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Ion Beam Deposition Patents: Leaders & Filing Trends 2026

Ion Beam Deposition Patents: Leaders & Filing Trends 2026
https://www.patsnap.com/resources/blog/rd-blog/physical-vapor-deposition-ion-beam-deposition-patent-landscape-patent-landscape/ · Patsnap · data cut-off 2026-08-31 · downloaded from the live page
Patent Landscape · Surface Engineering & Coatings
Ion beam deposition patents: mapping the physical vapor deposition claim space

A data-backed look at ion beam deposition patents within physical vapor deposition: who leads filings, how the technology composition breaks down across IPC classes, and where filing activity is heading through 2026.

2,052
Published Records
11%
Top-5 Share of All Records
-39%
Filing Growth 2021→2024
US
Leading Jurisdiction

Filing growth = 2021 (31 records) → 2024 (19); 2024 is the last year we treat as complete. Top-5 share = the 5 largest assignees ÷ all 2,052 records in scope (CR5), not the ranked leaders only.

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Published byPatsnap Research··7 min readSourced from Patsnap Eureka
Overview

What the ion beam deposition patent record actually shows

Ion beam deposition is a variant of physical vapor deposition where a directed ion beam sputters target material onto a substrate, giving finer control over film thickness, density and stoichiometry than conventional sputtering. The 2,052 records in scope span coating processes, semiconductor thin-film transistors, magnetic sensor fabrication and optical component manufacture, reflecting how the same deposition mechanism gets claimed across very different end markets. The claim language ranges from broad process steps to narrow chamber-and-target configurations, which is why the assignee and classification patterns below matter more than any single patent number.

Filing concentrated most heavily around 2019, and the three-year window from 2021 to 2024 shows a real pullback in volume rather than a plateau. Because publication lags filing by roughly 18 months, the most recent years in any trend chart are undercounts by construction — read the 2024 figure as the last complete data point, not the 2025 or 2026 figures.

Filing activity and technology composition, 2015–2026
  1. 1GUARDIAN IND CORP59
  2. 2VEECO INSTRUMENTS INC52
  3. 3INTERNATIONAL BUSINESS MACHINE CORPORATION43
  4. 4GENERAL ELECTRIC CO37
  5. 5SUMITOMO ELECTRIC INDUSTRIES LTD35
  6. 6HITACHI LTD34
  7. 7GUARDIAN GLASS LLC30
  8. 8PANASONIC HOLDINGS CORP28
  9. 9APPLIED MATERIALS INC28
  10. 10SUPERPOWER INC27
Source: Patsnap Eureka. Assignee ranking and totals. Derived from a Patsnap search on Physical Vapor Deposition: Ion Beam Deposition Patent Landscape covering 2015–2026, data cut-off 2026-08-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
The Numbers

Filing trends and technology composition

Two views of the same 2,052-record dataset: filing volume over time, and how records distribute across IPC subclasses. Because a single record can carry several classifications, the composition shares add up to more than 100%.

A peak in 2019, then a documented pullback

Filings ran from 22 records in 2017 up to a peak of 34 in 2019, then declined to 19 by 2024 — a 39% drop from the 2021 level of 31. Treat 2025 and 2026 as still filling in rather than as evidence of a further slide.

A peak in 2019, then a documented pullback010203040222017201834201920202021202220232024202512026Most recent year is partial — publication lag means later filings are not yet visible.

Publication lags filing by roughly 18 months, so 2025 onwards are still filling in. Growth rates on this page therefore end at 2024; running them to the last bar would understate the field.

Coating claims dominate, but semiconductor overlap is substantial

C23C coating and surface deposition covers 94.9% of the 2,052 records, unsurprising given the search scope. The more telling overlaps are H01L semiconductor devices at 18.0% and H01J electron and discharge tubes at 14.5%, both pointing to ion beam deposition's role inside device fabrication rather than purely decorative or protective coating work.

Coating claims dominate, but semiconductor overlap is substantialC23C · Coating & surface deposition1,94794.9%H01L · Semiconductor devices37018.0%H01J · Electron & discharge tubes29714.5%B32B · Layered products & laminates1748.5%C03C · Glass & enamel compositions1728.4%B05D · Coating processes1668.1%H10P1627.9%G02B · Optical elements & systems1447.0%Other2,02098.4%

Shares are the percentage of the 2,052 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.

Source: Patsnap Eureka. Filing trend and technology composition. Derived from a Patsnap search on Physical Vapor Deposition: Ion Beam Deposition Patent Landscape covering 2015–2026, data cut-off 2026-08-31. Counts reflect published records only and shift as new filings publish.

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Key Patents

A representative claim and the most-cited prior art

Representative Filing
US20080210544A12008-09-04

Method for manufacturing a magnetic tunnel junction sensor using ion beam deposition

HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V.

The patent describes forming a MgOx barrier layer in a magnetic tunnel junction sensor by placing a wafer in an ion beam deposition chamber with a magnesium target, directing an ion beam at the target to sputter Mg atoms onto the wafer, and admitting oxygen into the chamber to control barrier composition and uniformity.Filed by Hitachi Global Storage Technologies Netherlands B.V., published 2008-09-04 — illustrates how ion beam deposition claims get anchored to a specific chamber-target-gas configuration rather than the deposition mechanism alone.

US20080210544A1 — patent drawing 1US20080210544A1 — patent drawing 2
View full filing
Most-cited records in the dataset
#Publication no.Patent titleCitations
1US20040127038A1Transparent oxide semiconductor thin film transistors4,349
2US7501293B2Semiconductor device in which zinc oxide is used as a semiconductor material and method for manufacturing the…4,239
3US20060035452A1Transparent oxide semiconductor thin film transistor4,222
4US6472122B1Method of applying insulation for coating implantable components and other microminiature devices553
5US20020086501A1Diamond coatings on reactor wall and method of manufacturing thereof537
6US4622918AModule for high vacuum processing408
7US5508368AIon beam process for deposition of highly abrasion-resistant coatings387
8US20170032942A1Surface coating for chamber components used in plasma systems375
9US6322588B1Medical devices with metal/polymer composites372
10JP1990217469AFormation of thin film and forming device343

Citation counts favour older filings that have had more time to accumulate citations inside the searched corpus — read them as a signal of influence, not of current commercial relevance.

Each row carries its publication number; clicking a row searches Eureka by that number.

Source: Patsnap Eureka. Citation counts and representative records. Derived from a Patsnap search on Physical Vapor Deposition: Ion Beam Deposition Patent Landscape covering 2015–2026, data cut-off 2026-08-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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Insights

Where the field concentrates and where it doesn't

The ranking, trend and classification data point to a field with a modest leadership cluster, a cooling filing rate, and technology overlap that spreads well beyond coatings alone.

Concentration
11.0%
of 2,052 records held by top 5 assignees

Leadership is present but not dominant

The five leading assignees together account for 226 of the 2,052 records in scope, and the top ten add up to 373, or 18.2%. That leaves the bulk of filings distributed across a long tail of the ranked leaders, each holding a small slice.

Ranking covers 100 companies, not a top-50 or top-100 cut.
Filing Trend
-39%
records, 2021 to 2024

Volume has pulled back from its 2019 peak

Filings peaked at 34 records in 2019, then fell from 31 in 2021 to 19 in 2024. That is a real three-year decline, not a rounding artefact, though 2025-2026 figures are still incomplete due to publication lag.

2024 is the most recent year treated as complete.
Technology Mix
18.0%
of records also classified under H01L

Coating and device claims overlap heavily

Almost 95% of records sit in C23C, the core coating classification, but nearly a fifth also carry H01L semiconductor device classification and 14.5% carry H01J electron-tube classification — evidence that ion beam deposition claims frequently target device fabrication steps, not just surface treatment.

Class shares sum above 100% because records carry multiple IPC codes.
Filing Geography
798
records at the US receiving office

US filings lead, but PCT and EPO volume is substantial

The United States receives the largest single share of filings at 798 records, with Europe (EPO) at 316 and the WIPO PCT route at 207, followed by South Korea, Japan and the United Kingdom. That spread suggests applicants are pursuing multi-jurisdiction protection rather than filing narrowly.

Receiving office counts are not mutually exclusive with family counts.
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Source: Patsnap Eureka. Co-assignee relationships and derived observations. Derived from a Patsnap search on Physical Vapor Deposition: Ion Beam Deposition Patent Landscape covering 2015–2026, data cut-off 2026-08-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
What's Next

Turning this landscape into a filing decision

The data shows concentration, trend direction and classification overlap. Turning that into a defensible filing or freedom-to-operate position takes a closer read of specific claims.

Check freedom-to-operate before drafting claims

Chamber configuration, target material and gas-admission sequencing are the recurring claim elements in this dataset. Run a claim-level check against the ranked leaders' active families before committing to a similar architecture.

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Track the leaders' recent filings, not just their totals

Concentration at the top does not tell you what a given leader is filing on now. Layer recent-year filings from the top assignees against the classification mix to see which branches they are still actively claiming.

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Test white space in device-facing branches

The overlap between coating and semiconductor classifications suggests device-integration claims may be less crowded than pure coating-process claims. Validate that hypothesis against actual claim scope before filing.

Run a white space search in Eureka →
Source: Patsnap Eureka. Forward-looking reading of the same dataset. Derived from a Patsnap search on Physical Vapor Deposition: Ion Beam Deposition Patent Landscape covering 2015–2026, data cut-off 2026-08-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
FAQ

Common questions about the ion beam deposition patent landscape

Answers are grounded in the same dataset. Derived from a Patsnap search on Physical Vapor Deposition: Ion Beam Deposition Patent Landscape covering 2015–2026, data cut-off 2026-08-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.

Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.

Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.

Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company’s registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.

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