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Run your analysis now →Filing growth compares 2021 (171 records) with 2024 (109) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field. Top-5 share is the combined record count of the five largest assignees divided by all 5,676 records in scope (CR5), not by the ranked leaders only.
Sputtering targets sit at the intersection of alloy metallurgy, ceramics processing and thin-film deposition equipment. The corpus behind this page spans 5,676 patent families filed between 2015 and mid-2026, drawn from filings tagged to alloy target material, rotary target, ceramic target and target material claim language across C22C, C23C14/34 and C04B35. That breadth means the dataset captures both the target material composition itself and the deposition process claims built around it.
Filing activity is concentrated in coating and surface deposition claims, with alloy composition, semiconductor device integration and powder metallurgy processing as secondary but substantial clusters. Publication for the most recent filing year is still incomplete, since publication typically lags filing by around eighteen months — the 2026 figure in any trend chart should be read as a floor, not a final count.
Pick a task. Every answer cites the patents behind it.
Annual filing counts and IPC composition for the 5,676 patent families in scope, covering 2015 through the partial-year cut-off of 2026-07-31.
Annual filings ran from 211 in 2017 down to a midpoint of 147 in 2022, with 13 recorded so far in the current partial year. The shape is a decline off a peak rather than a plateau — read the tail years with the publication lag in mind before concluding the field is contracting.
C23C (coating and surface deposition) appears in 5,620 of 5,676 records, effectively the whole corpus, with C22C (alloys, 1,569), H01J (electron and discharge tubes, 972) and H01L (semiconductor devices, 785) as the next tier. C04B (ceramics, 665) and B22F (powder metallurgy, 712) carry meaningfully less filing density despite being technically distinct routes to target material production.
Shares are the percentage of the 5,676 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.
This page is one run against one query. Ask Eureka your own question about sputtering target advanced materials and every answer comes back with the patent numbers behind it.
Try EurekaFiled by Hitachi Metals, this record claims a Co-Fe-Zr based alloy target material for soft magnetic film deposition in perpendicular magnetic recording media, specified by an atomic-ratio compositional formula with defined ranges for the base elements plus a substituent group including Ti, V, Nb, Ta, Cr and Mo. The claim ties a specific alloy composition window to a stated magnetic permeability and sputtering performance outcome.Publication date 2008-04-10 — included here as a representative composition-plus-process claim structure typical of alloy target filings in this dataset.


| # | Publication no. | Patent title | Citations |
|---|---|---|---|
| 1 | US20020104751A1 | Method and apparatus for ionized physical vapor deposition | 503 |
| 2 | US5540821A | Method and apparatus for adjustment of spacing between wafer and PVD target during semiconductor processing | 370 |
| 3 | US5922176A | Spark eliminating sputtering target and method for using and making same | 286 |
| 4 | US5693203A | Sputtering target assembly having solid-phase bonded interface | 256 |
| 5 | US6287435B1 | Method and apparatus for ionized physical vapor deposition | 207 |
| 6 | US5126028A | Sputter coating process control method and apparatus | 199 |
| 7 | US5252194A | Rotating sputtering apparatus for selected erosion | 194 |
| 8 | US5519566A | Method of manufacturing ferroelectric bismuth layered oxides | 164 |
| 9 | US6117279A | Method and apparatus for increasing the metal ion fraction in ionized physical vapor deposition | 163 |
| 10 | US4610775A | Method and apparatus for clearing short-circuited, high-voltage cathodes in a sputtering chamber | 160 |
Citation counts are drawn from within the searched corpus and skew toward older filings — treat them as a measure of influence on later claim drafting, not of current commercial relevance.
Each row carries its publication number; clicking a row searches Eureka by that number.
When you want the answer in the next five minutes.
The agent works the prompt against patents and technical literature, citing every source.
Run your analysis now →When it has to run inside your own pipeline.
Patent search, landscape analysis and assignee resolution as MCP tools. Drop them into any agent framework, or call REST directly.
Browse MCP servers →Three structural features stand out once family-level counts and citation patterns are set against each other.
Filings ran at 211 in 2017, held near 147 by 2022, and the field is not showing renewed acceleration. This reads as a mature claim space where incremental filing has slowed, not an emerging one still building density.
Almost every record in scope touches C23C coating and surface deposition claim language, which means differentiation inside this dataset happens at the alloy composition and process-parameter level, not at the top IPC classification.
The most-cited record concerns ionized physical vapor deposition apparatus rather than a target material composition itself, indicating that equipment and process claims from the early 2000s still shape how later material claims are drafted around them.
Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to sputtering target advanced materials, with the prior art for and against each one.
| Assignee | Co-assignee | Shared families |
|---|---|---|
| Mitsubishi Materials Corporation | Showa Oil Co., Ltd. | 9 |
| Honeywell International Inc. | STROTHERS SUSAN D | 8 |
| Honeywell International Inc. | KIM JAEYEON | 7 |
| Honeywell International Inc. | FERRASSE STEPHANE | 7 |
| JX Nippon Mining & Metals Corporation | Japan Energy Corporation | 6 |
| Mitsubishi Materials Corporation | Solar Frontier K.K. | 6 |
| Sumitomo Chemical Co., Ltd. | UACJ Corporation | 6 |
| Honeywell International Inc. | HORT WERNER | 6 |
Only 10 co-assignee pairs appear across the corpus, and the strongest pairings involve a small number of named-inventor and corporate combinations rather than broad industry consortia — collaborative filing is the exception here, not the norm.
Recent-year momentum figures show a field where established filers have largely stopped adding new families, which changes how a competitor-watch list should be built.
Mitsui Mining & Smelting recorded 1 filing in the latest year at 0% year-on-year change, while JX Nippon Mining & Metals, Sanyo Special Steel, Mitsubishi Materials and several others show zero filings in the same window.
Applied Materials, whose most-cited prior art anchors the equipment side of this field, shows a -100% year-on-year change in the latest partial year — consistent with the broader post-2017 decline rather than an isolated event.
The strongest co-assignee pairing in the dataset appears 9 times; most combinations appear far less. That points to in-house material development rather than joint-venture or licensed co-filing as the dominant model.
| Assignee | Recent year | YoY |
|---|---|---|
| Mitsui Mining & Smelting Co., Ltd. | 1 | 0% |
| JX Nippon Mining & Metals Corporation | 0 | — |
| Sanyo Special Steel Co., Ltd. | 0 | — |
| Proterial, Ltd. | 0 | — |
| Mitsubishi Materials Corporation | 0 | — |
| Applied Materials, Inc. | 0 | -100% |
| Sumitomo Chemical Co., Ltd. | 0 | -100% |
| Honeywell International Inc. | 0 | -100% |
The filing trend and assignee data point to specific next questions depending on whether the goal is freedom-to-operate, licensing, or new material development.
Ceramic and powder-metallurgy target routes carry far fewer filings than the coating-deposition core, which may mean either open claim space or simply less commercial activity — worth checking against product literature before filing.
Explore white space in EurekaSeveral established filers show no filings in the latest year. That can mean a portfolio is being maintained rather than expanded, or that R&D has shifted to a different material system entirely.
Set up assignee monitoring in EurekaThe most-cited records concern deposition apparatus rather than target composition — any new material claim should be checked against how those apparatus claims constrain achievable target geometries and interfaces.
Review cited prior art in EurekaThe assignee ranking in this dataset is led by a mix of Japanese metals and materials firms alongside major equipment makers, reflecting the field's split between target composition claims and deposition apparatus claims. Recent-year momentum figures show that even the more active historical filers, such as Mitsui Mining & Smelting and Mitsubishi Materials, have slowed to zero or near-zero new filings in the latest partial year. This means portfolio leadership by cumulative count does not necessarily indicate who is actively expanding claim coverage today, so both the full ranking and the recent-year momentum figures should be checked together.
No — filings peaked at 211 in 2017 and had declined to 147 by the 2022 midpoint, with the trend continuing downward into the partial 2026 count. This is a mature filing pattern rather than an expanding one. Because publication lags filing by roughly eighteen months, the most recent one to two years will always look lower than they eventually turn out to be, so a modest uptick in the final published numbers for those years would not be surprising, but it would not reverse the multi-year decline from the 2017 peak.
The corpus spans coating and surface deposition (C23C, present in nearly the entire dataset), alloy composition (C22C), electron and discharge tube applications (H01J), semiconductor device integration (H01L), powder metallurgy processing (B22F), and ceramics and refractories (C04B). The heavy concentration in C23C means most records combine a target material claim with a deposition process or apparatus claim, rather than claiming composition in isolation. Ceramics and powder-metallurgy routes to target production are present but carry substantially lower filing density.
US20080083616A1, assigned to Hitachi Metals, claims a Co-Fe-Zr based alloy sputtering target material defined by a specific atomic-ratio compositional formula, including a substituent group of elements such as Ti, V, Nb, Ta, Cr and Mo, for use in soft magnetic film deposition in perpendicular magnetic recording media. It blocks compositions falling within its claimed atomic-ratio ranges and substituent list for that magnetic-recording application. It does not block alloy target compositions outside those defined ranges, or target materials aimed at different applications such as semiconductor interconnects or optical coatings, so a design-around typically means moving the composition ratios outside the claimed windows or targeting a different end-use film property.
IPC composition data shows ceramic target sintering routes (C04B, 665 records) and powder-metallurgy consolidation methods (B22F, 712 records) carry far fewer filings than the coating-deposition core (C23C, 5,620 records), despite being technically distinct production routes to a finished target. Co-assignee activity is also thin across the whole dataset, with only 10 recorded pairs, suggesting limited joint-development filing that a new entrant could use as a collaboration opening. Any white-space claim should still be checked against the cited foundational apparatus patents, since those can constrain what a new material claim can practically achieve in a deposition system.
Go past this page: query the whole sputtering target advanced materials corpus yourself, in your own scope.
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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.
Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.
Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company's registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.