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SiC Substrate Supply & Substitution Patent Snapshot

SiC Substrate Supply & Substitution Patent Snapshot
Evidence Snapshot
SiC Substrate Supply & Substitution Patent Snapshot in 2026

SiC substrate supply and substitution is a concentrated, research-institution-led field still expanding on a multi-year basis, with MIT holding the largest single-filer position and graphene-assisted transfer routes commanding the most-cited work. Annual volume eased from its 2023 peak, though recent years are further understated by publication lag, and the dominant jurisdiction is the United States.

25
Patent families in scope
66%
Top visible applicants share
+33%
3-yr filing growth (lag-adj.)
United States
Leading jurisdiction
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Published byPatSnap Insights Team··6 min readVerified by PatSnap Eureka data
Overview

MIT leads a tightly concentrated field anchored in US institutions

MIT holds the top position among ranked applicants, followed by THINSIC INC and a cluster of academic and industrial filers. The top five filers together account for sixty-six percent of the combined patent records of the ranked applicants visible in this query, signaling a highly concentrated assignee snapshot.

A clear tier gap separates MIT from the rest of the field. Challengers such as THINSIC INC, GlobalWafers, and the Board of Trustees of Michigan State University each hold materially smaller positions, and the long tail of single-record filers suggests limited broad-based industrial mobilization to date.

Leading applicants
#ApplicantPatent recordsShare
1Massachusetts Institute of Technology10
2THINSIC INC6
3Board of Trustees of Michigan State University4
4GlobalWafers Co., Ltd.4
5The Government of the United States of America3
6Rohm Co., Ltd.3
7Siltronic AG2
#ApplicantPatent recordsShare
8Crystal Technologies LLC2
9Infineon Technologies AG2
10Nuflare Technology, Inc.2
11Tokai Carbon Co., Ltd.1
12Nippon Steel Corporation1
13Texas Instruments Incorporated1
↗ Hover a row · click a company to ask Eureka

The leaders’ positions imply that fundamental substrate-transfer and heteroepitaxy approaches — particularly graphene-based layer transfer — are controlled by a small group, creating meaningful freedom-to-operate considerations for new entrants and device manufacturers seeking alternative SiC supply routes.

The most recent one to two years of filing data are understated due to patent publication lag and should be interpreted with caution; the apparent absence of 20252026 filings does not indicate a slowdown. Longer-window growth, applicant concentration, and technology-route coverage are therefore more reliable signals than the latest-year bar alone.

Source: PatSnap Eureka. Chart shows the top applicants ranked by patent records; the corpus total is measured in patent families. These figures use different units and should not be compared directly.Explore deeper in Eureka →
Trends & Structure

Multi-year growth with a 2023 peak and semiconductor-device dominance in technology mix

The annual filing trend and IPC technology composition together reveal a field that has grown substantially on a multi-year basis while remaining anchored in semiconductor device processing, with crystal-growth and surface-deposition branches playing secondary roles.

Annual filing trend

Filing activity was negligible before 2018, rose through 2021, and reached its highest recorded annual volume in 2023. The field is still expanding on a multi-year basis with thirty-three percent recent-window growth, though annual volume has eased from the 2023 peak. The 2024–2026 bars are materially understated by publication lag and should not be read as a real decline.

Annual filing trendAnnual values from 2017 to 2026, peaking at 9 in 2023.02017420183201902020620211202292023220240202502026↗ Hover for values · click a bar to ask Eureka

Technology composition

H01L (semiconductor devices) accounts for the large majority of IPC records, confirming that most filers are targeting device-integration and wafer-processing outcomes rather than upstream crystal growth alone. C30B (crystal growth) represents the next-largest branch, followed by C23C (coating and surface deposition) and the emerging H10P class — the latter two being notably sparse relative to their potential relevance.

Technology compositionH01L · Semiconductor devices leads with 30; C30B · Crystal growth 6.H01L · Semiconductor dev…30C30B · Crystal growth6C23C · Coating & surface…2H10P1↗ Hover for values · click a bar to ask Eureka
Source: PatSnap Eureka. Technology-branch counts are measured in patent records; a single patent family can carry several IPC classes, so class totals can exceed the family total in scope.Explore deeper in Eureka →
Key Patents

Highly cited patent families surfaced by the query

Citation-heavy patent families returned by the query. Use this section as citation context, not as a curated list of the most topic-specific patents.

Featured patent
US20210125826A1Published 2021-04-29

Systems and methods for growth of silicon carbide …

Rohm CO., LTD.

Systems and methods for growth of silicon carbide over a layer comprising graphene and/or hexagonal boron nitride, and related articles, are generally described. In some embodiments, a SiC film is fabricated over a layer comprising graphene and/or hexagonal boron nitride, which in turn is disposed over a substrate. The layer and/or the substrate may be… (excerpt from the patent abstract)

Systems and methods for growth of silicon carbide … — patent drawingSystems and methods for growth of silicon carbide … — patent drawing
Representative drawings from the patent document.
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Highly cited patent families surfaced by this query
#PatentCitations
1Systems and methods for graphene based layer trans…51
2Heteroepitaxy by large surface steps35
3Systems and methods for graphene based layer trans…33
4Method and device for growing silicon carbide sing…26
5Systems and methods for graphene based layer trans…9
6Systems and methods for growth of silicon carbide …8
7Laser Assisted SiC Growth On Silicon6
8Integrated Method for Low-Cost Wide Band Gap Semic…4

Ranked by total forward citations. Citation counts favour older and broadly cited patent families, and broad or adjacent patents may appear when they match the search scope. Treat this section as citation context, not as a curated list of the most topic-specific patents. Some patent titles may be shown in their original, non-English language where an accurate translation could not be guaranteed.

Source: PatSnap Eureka. Citation-ranked patent families surfaced by this query.Open in Eureka →
Visible assignees

Assignee snapshot from the current evidence set

The applicants below are visible in this query result. Because the evidence set is relatively small, read this section as a directional snapshot rather than a full competitive ranking.

Leader · MIT

Massachusetts Institute of Technology

MIT holds ten patent records, the largest position in this landscape. Its technology emphasis spans H01L 21, H01L 23, and H01L 29 — covering semiconductor processing, device packaging, and transistor structures respectively — consistent with an integrated graphene-assisted layer-transfer program that targets both substrate supply and device integration. MIT also anchors the field’s primary collaboration network with the US Government and Rohm. Momentum is classified as a new entrant in the recent window, reflecting concentrated recent-period activity.

patent records: 10
Challenger · THINSIC INC

THINSIC INC

THINSIC INC holds six patent records — the second-largest position — and its technology focus is concentrated in H01L 21 (semiconductor processing), suggesting a process-engineering approach to thin SiC or alternative-substrate manufacture. Like MIT, THINSIC is classified as a new entrant in the recent filing window, with four recent patent records, indicating active and growing commercial program momentum. Its position as a startup-style entrant rather than an established wafer supplier makes it a differentiated challenger worth monitoring.

patent records: 6
🔍
More assignee evidence is available in Eureka
Use Eureka to validate whether these visible assignees remain central after refining the query scope and adding related patent classes.
GlobalWafers Co., Ltd.Rohm Co., Ltd.+ more
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Source: PatSnap Eureka. Assignee evidence is drawn from the current PatSnap Eureka query. In small evidence sets, applicant counts should be treated as directional signals, not a complete competitive ranking.Explore players →
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Frequently asked questions

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Disclaimer. This page is generated from PatSnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.

Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.

Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. PatSnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.

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