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SOI Substrate Manufacturing Patents: Who Leads, Trends 2026

SOI Substrate Manufacturing Patents: Who Leads, Trends 2026
https://www.patsnap.com/resources/blog/rd-blog/soi-substrate-manufacturing-patent-landscape/ · Patsnap · data cut-off 2026-07-31 · downloaded from the live page
Patent Landscape · Semiconductor Equipment
SOI Substrate Manufacturing Patents: Filing Trends and Who Holds the Claims
  • Two assignees account for the entire ranked field. the top 2 combined hold 12 of 12 records in scope (100.0%), with no third filer appearing in the ranking at all.
  • Filing activity peaked in 2019 and has not recovered. six records that year against a flat-to-declining midpoint of two in 2022, with zero recorded in the most recent full year.
  • Claims cluster tightly around device and RF wafer platforms. H01L covers all 12 records and H10W appears on 10 of 12 (83.3%), leaving crystal-growth claims under C30B (41.7%) comparatively thin.
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12
Published Records
-100%
3-Yr Growth (lag-adjusted)
US
Leading Jurisdiction
2019
Peak Filing Year
Published byPatsnap Research··7 min readSourced from Patsnap Eureka
Overview

What the SOI substrate manufacturing patent record actually shows

The scope here is narrow by design: records must combine SOI substrate or layer-transfer wafer terminology in the title with process-level claim language — ion implantation and splitting, buried oxide thickness uniformity, bonding void control, top silicon thickness, or defectivity — under H01L21, H01L27 or C30B33. That combination returns only 12 published records, which is small enough that every figure below should be read as a description of a tight, specialist corpus rather than an industry-wide survey.

Within that scope, filing activity is concentrated in both time and ownership. Two assignees cover the full ranked set, and the trend line rose to a single peak in 2019 before flattening. Publication lags filing by roughly 18 months, so the most recent year understates true filing activity and should not be read as a stop in R&D.

Filing activity and technology composition, SOI substrate manufacturing
  1. 1GlobalWafers Co., Ltd.10
  2. 2USENKO ALEXANDER YURI2
Source: Patsnap Eureka. Assignee ranking and totals. Derived from a Patsnap search on SOI Substrate Manufacturing covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
The Numbers

Filing trend and technology composition

Two views of the same 12-record corpus: how filings moved year over year, and which IPC subclasses carry the claim volume.

A single 2019 peak, then a flat-to-declining line

Filings rose to six records in 2019, the peak so far, then eased back to two by the 2022 midpoint and show zero in the most recent full year. Given the typical 18-month lag between filing and publication, the last one to two years on the chart will fill in further as records publish; treat the apparent drop-off as incomplete rather than confirmed.

A single 2019 peak, then a flat-to-declining line023560201720186201920202021202220232024202502026Most recent year is partial — publication lag means later filings are not yet visible.

Claim density sits in H01L and H10W, not in crystal growth

Every one of the 12 records in scope carries an H01L semiconductor-device classification, and 10 of 12 (83.3%) also carry H10W. C30B crystal-growth claims appear on only 5 of 12 records (41.7%), which is the thinnest of the three subclasses tracked here and the one most likely to hold room for a differentiated claim.

Claim density sits in H01L and H10W, not in crystal growthH01L · Semiconductor devices12100.0%H10W1083.3%C30B · Crystal growth541.7%

Shares are the percentage of the 12 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.

Source: Patsnap Eureka. Filing trend and technology composition. Derived from a Patsnap search on SOI Substrate Manufacturing covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.

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Key Patents

The most-cited records in this corpus

Representative record
US10943813B22021-03-09

Radio frequency silicon on insulator wafer platform with superior performance, stability, and manufacturability

GLOBALWAFERS CO., LTD.

A semiconductor-on-insulator (e.g., silicon-on-insulator) structure having superior radio frequency device performance, and a method of preparing such a structure, is provided by utilizing a single crystal silicon handle wafer sliced from a float zone grown single crystal silicon ingot.Filed by GLOBALWAFERS CO., LTD.; published 2021-03-09 as US10943813B2.

US10943813B2 — patent drawing 1US10943813B2 — patent drawing 2
View full record
Most-cited SOI substrate manufacturing patents
#Publication no.Patent titleCitations
1US20200020766A1Radio frequency silicon on insulator wafer platform with superior performance, stability, and manufacturabili…15
2US10943813B2Radio frequency silicon on insulator wafer platform with superior performance, stability, and manufacturabili…2
3US11532501B2Radio frequency silicon on insulator wafer platform with superior performance, stability, and manufacturabili…1

Citation counts inside a searched corpus favour older records; read them as a signal of influence on later filings, not as a measure of current commercial importance.

Publication numbers are shown where the record carries one (3 of 3 rows); clicking a row searches Eureka by that number.

Source: Patsnap Eureka. Citation counts and representative records. Derived from a Patsnap search on SOI Substrate Manufacturing covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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Insights

What the concentration and citation pattern mean for a new entrant

With only 12 records and two ranked assignees, the practical questions are less about market share and more about which specific claim territory is already occupied.

Concentration
100.0% top 2
of 12 records in scope

No long tail in this corpus

The top 2 combined account for all 12 records in scope, and the top 5 figure is identical because no other assignee appears in the ranking. A new filer is not competing against a crowded field of small players here — it is negotiating around two established positions.

Assignee ranking, 12 records
Filing momentum
6 in 2019
peak year filings

Peak passed, trend flat since

Filings peaked at six records in 2019 and had fallen to two by the 2022 midpoint, with the latest full year showing zero. That pattern reads as a technology that had its claim-filing push already, rather than one still accelerating — though the 18-month publication lag means the very last data points are the least reliable.

Filing trend, 2017–2026
Citation influence
15 citations
on the most-cited record

Influence concentrated in one earlier filing

The most-cited record in this corpus carries 15 citations, well ahead of the next records at 2 and 1. That gap suggests a foundational filing that later applicants had to cite or design around, making it the first document worth reading closely before drafting new claims in this space.

Most-cited records table
Eureka AI Agent
Looking for what nobody has claimed yet?

Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to soi substrate manufacturing, with the prior art for and against each one.

Find the white space →
Source: Patsnap Eureka. Co-assignee relationships and derived observations. Derived from a Patsnap search on SOI Substrate Manufacturing covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Players

Who holds the claim positions

The ranked assignee list for this corpus contains exactly two companies; there is no third-place filer to compare them against.

Leader
10 records
of 12 in scope

One assignee holds most of the corpus

The leading assignee accounts for 10 of the 12 records in scope, placing the bulk of the documented claim territory with a single filer. Its recent-year momentum is recorded as zero, consistent with the corpus-wide flattening after the 2019 peak.

Assignee ranking
Second position
0 in latest year
recent-year filings

Second assignee, no recent activity recorded

The second ranked assignee, an individual inventor-assignee rather than a corporate entity, also shows zero filings in the latest year. Between the two, the ranked field accounts for 100.0% of all 12 records, so there is no unranked competitor visible in this dataset.

Assignee ranking
Receiving offices
8 of 12
filed at USPTO

US-centred filing pattern

Eight of the 12 records were filed at the United States receiving office, with the remainder split across the EPO, Singapore and the WIPO PCT route. That skew suggests the documented activity is oriented toward US commercial deployment first.

Receiving office breakdown
🔍
Under-claimed branches worth checking before filing
C30B crystal-growth claims cover only 5 of 12 records (41.7%), the thinnest of the three tracked subclasses — a starting point for where claim space may still be open.
Buried oxide thickness uniformity controlBonding void mitigation methodsTop silicon thickness trimming after splittingFloat-zone ingot handle-wafer sourcingDefectivity metrology integration
Rank all filers by momentum →
Recent-year filing momentum by assignee
AssigneeRecent yearYoY
GlobalWafers Co., Ltd.0
USENKO ALEXANDER YURI0
Source: Patsnap Eureka. Assignee-level momentum. Derived from a Patsnap search on SOI Substrate Manufacturing covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
What's Next

Where to take this analysis

The dataset points to a narrow, concentrated field with one dominant filer and a thin crystal-growth branch. The next steps depend on whether the goal is freedom-to-operate or new filing strategy.

Map the leader's full claim scope

With one assignee holding 10 of 12 records, a claim-by-claim read of its family is the fastest way to see exactly what is blocked before drafting anything adjacent.

Explore assignee claim scope in Eureka

Test the C30B white space

Crystal-growth claims sit under the other two subclasses at 41.7% of records; running a freedom-to-operate check specifically against that branch can confirm whether it is genuinely open.

Run a white-space check in Eureka

Track the next publication wave

Given the 18-month lag between filing and publication, records filed in the last two years have not fully surfaced yet; revisiting the trend line in a future quarter will sharpen the recent-year picture.

Set a monitoring alert in Eureka
Source: Patsnap Eureka. Forward-looking reading of the same dataset. Derived from a Patsnap search on SOI Substrate Manufacturing covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
FAQ

Common questions about SOI substrate manufacturing patents

Answers are grounded in the same dataset. Derived from a Patsnap search on SOI Substrate Manufacturing covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.

Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.

Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.

Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company’s registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.

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