around transistors moving from lab demonstration toward production lines. The trend and the IPC spread below show where the claim activity actually concentrated.
Filings by year
Filings rose to a peak of 4 in 2019, then flattened; the 2022 midpoint is also 4, so there is no sustained growth signal in this window. The most recent year is a partial count and will be revised upward as later filings publish.
IPC subclass distribution
All 21 records sit under H01L (semiconductor devices), with 16 also tagged H10D (general semiconductor devices) — the two core structural classes. B82Y (nanotechnology applications) and C23C (coating and surface deposition) each appear in single digits, marking them as thin, largely open adjacent categories rather than contested ground.
Shares are the percentage of the 21 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.
Go deeper on Nanosheet Transistor Scale-Up and Mass Production with Eureka
This page is one run against one query. Ask Eureka your own question about nanosheet transistor scale-up and mass production and every answer comes back with the patent numbers behind it.
Try EurekaThe records other filers had to work around
Self-aligned hybrid substrate stacked gate-all-around transistors
A semiconductor structure including vertically stacked nFETs and pFETs containing suspended semiconductor channel material nanosheets, and a method of forming such a structure. The structure achieves three-dimensional area scaling by vertically stacking nFETs and pFETs, with a first nanosheet transistor located above a second nanosheet transistor; the first nanosheet channel material has a first crystalline orientation and the second has a differing orientation.Filed by International Business Machines Corporation; published 2023-06-01.


| # | Publication no. | Patent title | Citations |
|---|---|---|---|
| 1 | US20210013111A1 | Method for threshold voltage tuning through selective deposition of high-k metal gate (HKMG) film stacks | 77 |
| 2 | US10950731B1 | Inner spacers for gate-all-around semiconductor devices | 30 |
| 3 | US20180138291A1 | Method of forming gate spacer for nanowire FET device | 22 |
| 4 | US20230170352A1 | Self-aligned hybrid substrate stacked gate-all-around transistors | 21 |
| 5 | US20220359208A1 | Process integration to reduce contact resistance in semiconductor device | 16 |
| 6 | US20210083091A1 | Inner spacers for gate-all-around semiconductor devices | 15 |
| 7 | US20190296128A1 | Method of forming gate spacer for nanowire FET device | 12 |
| 8 | WO2023099112A1 | Self-aligned hybrid substrate stacked gate-all-around transistors | 5 |
| 9 | US20210202735A1 | Inner Spacers for Gate-All-Around Semiconductor Devices | 4 |
| 10 | US12176348B2 | Self-aligned hybrid substrate stacked gate-all-around transistors | 3 |
Ranked by citation count within the searched corpus; older filings accumulate citations by nature of tenure, so treat this as a map of influence rather than current commercial weight.
Each row carries its publication number; clicking a row searches Eureka by that number.
Put your own technology through the same analysis
Eureka on the web
When you want the answer in the next five minutes.
The agent works the prompt against patents and technical literature, citing every source.
Run your analysis now →MCP server & REST API
When it has to run inside your own pipeline.
Patent search, landscape analysis and assignee resolution as MCP tools. Drop them into any agent framework, or call REST directly.
Browse MCP servers →What the filing pattern signals
The numbers point to a field where core structural claims were staked out early and citation weight has already settled on a small number of records. The open questions now sit in integration detail, not architecture.
Growth has stalled since the peak
Filings rose to 4 in 2019 and the 2022 midpoint held at 4, with no year in the window exceeding that peak. Combined with an 18-month publication lag, the true 2024-2026 filing level is likely higher than currently visible, but the multi-year plateau before that is real.
Every record sits in the same core subclass
All 21 records carry the H01L semiconductor-device classification, and 16 also carry H10D. That leaves almost no filing activity outside the two dominant structural classes, which is where freedom-to-operate searches should start and where new entrants will meet the densest prior art.
Influence is concentrated in a handful of records
US20210013111A1's 77 citations dwarf the rest of the most-cited table, where the next closest record sits at 30. High citation counts skew toward older filings in any searched corpus, so read this as historical influence on later filers, not as a live indicator of current commercial priority.
Collaboration is limited and mostly internal
Only 10 co-assignee pairs appear across 21 families, and the strongest pairs link a company to its own IP department or to individually named inventors rather than to external partners. That points to IP being developed in-house rather than through joint filings.
Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to nanosheet transistor scale-up and mass production, with the prior art for and against each one.
| Assignee | Co-assignee | Shared families |
|---|---|---|
| International Business Machines Corporation (IBM) | IBM UNITED KINGDOM LTD INTELLECTUAL PROPERTY DEPARTMENT | 1 |
| VISHWAS ACHARYA | HIMANSHU MAROTHYA | 1 |
| VISHWAS ACHARYA | GAGAN | 1 |
| VISHWAS ACHARYA | DEVENDER KUMAR SONI | 1 |
| VISHWAS ACHARYA | AKANSHA AGGARWAL | 1 |
| HIMANSHU MAROTHYA | GAGAN | 1 |
| HIMANSHU MAROTHYA | DEVENDER KUMAR SONI | 1 |
| HIMANSHU MAROTHYA | AKANSHA AGGARWAL | 1 |
Co-filing here is thin and largely internal — a company paired with its own IP department, or named inventors paired with each other — rather than a sign of cross-company joint development.
Assignees and where the activity sits now
The most-cited claim positions in this corpus belong to established semiconductor manufacturers, while the most recent filing year is dominated by individually named filers each contributing a single record — a pattern more consistent with exploratory or academic-adjacent filing than a coordinated commercial push.
Selective-deposition threshold-voltage tuning
The corpus's most-cited record, on selective HKMG film-stack deposition for threshold-voltage tuning, anchors the top of the citation table by a wide margin over the next closest filing.
3D vertical nFET/pFET stacking
International Business Machines Corporation's self-aligned hybrid-substrate stacking approach is the representative record for this landscape, targeting area scaling through vertical device stacking.
Individually named recent entrants
The most recent filing year is spread across five individually named filers with one filing each, rather than concentrated in a single company — a sign of dispersed, exploratory activity rather than a scaled production push.
Mostly internal pairings
Co-assignee activity is limited to 10 pairs across the corpus, with the strongest links internal to a single organisation rather than cross-company joint filings.
| Assignee | Recent year | YoY |
|---|---|---|
| VISHWAS ACHARYA | 1 | — |
| HIMANSHU MAROTHYA | 1 | — |
| GAGAN | 1 | — |
| DEVENDER KUMAR SONI | 1 | — |
| AKANSHA AGGARWAL | 1 | — |
| Tokyo Electron Limited | 0 | — |
| Taiwan Semiconductor Manufacturing Company, Ltd. (TSMC) | 0 | -100% |
| International Business Machines Corporation (IBM) | 0 | — |
Where to take this analysis
The filing pattern here points to specific next steps depending on whether the goal is freedom-to-operate, white-space filing, or tracking a specific blocking claim.
Run a freedom-to-operate check on H01L/H10D claims
With 21 of 21 records tagged H01L and 16 also under H10D, any new filing in core nanosheet structure or gate-stack integration needs a direct check against this dense prior-art layer before drafting.
Start a freedom-to-operate search in EurekaScope a filing in the C23C coating white space
Deposition and surface-coating claims tied to nanosheet channel release sit at just one record in this corpus, leaving room for a specific, well-evidenced first claim.
Draft a white-space claim in EurekaTrack the top-cited blocking records
US20210013111A1 and US10950731B1 carry the heaviest citation weight in the corpus; monitoring their continuations and any litigation activity is a reasonable ongoing watch item.
Set up patent monitoring in EurekaFrequently asked questions
A nanosheet transistor is a type of gate-all-around (GAA) field-effect transistor where the channel is formed from one or more stacked, horizontally oriented sheets of semiconductor material, fully surrounded by the gate on all sides. This differs from FinFET, where the gate only wraps three sides of a vertical fin-shaped channel. The full gate wrap in nanosheet devices gives tighter electrostatic control at smaller dimensions, which is why it is the structure most manufacturers cite for continuing to scale logic transistors past the FinFET node.
In this dataset, filings peaked in 2019 at 4 and the 2022 midpoint is also 4, showing no clear upward trend through the tracked window. Part of this is a real signal — foundational structural claims were filed early and the field has moved toward narrower process-integration refinements rather than new base architectures. Part of it is a data artefact: publication typically lags filing by about 18 months, so the most recent one or two years in any patent trend will always look under-filled until later publications catch up.
The most-cited records in this corpus are held by large semiconductor manufacturers and IP holders including International Business Machines Corporation, alongside a set of individually named recent filers with single filings each. Co-assignee data shows only 10 collaborative pairs across the corpus, and the strongest pairs involve one core company plus its own IP department or individual named inventors, rather than cross-company joint filings. That pattern suggests most substantive process-integration IP here is developed and held internally rather than through joint ventures.
US20230170352A1, assigned to International Business Machines Corporation, covers a specific structure: vertically stacked nanosheet nFET and pFET transistors on a self-aligned hybrid substrate, where the two device tiers use channel materials with different crystalline orientations, aimed at 3D area scaling. It does not block nanosheet transistors generally, nor planar or single-tier gate-all-around structures. Anyone building 3D vertical nFET-over-pFET stacks using a self-aligned hybrid substrate with differing channel orientations should review this claim closely; other stacking or alignment methods sit outside its specific combination.
The coating and surface-deposition category (IPC C23C) has only one supporting record against 21 total in this corpus, making deposition chemistry tied specifically to channel release or spacer formation a thin, largely open area. Nanotechnology-application framing (B82Y) is similarly light at three records, suggesting claims that tie nanosheet structure explicitly to nanoscale material-property outcomes are under-argued relative to pure structural claims. Geographically, filings routed first through India-based receiving offices are represented by a single record, which is worth noting for filers weighing where to establish early priority.
Research Nanosheet Transistor Scale-Up and Mass Production in depth with Eureka
Go past this page: query the whole nanosheet transistor scale-up and mass production corpus yourself, in your own scope.
Every answer comes back with patent numbers you can open.
Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.
Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.
Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company’s registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.