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Run your analysis now →https://www.patsnap.com/resources/blog/rd-blog/resonant-mems-accelerometers-patent-landscape/ · Patsnap · data cut-off 2026-07-31 · downloaded from the live page
Patent Landscape · Sensors & ActuatorsResonant MEMS Accelerometers: mapping the patents behind frequency-shift sensing
- A concentrated technology core. 97.0% of the 33 records in scope sit in IPC class G01P (velocity & acceleration), with only 15.2% touching B81B microstructural devices and 6.1% overlapping G01C navigation/gyroscope classes.
- Filing has cooled from its 2022 peak. Filings ran from 4 in 2021 to 0 in 2024, a -100% swing over that span; publication lag means 2025-2026 figures are still filling in and should not be read as a trend yet.
- No single assignee dominates. The ranked leader holds 11 records against a field of 10 ranked companies whose fifth-place holder has only 4 and whose tenth has just 1 — a sharp drop-off rather than broad concentration.
33
Published Records
-100%
Filing Growth 2021→2024
US
Leading Jurisdiction
10
Active Filers Ranked
Filing growth compares 2021 (4 records) with 2024 (0) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field.
Published byPatsnap Research··7 min readSourced from Patsnap Eureka
Field Overview
What the resonant MEMS accelerometer patent record covers
Resonant MEMS accelerometers convert acceleration into a shift in a resonant structure's natural frequency, rather than a change in capacitance or piezoresistance. This search set pulls 33 published records filed or published between 2015 and mid-2026 that combine resonant-sensing claim language with the practical concerns that separate a working device from a laboratory demonstration: frequency shift sensitivity, cross-axis sensitivity, proof mass design, temperature stability, dynamic range and noise floor.
The receiving-office pattern points to the United States as the primary filing venue, with smaller volumes at the EPO, the UK, China, Austria and via the PCT route. That distribution is consistent with a field still anchored in early-stage research institutions and specialist sensor firms rather than mass-market consumer electronics filers.
Filing activity and technology composition, 2017-2026
Source: Patsnap Eureka. Assignee ranking and totals. Derived from a Patsnap search on Resonant MEMS Accelerometers covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
The Data
Filing trend and technology composition
Two views of the same 33-record set: how filing activity has moved year over year, and which IPC subclasses the claims fall into.
Filing trend, 2017-2026
Filings rose from 2 in 2017 to a peak of 5 in 2022, then fell to 0 by 2024 — a -100% change over the 2021-2024 window. Because publication typically lags filing by roughly 18 months, the 2025 and 2026 figures are still incomplete and should not yet be read as a continued decline.
IPC subclass composition
G01P (velocity & acceleration) covers 97.0% of the 33 records, confirming this is a tightly-scoped accelerometer search rather than a broad inertial-sensing one. B81B (MEMS microstructures) appears in 15.2% of records and G01C (navigation/gyroscopes) in 6.1%, reflecting the multi-axis IMU designs that combine resonant accelerometry with gyroscopic sensing on a single die.
Shares are the percentage of the 33 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.
Source: Patsnap Eureka. Filing trend and technology composition. Derived from a Patsnap search on Resonant MEMS Accelerometers covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.
Go deeper on Resonant MEMS Accelerometers with Eureka
This page is one run against one query. Ask Eureka your own question about resonant mems accelerometers and every answer comes back with the patent numbers behind it.
Try EurekaKey Patents
The most-cited prior art and a representative recent filing
Representative Filing
US9274136B2 — Multi-axis chip-scale MEMS IMU based on frequency modulation
REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
A multi-axis MEMS inertial measurement unit fabricated as a vacuum-sealed single package, combining an FM vibratory gyroscope and an FM resonant accelerometer on one silicon chip. A signal processor decodes the FM output signals to produce simultaneous, decoupled measurements of acceleration, rotation rate and temperature, along with self-calibration of bias and scale-factor errors.Filed by the Regents of the University of California, published 2016-03-01.
Most-cited records in this set
| # | Publication no. | Patent title | Citations |
|---|---|---|---|
| 1 | US4851080A | Resonant accelerometer | 163 |
| 2 | US4805456A | Resonant accelerometer | 136 |
| 3 | US5969249A | Resonant accelerometer with flexural lever leverage system | 131 |
| 4 | US20140208823A1 | Multi-Axis Chip-Scale MEMS Inertial Measurement Unit (IMU) Based on Frequency Modulation | 86 |
| 5 | US20160349283A1 | Apparatus and methods for photonic integrated resonant accelerometer | 59 |
| 6 | US20120132003A1 | MEMS biaxial resonant accelerometer | 50 |
| 7 | US20110056294A1 | MEMS resonant accelerometer having improved electrical characteristics | 35 |
| 8 | US8671756B2 | MEMS biaxial resonant accelerometer | 29 |
| 9 | US20180128850A1 | Integrated resonant accelerometer using optical strain sensor | 27 |
| 10 | US9927458B2 | Apparatus and methods for photonic integrated resonant accelerometer | 22 |
Citation counts inside a searched corpus favour older documents; treat them as a signal of foundational influence, not of current commercial weight.
Each row carries its publication number; clicking a row searches Eureka by that number.
Source: Patsnap Eureka. Citation counts and representative records. Derived from a Patsnap search on Resonant MEMS Accelerometers covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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What the numbers mean for a filing decision
Three findings that shape where a new resonant-accelerometer filing would land relative to existing claims.
Concentration
97.0% in G01P
of 33 records
The claim space is narrowly scoped, not broad
Almost every record in this set carries a G01P classification, meaning the search has captured a genuinely focused accelerometer literature rather than a diffuse inertial-sensing one. New filings competing on frequency-shift sensitivity or proof-mass geometry will run into this dense core directly rather than finding room at the classification edges.
Source: IPC subclass distribution, 33 records
Momentum
4 → 0
2021 to 2024 filings
Recorded activity has cooled from its 2022 peak
Filings peaked at 5 in 2022 before dropping to 0 by 2024, a -100% change across that window. Given the roughly 18-month gap between filing and publication, the most recent one to two years of this trend are still incomplete, so this should be read as a cooling from peak rather than a closed field.
Source: filing trend, 2017-2026
Ownership
11 vs 1
leader vs tenth-ranked
A steep drop-off, not a single dominant holder
The ranked leader holds 11 records while the tenth-ranked assignee holds just 1, with the fifth position at 4. That gradient suggests one well-established filer alongside a long tail of academic and single-inventor entrants, rather than a market locked up by one company.
Source: assignee ranking, 10 companies
Eureka AI Agent
Looking for what nobody has claimed yet?
Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to resonant mems accelerometers, with the prior art for and against each one.
Source: Patsnap Eureka. Co-assignee relationships and derived observations. Derived from a Patsnap search on Resonant MEMS Accelerometers covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Players
Who holds the resonant-sensing claims
The ranking below covers the 10 companies and institutions the data endpoint returns for this search — not a top-50 or top-100 cut. It mixes an established semiconductor manufacturer, several universities and individual inventors.
Leader
11 records
of 33 in scope
A single filer sits well ahead of the field
The top-ranked assignee holds 11 of the 33 records in this set, with a documented co-filing relationship linking a semiconductor manufacturer and a university partner on 6 shared records — the strongest co-assignee pair identified.
Source: assignee ranking and co-assignee pairs
Long tail
4 → 1
fifth to tenth place
Academic and individual filers fill out the ranking
Positions five through ten in the ranking span from 4 records down to a single record, populated largely by universities and named individual inventors rather than corporations. That pattern is typical of a field still close to its research origins.
Source: assignee ranking, 10 companies
Collaboration
2 pairs
co-assignee relationships
Co-filing is rare and concentrated
Only two co-assignee pairs appear in this set. The strongest links a semiconductor firm with a university research partner across 6 records; the second pairs two named individual inventors across 2 records, consistent with a small specialist research team.
Source: co-assignee pairs
Recent-year filing momentum by assignee
| Assignee | Recent year | YoY |
|---|---|---|
| STMicroelectronics S.r.l. (Italy) | 0 | — |
| Cambridge Enterprise Limited | 0 | — |
| Politecnico di Milano | 0 | — |
| The Regents of the University of California | 0 | — |
| Massachusetts Institute of Technology | 0 | — |
| JUODAWLKIS PAUL WILLIAM | 0 | — |
| BRAMHAVAR SURAJ DEEPAK | 0 | — |
| HRL Laboratories, LLC | 0 | — |
Source: Patsnap Eureka. Assignee-level momentum. Derived from a Patsnap search on Resonant MEMS Accelerometers covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
What's Next
Where to take this analysis
The dataset points to specific next steps depending on whether the goal is freedom-to-operate, competitive tracking, or identifying a filing gap.
Check freedom-to-operate against the cited core
The most-cited records in this set, including the foundational resonant accelerometer patents, define the prior art any new frequency-shift or proof-mass claim will be measured against.
Explore prior art in EurekaTrack the leading assignee's active filings
With one assignee holding 11 of the 33 records and a documented co-filing partnership, monitoring that pairing's ongoing activity gives early warning of where the core claim space is moving.
Set up assignee tracking in EurekaScope a filing around the identified white space
Cross-axis compensation and photonic-integrated resonant sensing show thinner claim density in this set than the core G01P classification, making them candidates for a first-claim search before drafting.
Run a white space search in EurekaSource: Patsnap Eureka. Forward-looking reading of the same dataset. Derived from a Patsnap search on Resonant MEMS Accelerometers covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
FAQ
Common questions about resonant MEMS accelerometer patents
A resonant MEMS accelerometer measures acceleration through a shift in the natural resonant frequency of a vibrating structure, rather than through a change in capacitance between two plates as in a conventional capacitive design. Applied acceleration changes the axial load on a resonating beam or proof-mass tether, which shifts its frequency in a way that can be read out digitally with high precision. This search set specifically targets claim language around frequency shift sensitivity, proof mass design and noise floor, which are the practical parameters that separate resonant designs from capacitive and piezoresistive alternatives.
The ranked assignee list for this search returns 10 companies and institutions, led by a single assignee holding 11 of the 33 records in scope. The remaining positions include several universities and individual named inventors, with the fifth-ranked holder at 4 records and the tenth at just 1. This is a field still close to its research origins rather than one dominated by a handful of large corporate portfolios.
Recorded filings peaked at 5 in 2022 and fell to 0 by 2024, a -100% change across that three-year span. However, patent publication typically lags the actual filing date by roughly 18 months, so the 2025 and 2026 figures in this dataset are still incomplete and cannot yet be read as a genuine decline. The safest reading is that documented activity cooled from its 2022 peak, with the most recent trend still emerging.
The overwhelming majority of records, 97.0% of the 33 in this set, fall under IPC class G01P covering velocity and acceleration measurement. A smaller share, 15.2%, also carries B81B classifications for microstructural MEMS devices, and 6.1% overlaps with G01C, the class for navigation and gyroscopic instruments. The overlap with G01C reflects multi-axis designs that combine a resonant accelerometer and a gyroscope on the same chip.
Based on the classification and claim-topic mix in this dataset, areas like cross-axis sensitivity compensation, temperature-stable resonator anchoring and photonic-integrated resonant sensing appear less densely claimed than the core frequency-shift and proof-mass design space. Multi-axis frequency-modulated IMU fusion, as seen in the representative University of California filing, is another branch with room for further claims. Any filing strategy in these areas should still be checked against the most-cited foundational resonant accelerometer patents, since broad early claims can still constrain adjacent designs.
Answers are grounded in the same dataset. Derived from a Patsnap search on Resonant MEMS Accelerometers covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.
Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.
Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company's registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.