Nanosheet Transistor Architecture Patent Landscape 2026
- Filings peaked in 2022 at 337 and have declined every year since, a claim-space pattern more consistent with consolidation around established structures than with an emerging race.
- The United States receives 1,526 filings more than six times the next-largest office, China at 202 — this is a US-prosecution-first field.
- Recent-year momentum is thin across the board even the most active filer in the latest year, Qualcomm Incorporated (Qualcomm), logged just 3 records with 0% YoY growth.
Filing growth compares 2021 (286 records) with 2024 (198) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field. Top-5 share is the combined record count of the five largest assignees divided by all 2,357 records in scope (CR5), not by the ranked leaders only.
What this landscape covers
Gate-all-around (GAA) and nanosheet field-effect transistors are the structure that succeeded FinFET at advanced logic nodes, wrapping the gate around a stack of thin semiconductor sheets to squeeze more channel control out of a shrinking footprint. This landscape tracks 2,357 published records filed against IPC classes covering junction gate structures, insulated-gate transistors and heterojunction devices, narrowed further to filings whose title or claims explicitly reference gate-all-around, nanosheet stacking, forksheet or CFET architectures.
The picture is a mature claim map, not an emerging one: filing activity already crested in 2022, and the most recent years are populated mostly by continuations, process refinements and manufacturing-side variants rather than new structural concepts.
Filing trend and technology composition
Two views of the same corpus: how filing volume has moved year over year, and how records distribute across the IPC subclasses that make up the gate-all-around and nanosheet space.
Filing trend, 2017–2026
Filings rose from 139 in 2017 to a peak of 337 in 2022, then declined through the most recent years. Because publication lags filing by roughly 18 months, the last one or two years on the chart will revise upward as pending applications publish — but the downturn from the 2022 peak predates that lag and is unlikely to fully reverse.
IPC subclass composition
H01L dominates at 2,351 of 2,357 records, confirming this is squarely a semiconductor-device filing space. Within it, H10D (semiconductor devices, general) carries 1,086 records and H10B (memory device manufacture) 220 — a signal that a meaningful share of nanosheet GAA activity is being driven by memory integration rather than logic alone, alongside a smaller but persistent B82Y nanotechnology-applications tail of 212.
Shares are the percentage of the 2,357 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.
Go deeper on Nanosheet Transistor Transistor Architecture with Eureka
This page is one run against one query. Ask Eureka your own question about nanosheet transistor transistor architecture and every answer comes back with the patent numbers behind it.
Try EurekaKey patents shaping the space
Stacked nanosheet gate-all-around device with air spacer and method of manufacturing
The present disclosure relates to a stacked nanosheet gate-all-around device with an air spacer and a method of manufacturing a stacked nanosheet gate-all-around device with an air spacer. The stacked nanosheet gate-all-around device with the air spacer includes: a substrate with a shallow trench isolation structure on a surface of the substrate; a nanosheet stacking portion provided above the substrate, where the nanosheet stacking portion includes a stack formed by a plurality of nanosheets, and the stack formed by the nanosheets constitutes a plurality of conductive channels; a gate-all-around surrounding the nanosheet stacking portion; and a source/drain region located on two opposite sides.Filed by the Institute of Microelectronics, Chinese Academy of Sciences; published 2025-04-24.


| # | Publication no. | Patent title | Citations |
|---|---|---|---|
| 1 | US9412828B2 | Aligned gate-all-around structure | 811 |
| 2 | US20040152272A1 | Fabrication method of so1 semiconductor devices | 316 |
| 3 | US20150372104A1 | Multi-channel gate-all-around fet | 232 |
| 4 | US20160141299A1 | Vertical and 3D memory devices and methods of manufacturing the same | 217 |
| 5 | US20170040321A1 | Gate-all-around nanowire device and method for manufacturing such a device | 206 |
| 6 | US6391782B1 | Process for forming multiple active lines and gate-all-around MOSFET | 201 |
| 7 | US9947804B1 | Methods of forming nanosheet transistor with dielectric isolation of source-drain regions and related structu… | 173 |
| 8 | US20170194430A1 | Method for fabricating nanowires for horizontal gate all around devices for semiconductor applications | 152 |
| 9 | US20200044087A1 | Sub-fin isolation schemes for gate-all-around transistor devices | 141 |
| 10 | US9786774B2 | Metal gate of gate-all-around transistor | 141 |
Citation counts accumulate over time and structurally favour older filings; read this table as a map of foundational influence, not of current filing activity.
Each row carries its publication number; clicking a row searches Eureka by that number.
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Browse MCP servers →What the numbers actually say
Four read-outs from the corpus that matter more for filing strategy than the headline record count.
The curve has already turned
2022 marks the high-water mark at 337 filings; every year since has been lower. Even allowing for an 18-month publication lag inflating recent-year undercounts, the shape is a plateau-then-decline, not a ramp.
This is a US-first prosecution field
The United States receiving office accounts for close to two-thirds of all filings tracked, well ahead of China, EPO, Taiwan, WIPO and South Korea combined in per-office terms. Freedom-to-operate work that skips US prosecution history is incomplete here.
Memory integration is a real sub-current
H10D and H10B together account for a substantial share of the corpus alongside core H01L filings, indicating that nanosheet GAA claim activity is not purely a logic-node story — memory device manufacturers are filing into the same structural space.
Joint filing is rare and university-anchored
Only 10 co-assignee pairs appear across the entire corpus, and the strongest pairings link a foundry or IDM to a university research fund rather than to another company — a sign that most core structural claims are being built and held solo.
Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to nanosheet transistor transistor architecture, with the prior art for and against each one.
| Assignee | Co-assignee | Shared families |
|---|---|---|
| Taiwan Semiconductor Manufacturing Company (TSMC) | National Taiwan University | 10 |
| International Business Machines Corporation (IBM) | IBM UNITED KINGDOM LTD INTELLECTUAL PROPERTY DEPARTMENT | 9 |
| Samsung Electronics Co., Ltd. (Korea) | SNU R&DB Foundation | 7 |
| International Business Machines Corporation (IBM) | IBM DEUTSCHLAND GMBH | 6 |
| Interuniversity Microelectronics Centre (IMEC) | Huawei Technologies Co., Ltd. | 5 |
| International Business Machines Corporation (IBM) | GlobalFoundries Inc. | 4 |
| International Business Machines Corporation (IBM) | STMICROELECTRONICS INC | 4 |
| GlobalFoundries Inc. | STMICROELECTRONICS INC | 4 |
The strongest co-filing pairs — TSMC with National Taiwan University, IBM with its own UK IP department, Samsung with SNU's R&D foundation — read as foundry-to-academia technology transfer, not competitor alliances.
The assignee landscape
Filing activity concentrates at the top of the ranking, with a long tail of single- or few-filing entrants behind the leading foundries, IDMs and equipment makers. Recent-year momentum, however, is muted across nearly every name in the leaderboard.
Qualcomm Incorporated (Qualcomm) — flat but still active
Qualcomm is the only assignee in the recent-momentum data still filing more than a single record in the latest year, though growth is flat rather than accelerating.
International Business Machines Corporation (IBM) (IBM) — one of the few co-filers
IBM appears both in the recent-momentum table and in the co-assignee pairs, filing jointly with its own UK intellectual-property department — a structural quirk of how IBM routes its patent administration rather than a partnership signal.
Taiwan Semiconductor Manufacturing Company (TSMC), Intel Corporation, Applied Materials, Inc., Samsung Electronics Co., Ltd. (Korea)
The four other names in the recent-momentum leaderboard — TSMC, Intel, Applied Materials and Samsung — show zero filings in the latest year in this dataset, consistent with the broader post-2022 decline rather than any single company's retreat.
| Assignee | Recent year | YoY |
|---|---|---|
| Qualcomm Incorporated | 3 | 0% |
| International Business Machines Corporation (IBM) | 1 | 0% |
| Taiwan Semiconductor Manufacturing Company (TSMC) | 0 | — |
| Intel Corporation | 0 | — |
| Applied Materials, Inc. | 0 | — |
| Samsung Electronics Co., Ltd. (Korea) | 0 | — |
| Institute of Microelectronics, Chinese Academy of Sciences | 0 | — |
| Tokyo Electron Limited | 0 | — |
Where to take this next
The landscape data points to specific follow-up work rather than a single conclusion.
Map claim scope on the most-cited five
Before filing into core GAA structure claims, run a claim-chart comparison against the five most-cited records in this corpus — several date back far enough that their broadest claims may have already narrowed through prosecution or expired.
Explore citation chains in EurekaCheck the memory-integration overlap
The H10B and H10D volumes suggest nanosheet structural claims are being filed defensively by memory manufacturers. Anyone building logic-only strategy should confirm freedom to operate against that overlap specifically.
Run a freedom-to-operate search in EurekaWatch for the publication-lag correction
The 2024-2026 filing counts will revise upward as pending applications publish. Re-pull the trend in six to twelve months before concluding the field has fully cooled.
Set a monitoring alert in EurekaCommon questions on nanosheet transistor patents
Gate-all-around (GAA) describes the broader structural principle of a gate wrapping fully around the channel on all sides, while nanosheet transistors are the specific implementation that stacks multiple thin horizontal channel sheets within a GAA gate. In patent terms, GAA claims tend to be broader structural claims, while nanosheet claims narrow to the stacking geometry, sheet count, sheet thickness or spacing. This corpus deliberately combines both search terms because most recent filings claim the nanosheet implementation of a GAA structure rather than GAA in isolation. Forksheet and CFET (complementary FET) architectures are further specific variants that show up as a smaller, more recent slice of the same combined space.
Influence in this dataset is measured by citation count within the searched corpus, and the most-cited records include foundational structural patents on gate-all-around fabrication and aligned GAA structures dating from earlier in the field's history. Citation counts favour older filings simply because they have had more time to be cited, so a highly-cited record is a signal of foundational influence, not necessarily of current commercial relevance. Cross-referencing the most-cited list against the assignee ranking gives a fuller picture of which companies built the base layer of prior art that later filers had to design around. For an up-to-date competitive view, the recent-year filing momentum matters more than historical citation counts.
The filing trend in this corpus shows a peak of 337 filings in 2022 followed by a decline through the most recent years, which most plausibly reflects the claim space around the core GAA/nanosheet structure becoming crowded — the foundational architecture patents were largely filed in the years leading up to and through the industry's transition from FinFET, and later filers increasingly had to file narrower variants or manufacturing refinements. It is also worth discounting the very latest one to two years, since patent publication lags filing by roughly 18 months and those counts will rise as pending applications publish. Even with that correction, the drop-off from the 2022 peak is large enough that it likely represents a genuine slowdown in new structural filings rather than a reporting artefact alone.
The United States is by far the largest receiving office in this corpus, with 1,526 filings compared to 202 in China, 138 at the EPO, 130 in Taiwan, 119 via the WIPO PCT route and 114 in South Korea. That concentration reflects where advanced-node semiconductor manufacturing and its associated R&D investment are heaviest, and it means most of the enforceable prior art and prosecution history a competitor needs to clear sits in US filings. Companies planning a global filing strategy in this space should still expect meaningful competitive activity in China and Taiwan given their foundry presence, even though the raw filing counts there are smaller.
The clearest under-claimed pockets in this corpus sit at the intersection of nanosheet structures with adjacent process techniques: forksheet dielectric wall isolation, CFET source/drain merge schemes, air-spacer inner spacer formation, and the crossover between nanosheet channel stacking and memory-cell integration reflected in the H10B subclass. These areas show up as smaller counts relative to the dense core H01L/H10D structural claims, which is a sign of open claim space rather than a judgement on technical difficulty. A first claim in these areas would typically need to specify a concrete process or geometric detail — such as a particular spacer material sequence or a specific merge geometry for CFET source/drain regions — to sit clear of the crowded core structural claims.
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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.
Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.
Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company’s registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.