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Nanosheet Transistor Architecture Patent Landscape 2026

Nanosheet Transistor Architecture Patent Landscape 2026
https://www.patsnap.com/resources/blog/rd-blog/nanosheet-transistor-transistor-architecture-patent-landscape/ · Patsnap · data cut-off 2026-07-31 · downloaded from the live page
Patent Landscape · Semiconductors & Microelectronics
Nanosheet Transistor Architecture Patent Landscape
  • Filings peaked in 2022 at 337 and have declined every year since, a claim-space pattern more consistent with consolidation around established structures than with an emerging race.
  • The United States receives 1,526 filings more than six times the next-largest office, China at 202 — this is a US-prosecution-first field.
  • Recent-year momentum is thin across the board even the most active filer in the latest year, Qualcomm Incorporated (Qualcomm), logged just 3 records with 0% YoY growth.
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2,357
Published Records
70%
Top-5 Share of All Records
-31%
Filing Growth 2021→2024
US
Leading Jurisdiction

Filing growth compares 2021 (286 records) with 2024 (198) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field. Top-5 share is the combined record count of the five largest assignees divided by all 2,357 records in scope (CR5), not by the ranked leaders only.

Published byPatsnap Research··8 min readSourced from Patsnap Eureka
Overview

What this landscape covers

Gate-all-around (GAA) and nanosheet field-effect transistors are the structure that succeeded FinFET at advanced logic nodes, wrapping the gate around a stack of thin semiconductor sheets to squeeze more channel control out of a shrinking footprint. This landscape tracks 2,357 published records filed against IPC classes covering junction gate structures, insulated-gate transistors and heterojunction devices, narrowed further to filings whose title or claims explicitly reference gate-all-around, nanosheet stacking, forksheet or CFET architectures.

The picture is a mature claim map, not an emerging one: filing activity already crested in 2022, and the most recent years are populated mostly by continuations, process refinements and manufacturing-side variants rather than new structural concepts.

Filing activity and technology composition, 2017–2026
  1. 1TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD671
  2. 2INTEL CORP439
  3. 3INTERNATIONAL BUSINESS MACHINE CORPORATION356
  4. 4APPLIED MATERIALS INC100
  5. 5QUALCOMM INC95
  6. 6SAMSUNG ELECTRONICS CO LTD94
  7. 7INST OF MICROELECTRONICS CHINESE ACAD OF SCI LTD60
  8. 8GLOBALFOUNDRIES US INC58
  9. 9TOKYO ELECTRON LTD36
  10. 10INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)32
Source: Patsnap Eureka. Assignee ranking and totals. Derived from a Patsnap search on Nanosheet Transistor Transistor Architecture covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
The data

Filing trend and technology composition

Two views of the same corpus: how filing volume has moved year over year, and how records distribute across the IPC subclasses that make up the gate-all-around and nanosheet space.

Filing trend, 2017–2026

Filings rose from 139 in 2017 to a peak of 337 in 2022, then declined through the most recent years. Because publication lags filing by roughly 18 months, the last one or two years on the chart will revise upward as pending applications publish — but the downturn from the 2022 peak predates that lag and is unlikely to fully reverse.

Filing trend, 2017–2026010020030040013920172018201920202021337202220232024202572026Most recent year is partial — publication lag means later filings are not yet visible.

IPC subclass composition

H01L dominates at 2,351 of 2,357 records, confirming this is squarely a semiconductor-device filing space. Within it, H10D (semiconductor devices, general) carries 1,086 records and H10B (memory device manufacture) 220 — a signal that a meaningful share of nanosheet GAA activity is being driven by memory integration rather than logic alone, alongside a smaller but persistent B82Y nanotechnology-applications tail of 212.

IPC subclass compositionH01L · Semiconductor devices2,35199.7%H10D · Semiconductor devices (general)1,08646.1%H10B · Memory device manufacture2209.3%B82Y · Nanotechnology applications2129.0%H10P1898.0%H10W823.5%B29C · Shaping of plastics371.6%H10K · Organic semiconductors (OLED e…371.6%Other1446.1%

Shares are the percentage of the 2,357 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.

Source: Patsnap Eureka. Filing trend and technology composition. Derived from a Patsnap search on Nanosheet Transistor Transistor Architecture covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.

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Prior art

Key patents shaping the space

Representative recent filing
US20250133773A12025-04-24

Stacked nanosheet gate-all-around device with air spacer and method of manufacturing

INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES

The present disclosure relates to a stacked nanosheet gate-all-around device with an air spacer and a method of manufacturing a stacked nanosheet gate-all-around device with an air spacer. The stacked nanosheet gate-all-around device with the air spacer includes: a substrate with a shallow trench isolation structure on a surface of the substrate; a nanosheet stacking portion provided above the substrate, where the nanosheet stacking portion includes a stack formed by a plurality of nanosheets, and the stack formed by the nanosheets constitutes a plurality of conductive channels; a gate-all-around surrounding the nanosheet stacking portion; and a source/drain region located on two opposite sides.Filed by the Institute of Microelectronics, Chinese Academy of Sciences; published 2025-04-24.

US20250133773A1 — patent drawing 1US20250133773A1 — patent drawing 2
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Most-cited records in this corpus
#Publication no.Patent titleCitations
1US9412828B2Aligned gate-all-around structure811
2US20040152272A1Fabrication method of so1 semiconductor devices316
3US20150372104A1Multi-channel gate-all-around fet232
4US20160141299A1Vertical and 3D memory devices and methods of manufacturing the same217
5US20170040321A1Gate-all-around nanowire device and method for manufacturing such a device206
6US6391782B1Process for forming multiple active lines and gate-all-around MOSFET201
7US9947804B1Methods of forming nanosheet transistor with dielectric isolation of source-drain regions and related structu…173
8US20170194430A1Method for fabricating nanowires for horizontal gate all around devices for semiconductor applications152
9US20200044087A1Sub-fin isolation schemes for gate-all-around transistor devices141
10US9786774B2Metal gate of gate-all-around transistor141

Citation counts accumulate over time and structurally favour older filings; read this table as a map of foundational influence, not of current filing activity.

Each row carries its publication number; clicking a row searches Eureka by that number.

Source: Patsnap Eureka. Citation counts and representative records. Derived from a Patsnap search on Nanosheet Transistor Transistor Architecture covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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Signal check

What the numbers actually say

Four read-outs from the corpus that matter more for filing strategy than the headline record count.

Filing trajectory
337 → 7
peak year 2022 vs. latest year

The curve has already turned

2022 marks the high-water mark at 337 filings; every year since has been lower. Even allowing for an 18-month publication lag inflating recent-year undercounts, the shape is a plateau-then-decline, not a ramp.

Filing trend, 2017–2026
Jurisdiction concentration
1,526 US filings
vs. 202 in China, 138 EPO

This is a US-first prosecution field

The United States receiving office accounts for close to two-thirds of all filings tracked, well ahead of China, EPO, Taiwan, WIPO and South Korea combined in per-office terms. Freedom-to-operate work that skips US prosecution history is incomplete here.

Receiving office breakdown
Technology mix
1,086 H10D records
vs. 220 H10B, 212 B82Y

Memory integration is a real sub-current

H10D and H10B together account for a substantial share of the corpus alongside core H01L filings, indicating that nanosheet GAA claim activity is not purely a logic-node story — memory device manufacturers are filing into the same structural space.

IPC composition
Collaboration density
10 co-assignee pairs
strongest pair: 10 shared families

Joint filing is rare and university-anchored

Only 10 co-assignee pairs appear across the entire corpus, and the strongest pairings link a foundry or IDM to a university research fund rather than to another company — a sign that most core structural claims are being built and held solo.

Co-assignee pairs
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Collaboration patterns
AssigneeCo-assigneeShared families
Taiwan Semiconductor Manufacturing Company (TSMC)National Taiwan University10
International Business Machines Corporation (IBM)IBM UNITED KINGDOM LTD INTELLECTUAL PROPERTY DEPARTMENT9
Samsung Electronics Co., Ltd. (Korea)SNU R&DB Foundation7
International Business Machines Corporation (IBM)IBM DEUTSCHLAND GMBH6
Interuniversity Microelectronics Centre (IMEC)Huawei Technologies Co., Ltd.5
International Business Machines Corporation (IBM)GlobalFoundries Inc.4
International Business Machines Corporation (IBM)STMICROELECTRONICS INC4
GlobalFoundries Inc.STMICROELECTRONICS INC4

The strongest co-filing pairs — TSMC with National Taiwan University, IBM with its own UK IP department, Samsung with SNU's R&D foundation — read as foundry-to-academia technology transfer, not competitor alliances.

Source: Patsnap Eureka. Co-assignee relationships and derived observations. Derived from a Patsnap search on Nanosheet Transistor Transistor Architecture covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Who is filing

The assignee landscape

Filing activity concentrates at the top of the ranking, with a long tail of single- or few-filing entrants behind the leading foundries, IDMs and equipment makers. Recent-year momentum, however, is muted across nearly every name in the leaderboard.

Momentum leader
3 filings
latest year, 0% YoY

Qualcomm Incorporated (Qualcomm) — flat but still active

Qualcomm is the only assignee in the recent-momentum data still filing more than a single record in the latest year, though growth is flat rather than accelerating.

Recent-year momentum
Steady filer
1 filing
latest year, 0% YoY

International Business Machines Corporation (IBM) (IBM) — one of the few co-filers

IBM appears both in the recent-momentum table and in the co-assignee pairs, filing jointly with its own UK intellectual-property department — a structural quirk of how IBM routes its patent administration rather than a partnership signal.

Co-assignee pairs
Gone quiet
0 filings
latest year, each

Taiwan Semiconductor Manufacturing Company (TSMC), Intel Corporation, Applied Materials, Inc., Samsung Electronics Co., Ltd. (Korea)

The four other names in the recent-momentum leaderboard — TSMC, Intel, Applied Materials and Samsung — show zero filings in the latest year in this dataset, consistent with the broader post-2022 decline rather than any single company's retreat.

Recent-year momentum
🔍
Under-claimed sub-areas
Branches adjacent to the core GAA/nanosheet claims with comparatively thin filing density in this corpus.
Forksheet dielectric wall isolationCFET source/drain merge schemesAir-spacer inner spacer formationNanosheet-to-memory-cell integration (H10B overlap)Sub-fin isolation for stacked channels
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Recent-year filing momentum
AssigneeRecent yearYoY
Qualcomm Incorporated30%
International Business Machines Corporation (IBM)10%
Taiwan Semiconductor Manufacturing Company (TSMC)0
Intel Corporation0
Applied Materials, Inc.0
Samsung Electronics Co., Ltd. (Korea)0
Institute of Microelectronics, Chinese Academy of Sciences0
Tokyo Electron Limited0
Source: Patsnap Eureka. Assignee-level momentum. Derived from a Patsnap search on Nanosheet Transistor Transistor Architecture covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Next steps

Where to take this next

The landscape data points to specific follow-up work rather than a single conclusion.

Map claim scope on the most-cited five

Before filing into core GAA structure claims, run a claim-chart comparison against the five most-cited records in this corpus — several date back far enough that their broadest claims may have already narrowed through prosecution or expired.

Explore citation chains in Eureka

Check the memory-integration overlap

The H10B and H10D volumes suggest nanosheet structural claims are being filed defensively by memory manufacturers. Anyone building logic-only strategy should confirm freedom to operate against that overlap specifically.

Run a freedom-to-operate search in Eureka

Watch for the publication-lag correction

The 2024-2026 filing counts will revise upward as pending applications publish. Re-pull the trend in six to twelve months before concluding the field has fully cooled.

Set a monitoring alert in Eureka
Source: Patsnap Eureka. Forward-looking reading of the same dataset. Derived from a Patsnap search on Nanosheet Transistor Transistor Architecture covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
FAQ

Common questions on nanosheet transistor patents

Answers are grounded in the same dataset. Derived from a Patsnap search on Nanosheet Transistor Transistor Architecture covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.

Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.

Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.

Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company’s registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.

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