Book a demo

Semiconductor Lithography Patents: Top Companies & Filing Trends 2026

Semiconductor Lithography Patents: Top Companies & Filing Trends 2026
Data to 2026-08-31

Semiconductor lithography patents: who holds the claim space and where it is thinning out

51.2% concentration. The five leading assignees hold 3,222 of the 6,298 records in scope — filing here means filing into occupied ground. Filings peaked at 457 in 2018 and climbed again to 451 in 2021 before falling to 202 by 2024, a 55% decline over that three-year span — the most recent complete-year comparison the dataset supports. Years after 2024 are still filling in under the roughly 18-month publication lag, so the tail of the chart should be read as incomplete rather than as evidence of continued decline.

Filing volume has pulled back from its 2018 peak
Complete Incomplete
Filing volume has pulled back from its 2018 peak0125250375500424201745720182019202020212022202320242025112026Most recent year is partial — publication lag means later filings are not yet visible.
6,298
Published Records
51%
Top-5 Share of All Records
-55%
Filing Growth 2021→2024
US
Leading Jurisdiction
Top filers · share of all 6,298 records
  1. 1INTERNATIONAL BUSINESS MACHINE CORPORATION38.9%
  2. 2SHIPLEY CO LLC4.0%
  3. 3TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD3.3%
  4. 4TEXAS INSTRUMENTS INC3.2%
  5. 5GLOBALFOUNDRIES INC1.8%
Published by Patsnap Research·

See the full semiconductor lithography patent landscape analysis in Eureka

  • The complete ranking, not just the top five
  • Every IPC branch with its share of the corpus
  • The most-cited records, and where claim space is still thin
Read more about this analysis in Eureka
FAQ

Common questions about the semiconductor lithography patent landscape

Who holds the most semiconductor lithography patents?+

One assignee leads the ranked field with 2,447 of the 6,298 records in scope, well ahead of the rest of the field — the fifth-ranked company holds 114 and the tenth holds 87. The top five combined account for 51.2% of all records, so filing strategy in this space has to account for a small number of very large portfolios before considering the long tail of 100 ranked companies. Because the ranking counts patent families rather than raw publications, this concentration reflects genuine filing breadth rather than an artefact of continuation filings.

Is semiconductor lithography patent filing increasing or decreasing?+

Filing volume peaked at 457 records in 2018 and rose again to 451 in 2021, then fell to 202 by 2024 — a 55% decline over that span, which is the most recent period the dataset treats as complete. Years from 2025 onward are still understated because publication typically lags filing by around 18 months, so it is too early to call the trend a continued slowdown. The honest read is a clear pullback through 2024 with an open question about what follows.

What is the difference between H01L and G03F classifications in this field?+

H01L covers semiconductor devices broadly and appears on 52.2% of the 6,298 records, while G03F covers photolithography and photomechanics specifically and appears on 29.7%. A record can carry both, so these are not mutually exclusive buckets — the gap indicates that most lithography-related filings ultimately claim device structure or outcome rather than staying confined to the optical process itself. Classes touching digital data processing and memory design also appear at meaningful but smaller shares, pointing to filings that bridge lithographic process and downstream circuit design.

Disclaimer. This analysis is based on Patsnap Eureka data drawn from a limited snapshot of global patent records and is provided for general information and reference only. Patent data carries inherent limitations — recent filings are under-counted because of publication lag, counts may be on a record or family basis, classification and applicant-name data may contain errors or duplicates, and the underlying search query defines the scope shown — so the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.

Nothing here is an exhaustive prior-art, novelty, freedom-to-operate or validity search, nor does it constitute legal, financial or professional advice, and it should not be relied upon as such. Verify independently and review with qualified patent and legal professionals before acting on it.

Method: Filing trend and technology composition. Derived from a Patsnap search on Semiconductor Lithography Patent Landscape covering 2015–2026, data cut-off 2026-08-31. Counts reflect published records only and shift as new filings publish. Every share divides by all records in scope. Data: Patsnap Eureka. See the full landscape report.

Help us improve this page

Found incorrect or outdated information? Let us know and we'll get it fixed.