Ion Beam Deposition Patents: Leaders & Filing Trends 2026
A data-backed look at ion beam deposition patents within physical vapor deposition: who leads filings, how the technology composition breaks down across IPC classes, and where filing activity is heading through 2026.
Filing growth = 2021 (31 records) → 2024 (19); 2024 is the last year we treat as complete. Top-5 share = the 5 largest assignees ÷ all 2,052 records in scope (CR5), not the ranked leaders only.
What the ion beam deposition patent record actually shows
Ion beam deposition is a variant of physical vapor deposition where a directed ion beam sputters target material onto a substrate, giving finer control over film thickness, density and stoichiometry than conventional sputtering. The 2,052 records in scope span coating processes, semiconductor thin-film transistors, magnetic sensor fabrication and optical component manufacture, reflecting how the same deposition mechanism gets claimed across very different end markets. The claim language ranges from broad process steps to narrow chamber-and-target configurations, which is why the assignee and classification patterns below matter more than any single patent number.
Filing concentrated most heavily around 2019, and the three-year window from 2021 to 2024 shows a real pullback in volume rather than a plateau. Because publication lags filing by roughly 18 months, the most recent years in any trend chart are undercounts by construction — read the 2024 figure as the last complete data point, not the 2025 or 2026 figures.
Filing trends and technology composition
Two views of the same 2,052-record dataset: filing volume over time, and how records distribute across IPC subclasses. Because a single record can carry several classifications, the composition shares add up to more than 100%.
A peak in 2019, then a documented pullback
Filings ran from 22 records in 2017 up to a peak of 34 in 2019, then declined to 19 by 2024 — a 39% drop from the 2021 level of 31. Treat 2025 and 2026 as still filling in rather than as evidence of a further slide.
Publication lags filing by roughly 18 months, so 2025 onwards are still filling in. Growth rates on this page therefore end at 2024; running them to the last bar would understate the field.
Coating claims dominate, but semiconductor overlap is substantial
C23C coating and surface deposition covers 94.9% of the 2,052 records, unsurprising given the search scope. The more telling overlaps are H01L semiconductor devices at 18.0% and H01J electron and discharge tubes at 14.5%, both pointing to ion beam deposition's role inside device fabrication rather than purely decorative or protective coating work.
Shares are the percentage of the 2,052 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.
Go deeper on Physical Vapor Deposition: Ion Beam Deposition Patent Landscape with Eureka
This page is one run against one query. Ask Eureka your own question about physical vapor deposition: ion beam deposition patent landscape and every answer comes back with the patent numbers behind it.
Try EurekaA representative claim and the most-cited prior art
Method for manufacturing a magnetic tunnel junction sensor using ion beam deposition
The patent describes forming a MgOx barrier layer in a magnetic tunnel junction sensor by placing a wafer in an ion beam deposition chamber with a magnesium target, directing an ion beam at the target to sputter Mg atoms onto the wafer, and admitting oxygen into the chamber to control barrier composition and uniformity.Filed by Hitachi Global Storage Technologies Netherlands B.V., published 2008-09-04 — illustrates how ion beam deposition claims get anchored to a specific chamber-target-gas configuration rather than the deposition mechanism alone.


| # | Publication no. | Patent title | Citations |
|---|---|---|---|
| 1 | US20040127038A1 | Transparent oxide semiconductor thin film transistors | 4,349 |
| 2 | US7501293B2 | Semiconductor device in which zinc oxide is used as a semiconductor material and method for manufacturing the… | 4,239 |
| 3 | US20060035452A1 | Transparent oxide semiconductor thin film transistor | 4,222 |
| 4 | US6472122B1 | Method of applying insulation for coating implantable components and other microminiature devices | 553 |
| 5 | US20020086501A1 | Diamond coatings on reactor wall and method of manufacturing thereof | 537 |
| 6 | US4622918A | Module for high vacuum processing | 408 |
| 7 | US5508368A | Ion beam process for deposition of highly abrasion-resistant coatings | 387 |
| 8 | US20170032942A1 | Surface coating for chamber components used in plasma systems | 375 |
| 9 | US6322588B1 | Medical devices with metal/polymer composites | 372 |
| 10 | JP1990217469A | Formation of thin film and forming device | 343 |
Citation counts favour older filings that have had more time to accumulate citations inside the searched corpus — read them as a signal of influence, not of current commercial relevance.
Each row carries its publication number; clicking a row searches Eureka by that number.
Put your own technology through the same analysis
Eureka on the web
When you want the answer in the next five minutes.
The agent works the prompt against patents and technical literature, citing every source.
Run your analysis now →MCP server & REST API
When it has to run inside your own pipeline.
Patent search, landscape analysis and assignee resolution as MCP tools. Drop them into any agent framework, or call REST directly.
Browse MCP servers →Where the field concentrates and where it doesn't
The ranking, trend and classification data point to a field with a modest leadership cluster, a cooling filing rate, and technology overlap that spreads well beyond coatings alone.
Leadership is present but not dominant
The five leading assignees together account for 226 of the 2,052 records in scope, and the top ten add up to 373, or 18.2%. That leaves the bulk of filings distributed across a long tail of the ranked leaders, each holding a small slice.
Volume has pulled back from its 2019 peak
Filings peaked at 34 records in 2019, then fell from 31 in 2021 to 19 in 2024. That is a real three-year decline, not a rounding artefact, though 2025-2026 figures are still incomplete due to publication lag.
Coating and device claims overlap heavily
Almost 95% of records sit in C23C, the core coating classification, but nearly a fifth also carry H01L semiconductor device classification and 14.5% carry H01J electron-tube classification — evidence that ion beam deposition claims frequently target device fabrication steps, not just surface treatment.
US filings lead, but PCT and EPO volume is substantial
The United States receives the largest single share of filings at 798 records, with Europe (EPO) at 316 and the WIPO PCT route at 207, followed by South Korea, Japan and the United Kingdom. That spread suggests applicants are pursuing multi-jurisdiction protection rather than filing narrowly.
Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to physical vapor deposition: ion beam deposition patent landscape, with the prior art for and against each one.
Turning this landscape into a filing decision
The data shows concentration, trend direction and classification overlap. Turning that into a defensible filing or freedom-to-operate position takes a closer read of specific claims.
Check freedom-to-operate before drafting claims
Chamber configuration, target material and gas-admission sequencing are the recurring claim elements in this dataset. Run a claim-level check against the ranked leaders' active families before committing to a similar architecture.
Explore claim charts in Eureka →Track the leaders' recent filings, not just their totals
Concentration at the top does not tell you what a given leader is filing on now. Layer recent-year filings from the top assignees against the classification mix to see which branches they are still actively claiming.
Set up assignee monitoring in Eureka →Test white space in device-facing branches
The overlap between coating and semiconductor classifications suggests device-integration claims may be less crowded than pure coating-process claims. Validate that hypothesis against actual claim scope before filing.
Run a white space search in Eureka →Common questions about the ion beam deposition patent landscape
Ion beam deposition uses a directed, energetic ion beam to sputter atoms from a target material onto a substrate inside a vacuum chamber, rather than relying on a plasma discharge to generate the sputtering ions as in conventional magnetron sputtering. This gives tighter control over deposition rate, film density and stoichiometry, which is why it shows up disproportionately in precision applications such as magnetic sensor barrier layers and optical coatings. In patent terms, claims in this space often anchor to the specific chamber, target and gas-admission configuration rather than the deposition mechanism alone, because the mechanism itself is well established prior art.
The dataset's assignee ranking covers 100 companies, with the five leading assignees together holding 226 of the 2,052 records in scope — 11.0% of the field. That is meaningful concentration but far from dominance: the top ten only add up to 18.2% of records, leaving most of the filing activity spread across a long tail of smaller filers. Anyone assessing competitive position should look at the full ranked list rather than assume a single company controls the space.
Filing volume peaked at 34 records in 2019 and has since declined, falling from 31 records in 2021 to 19 in 2024 — a 39% drop over that three-year span. That is a documented pullback, not a plateau. However, publication typically lags actual filing by around 18 months, so the 2025 and 2026 figures in any chart are still incomplete and should not be read as a continuation of the decline.
US20080210544A1, filed by Hitachi Global Storage Technologies Netherlands B.V., claims a method for forming a magnesium oxide barrier layer in a magnetic tunnel junction sensor using ion beam deposition, specifying a chamber with a magnesium target and controlled oxygen admission. It is a representative example of how claims in this field get anchored to a particular chamber-target-gas configuration rather than the general ion beam deposition mechanism. A new entrant working with a different target material, gas sequence or chamber geometry would likely sit outside its specific claim scope, but any design using the same MgOx-via-oxygen-admission approach should be checked against it directly.
Coating-process classifications dominate the dataset, with 94.9% of the 2,052 records carrying a C23C classification. The comparatively lower overlap figures for optical elements (G02B at 7.0%) and coating processes generally (B05D at 8.1%) suggest these adjacent branches carry less claim density relative to core coating and semiconductor-device work. That said, lower density in a classification does not by itself confirm open white space — it needs to be checked against actual claim scope in that branch before drawing conclusions.
Research Physical Vapor Deposition: Ion Beam Deposition Patent Landscape in depth with Eureka
Go past this page: query the whole physical vapor deposition: ion beam deposition patent landscape corpus yourself, in your own scope.
Every answer comes back with patent numbers you can open.
Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.
Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.
Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company’s registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.