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Sensors & MEMS Patents: Top Companies & Filing Trends 2026

Sensors & MEMS Patents: Top Companies & Filing Trends 2026
https://www.patsnap.com/resources/blog/rd-blog/sensors-mems-metrology-and-instrumentation-patent-landscape-patent-landscape/ · Patsnap · data cut-off 2026-07-31 · downloaded from the live page
Patent Landscape · Sensors, MEMS, Metrology & Instrumentation
Sensors, MEMS and metrology patents: who leads and where filing is slowing
  • Filing has cooled from its 2018 peak. the leading year recorded 1,295 filings; by 2024, the last complete year, activity was down to 760 — a 32% decline from 2021's 1,113.
  • Ownership is unusually diffuse. the top 5 assignees together hold just 6.3% of all 35,846 records, and the top 10 only 10.7% — no single filer dominates this field.
  • MEMS manufacturing trails MEMS design. B81B (MEMS devices, 5.7% of records) outweighs B81C (MEMS manufacturing, 4.3%), suggesting more claims on device architecture than on fabrication process.
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35.8K
Published Records
6%
Top-5 Share of All Records
-32%
Filing Growth 2021→2024
US
Leading Jurisdiction

Filing growth compares 2021 (1,113 records) with 2024 (760) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field. Top-5 share is the combined record count of the five largest assignees divided by all 35,846 records in scope (CR5), not by the ranked leaders only.

Published byPatsnap Research··7 min readSourced from Patsnap Eureka
Field Overview

A fragmented field built on diagnostic and material-analysis claims

The sensors, MEMS, metrology and instrumentation field spans 35,846 published records filed between 2015 and the 2026 data cut-off. Filing activity concentrates around diagnosis and surgical instrumentation (A61B) and material analysis and testing (G01N), the two largest IPC subclasses in scope, ahead of MEMS-specific device and manufacturing classes. The most-cited records in the corpus — spanning augmented-reality sensing, surgical MEMS instruments and microprocessor-controlled medication delivery — show how sensor and MEMS claims have migrated deep into medical devices rather than staying confined to standalone measurement hardware.

Because publication trails filing by roughly 18 months, the last one to two years in any trend understate real activity; 2024 is treated here as the most recent complete filing year.

Filing activity and technology composition, 2015-2026
  1. 1INVENSENSE INC561
  2. 2OSTERHOUT GROUP INC530
  3. 3QUALCOMM INC405
  4. 4TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD393
  5. 5INFINEON TECHNOLOGIES AG362
  6. 6MEDTRONIC INC339
  7. 7MEDTRONIC MINIMED INC338
  8. 8HONEYWELL INTERNATIONAL INC336
  9. 9ROBERT BOSCH GMBH305
  10. 10GOOGLE LLC284
Source: Patsnap Eureka. Assignee ranking and totals. Derived from a Patsnap search on Sensors, MEMS, Metrology & Instrumentation Patent Landscape covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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The Numbers

Filing trend and technology composition

Two views of the same 35,846-record dataset: filings by year, and the IPC subclasses that carry the most claim density.

Filings peaked in 2018 and have since declined

Filings ran from 1,239 in 2017 to a peak of 1,295 in 2018. By 2024, the last complete filing year, volume had fallen to 760 — down 32% from 2021's 1,113. The 2025-2026 figures shown are still filling in as publications catch up with filings.

Filings peaked in 2018 and have since declined03757501,1251,5001,23920171,29520182019202020212022202320242025562026Most recent year is partial — publication lag means later filings are not yet visible.

Diagnostic and material-analysis classes lead

A61B (diagnosis & surgery) covers 9.7% of records and G01N (material analysis & testing) 6.9%, the two largest classes in scope. MEMS-specific classes B81B (5.7%) and B81C (4.3%) sit below semiconductor devices (H01L, 4.7%) and digital data processing (G06F, 5.6%), and because records can carry multiple IPC codes these shares sum to more than 100% of the record total.

Diagnostic and material-analysis classes leadA61B · Diagnosis & surgery3,4699.7%G01N · Material analysis & testing2,4716.9%B81B · Microstructural devices (MEMS)2,0485.7%G06F · Electric digital data processi…1,9925.6%H01L · Semiconductor devices1,6954.7%B81C · MEMS manufacturing1,5464.3%G01L · Force & pressure measurement1,3593.8%A61M · Devices for body fluids1,2003.3%Other25,55671.3%

Shares are the percentage of the 35,846 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.

Source: Patsnap Eureka. Filing trend and technology composition. Derived from a Patsnap search on Sensors, MEMS, Metrology & Instrumentation Patent Landscape covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.

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Representative Filing

A representative claim: hybrid MEMS/non-MEMS integration

Representative Patent
US8461935B22013-06-11

Hybrid system having a non-MEMS device and a MEMS device (US8461935B2)

SILICON LABORATORIES INC.

A hybrid system having a non-MEMS device and a MEMS device is described. The apparatus includes a non-MEMS device and an integrated circuit including a MEMS device, the integrated circuit formed on a substrate. The integrated circuit includes a control circuit for the non-MEMS device and a MEMS control circuit for the MEMS device.Filed by Silicon Laboratories Inc., granted 2013-06-11.

US8461935B2 — patent drawing 1US8461935B2 — patent drawing 2
View full record
Most-cited records in this field
#Publication no.Patent titleCitations
1US20160026253A1Methods and systems for creating virtual and augmented reality3,439
2US20050131390A1Surgical instruments including mems devices2,863
3US5925021AMedication delivery device with a microprocessor and characteristic monitor2,064
4US20190200981A1Method of compressing tissue within a stapling device and simultaneously displaying the location of the tissu…1,940
5US8808311B2Surgical instruments including MEMS devices1,834
6US6806808B1Wireless event-recording device with identification codes1,821
7US20050046584A1Asset system control arrangement and method1,780
8US20130201316A1System and method for server based control1,727
9US20070078484A1Gentle touch surgical instrument and method of using same1,708
10US5957854AWireless medical diagnosis and monitoring equipment1,612

Ranked by citation count within the searched corpus; older records accumulate citations simply by being available longer, so treat this as a signal of influence rather than current relevance.

Each row carries its publication number; clicking a row searches Eureka by that number.

Source: Patsnap Eureka. Citation counts and representative records. Derived from a Patsnap search on Sensors, MEMS, Metrology & Instrumentation Patent Landscape covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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Insights

What the filing data actually shows

Three findings that shape where to file next and who to watch.

Concentration
6.3% of 35,846
top 5 combined share

No single assignee controls this field

The top 5 assignees together account for only 6.3% of all 35,846 records, and the top 10 for 10.7%. That is a genuinely long tail: even the leader holds 561 records against a field of 35,846, so freedom-to-operate analysis has to look well past the household names.

Ranking covers 100 assignees, not a top-50 or top-100 cut.
Momentum
-32% (2021-2024)
three-year filing change

Filing volume has pulled back from its 2018 peak

After peaking at 1,295 filings in 2018, volume declined to 760 by 2024, a 32% drop from 2021's 1,113. That is the most recent period that can be read as complete; 2025-2026 figures are still filling in as publications catch up with the roughly 18-month lag behind filing.

2024 is the last complete filing year in this dataset.
Composition
9.7% A61B
largest IPC subclass

Diagnostic and surgical claims dominate the class mix

A61B (diagnosis & surgery) and G01N (material analysis & testing) are the two largest IPC subclasses, ahead of MEMS-specific codes B81B and B81C. That pattern tracks the most-cited records in the corpus, several of which sit at the intersection of MEMS sensing and surgical instrumentation.

Class shares are measured against the full 35,846-record total and overlap because records carry multiple codes.
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Cross-assignee filing pairs are rare but consistent
AssigneeCo-assigneeShared families
Robert Bosch GmbHYAMA GARY13
Robert Bosch GmbHOBRIEN GARY13
Robert Bosch GmbHGRAHAM ANDREW10
Robert Bosch GmbHPARTRIDGE AARON8
Robert Bosch GmbHLUTZ MARKUS8
Robert Bosch GmbHAkustica Inc.7
Robert Bosch GmbHKRONMUELLER SILVIA6
Robert Bosch GmbHFEYH ANDO6

The dataset surfaces only 10 recurring co-assignee pairs, with the strongest links running through individual named inventors filing alongside a single large German industrial group — a pattern typical of internal inventor teams rather than cross-company joint development.

Source: Patsnap Eureka. Co-assignee relationships and derived observations. Derived from a Patsnap search on Sensors, MEMS, Metrology & Instrumentation Patent Landscape covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Who's Filing

A diffuse field with a long tail of single-digit filers

The ranked leaders span semiconductor foundries, MEMS specialists, medical device makers and diversified industrials — none of them commanding more than a small slice of the total.

Leader
561 records
top assignee

The top filer barely clears 1.5% of the field

With 561 records against 35,846 total, the leading assignee's share illustrates how fragmented ownership is here compared with fields where a handful of firms hold a third or more of filings.

Fifth place sits at 362 records; tenth place at 284.
Momentum
0% to -93% YoY
recent-year filing change

Recent-year activity is down sharply across most tracked assignees

Year-over-year momentum among tracked assignees ranges from flat to down more than 90%, with several long-time filers recording only a handful of filings in the latest year. This aligns with the broader 2021-2024 decline rather than signalling a single company's retreat.

Latest-year counts are partial due to publication lag.
Collaboration
10 pairs
recurring co-assignee links

Joint filing is the exception, not the rule

Only 10 recurring co-assignee pairs appear in the dataset, and the strongest ones link a single large industrial group to named individual inventors rather than to other companies. Most records in this field are filed by a single assignee.

No dominant multi-company filing cluster emerged.
🔍
Under-claimed branches worth a closer look
Sub-areas where filing density is comparatively thin relative to the core diagnostic and MEMS-manufacturing classes.
Wafer-level MEMS packagingSensor fusion calibration algorithmsBody-fluid analyte biosensorsForce/pressure sensor arraysLow-power MEMS control ICs
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Recent-year filing momentum by assignee
AssigneeRecent yearYoY
Taiwan Semiconductor Manufacturing Co., Ltd. (TSMC)30%
InvenSense Inc.1-91%
Infineon Technologies AG1-75%
MENTOR ACQUISITION ONE LLC1-93%
Robert Bosch GmbH10%
Osterhout Group Inc.0
Strong Force IoT Portfolio 2016, LLC0-100%
DEKA Products Limited Partnership0-100%
Source: Patsnap Eureka. Assignee-level momentum. Derived from a Patsnap search on Sensors, MEMS, Metrology & Instrumentation Patent Landscape covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Next Steps

Where to take this analysis

The dataset points to a fragmented ownership structure and a post-2018 filing pullback — both of which change how a freedom-to-operate or whitespace search should be scoped.

Run a claim-level search on the under-claimed branches

Wafer-level packaging and sensor-fusion calibration show thinner filing density than core MEMS and diagnostic classes — worth a targeted novelty search before committing to a filing strategy there.

Explore white space in Eureka

Track the long tail, not just the leader

With the top 10 holding only 10.7% of all 35,846 records, competitive monitoring needs to extend well past the largest few assignees to catch emerging filers.

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Source: Patsnap Eureka. Forward-looking reading of the same dataset. Derived from a Patsnap search on Sensors, MEMS, Metrology & Instrumentation Patent Landscape covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
FAQ

Common questions about this field

Answers are grounded in the same dataset. Derived from a Patsnap search on Sensors, MEMS, Metrology & Instrumentation Patent Landscape covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.

Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.

Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.

Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company’s registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.

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