https://www.patsnap.com/resources/blog/rd-blog/sputtering-target-advanced-materials-patent-landscape/ · Patsnap · data cut-off 2026-07-31 · downloaded from the live page
Patent Landscape · Advanced Materials & Metallurgy
Sputtering Target Patents: Who Holds the Claim Space and Where It Is Thinning
  • Filings have declined since a 2017 peak of 211, with 2022 at 147 — a flattening curve rather than a growing one, which changes how a freedom-to-operate search should be scoped.
  • C23C coating and deposition claims dominate at 5,620 of 5,676 records, while ceramics (C04B, 665) and powder metallurgy (B22F, 712) carry a fraction of the filing density.
  • No assignee shows growth in the latest partial year, and several long-standing filers — including Mitsubishi Materials and Applied Materials — recorded zero or negative year-on-year activity.
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5,676
Published Records
36%
Top-5 Share of All Records
-36%
Filing Growth 2021→2024
US
Leading Jurisdiction

Filing growth compares 2021 (171 records) with 2024 (109) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field. Top-5 share is the combined record count of the five largest assignees divided by all 5,676 records in scope (CR5), not by the ranked leaders only.

Published byPatsnap Research··7 min readSourced from Patsnap Eureka
Field Overview

What the sputtering target patent record actually covers

Sputtering targets sit at the intersection of alloy metallurgy, ceramics processing and thin-film deposition equipment. The corpus behind this page spans 5,676 patent families filed between 2015 and mid-2026, drawn from filings tagged to alloy target material, rotary target, ceramic target and target material claim language across C22C, C23C14/34 and C04B35. That breadth means the dataset captures both the target material composition itself and the deposition process claims built around it.

Filing activity is concentrated in coating and surface deposition claims, with alloy composition, semiconductor device integration and powder metallurgy processing as secondary but substantial clusters. Publication for the most recent filing year is still incomplete, since publication typically lags filing by around eighteen months — the 2026 figure in any trend chart should be read as a floor, not a final count.

Sputtering Target Advanced Materials — Filing Trend and Technology Composition
  1. 1JX NIPPON MINING & METALS CORP979
  2. 2SANYO SPECIAL STEEL CO LTD328
  3. 3MITSUBISHI MATERIALS CORP248
  4. 4PROTERIAL LTD245
  5. 5APPLIED MATERIALS INC234
  6. 6MITSUI MINING & SMELTING CO LTD219
  7. 7SUMITOMO CHEM CO LTD160
  8. 8HONEYWELL INTERNATIONAL INC131
  9. 9TOSOH CORP107
  10. 10KOBE STEEL LTD89
Source: Patsnap Eureka. Assignee ranking and totals. Derived from a Patsnap search on Sputtering Target Advanced Materials covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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The Numbers

Filing trend and technology composition

Annual filing counts and IPC composition for the 5,676 patent families in scope, covering 2015 through the partial-year cut-off of 2026-07-31.

Filings peaked in 2017 and have not recovered

Annual filings ran from 211 in 2017 down to a midpoint of 147 in 2022, with 13 recorded so far in the current partial year. The shape is a decline off a peak rather than a plateau — read the tail years with the publication lag in mind before concluding the field is contracting.

Filings peaked in 2017 and have not recovered063125188250211201720182019202020212022202320242025132026Most recent year is partial — publication lag means later filings are not yet visible.

Deposition claims dominate; ceramics and powder metallurgy trail

C23C (coating and surface deposition) appears in 5,620 of 5,676 records, effectively the whole corpus, with C22C (alloys, 1,569), H01J (electron and discharge tubes, 972) and H01L (semiconductor devices, 785) as the next tier. C04B (ceramics, 665) and B22F (powder metallurgy, 712) carry meaningfully less filing density despite being technically distinct routes to target material production.

Deposition claims dominate; ceramics and powder metallurgy trailC23C · Coating & surface deposition5,62099.0%C22C · Alloys1,56927.6%H01J · Electron & discharge tubes97217.1%H01L · Semiconductor devices78513.8%B22F · Powder metallurgy71212.5%C04B · Ceramics, cement & refractories66511.7%G11B · Information storage (magnetic/…60410.6%H10P4628.1%Other2,63246.4%

Shares are the percentage of the 5,676 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.

Source: Patsnap Eureka. Filing trend and technology composition. Derived from a Patsnap search on Sputtering Target Advanced Materials covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.

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Foundational Prior Art

The patents everyone in this space cites

Representative Filing
US20080083616A12008-04-10

Co-Fe-Zr Based Alloy Sputtering Target Material and Process for Production Thereof

HITACHI METALS, LTD.

Filed by Hitachi Metals, this record claims a Co-Fe-Zr based alloy target material for soft magnetic film deposition in perpendicular magnetic recording media, specified by an atomic-ratio compositional formula with defined ranges for the base elements plus a substituent group including Ti, V, Nb, Ta, Cr and Mo. The claim ties a specific alloy composition window to a stated magnetic permeability and sputtering performance outcome.Publication date 2008-04-10 — included here as a representative composition-plus-process claim structure typical of alloy target filings in this dataset.

US20080083616A1 — patent drawing 1US20080083616A1 — patent drawing 2
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Most-cited records in the corpus
#Publication no.Patent titleCitations
1US20020104751A1Method and apparatus for ionized physical vapor deposition503
2US5540821AMethod and apparatus for adjustment of spacing between wafer and PVD target during semiconductor processing370
3US5922176ASpark eliminating sputtering target and method for using and making same286
4US5693203ASputtering target assembly having solid-phase bonded interface256
5US6287435B1Method and apparatus for ionized physical vapor deposition207
6US5126028ASputter coating process control method and apparatus199
7US5252194ARotating sputtering apparatus for selected erosion194
8US5519566AMethod of manufacturing ferroelectric bismuth layered oxides164
9US6117279AMethod and apparatus for increasing the metal ion fraction in ionized physical vapor deposition163
10US4610775AMethod and apparatus for clearing short-circuited, high-voltage cathodes in a sputtering chamber160

Citation counts are drawn from within the searched corpus and skew toward older filings — treat them as a measure of influence on later claim drafting, not of current commercial relevance.

Each row carries its publication number; clicking a row searches Eureka by that number.

Source: Patsnap Eureka. Citation counts and representative records. Derived from a Patsnap search on Sputtering Target Advanced Materials covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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Reading the Data

What the filing pattern signals for R&D and IP strategy

Three structural features stand out once family-level counts and citation patterns are set against each other.

Filing Trajectory
211 → 13
peak 2017 to latest partial year

Decline from a 2017 peak, not a new field

Filings ran at 211 in 2017, held near 147 by 2022, and the field is not showing renewed acceleration. This reads as a mature claim space where incremental filing has slowed, not an emerging one still building density.

Filing trend data
Claim Concentration
5,620 / 5,676
records touching C23C

Coating and deposition claims cover nearly the whole corpus

Almost every record in scope touches C23C coating and surface deposition claim language, which means differentiation inside this dataset happens at the alloy composition and process-parameter level, not at the top IPC classification.

IPC composition
Citation Anchors
503 citations
top-cited record

Ionized PVD apparatus claims anchor the field

The most-cited record concerns ionized physical vapor deposition apparatus rather than a target material composition itself, indicating that equipment and process claims from the early 2000s still shape how later material claims are drafted around them.

Most-cited records
Eureka AI Agent
Looking for what nobody has claimed yet?

Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to sputtering target advanced materials, with the prior art for and against each one.

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Co-assignee activity is limited and thin
AssigneeCo-assigneeShared families
Mitsubishi Materials CorporationShowa Oil Co., Ltd.9
Honeywell International Inc.STROTHERS SUSAN D8
Honeywell International Inc.KIM JAEYEON7
Honeywell International Inc.FERRASSE STEPHANE7
JX Nippon Mining & Metals CorporationJapan Energy Corporation6
Mitsubishi Materials CorporationSolar Frontier K.K.6
Sumitomo Chemical Co., Ltd.UACJ Corporation6
Honeywell International Inc.HORT WERNER6

Only 10 co-assignee pairs appear across the corpus, and the strongest pairings involve a small number of named-inventor and corporate combinations rather than broad industry consortia — collaborative filing is the exception here, not the norm.

Source: Patsnap Eureka. Co-assignee relationships and derived observations. Derived from a Patsnap search on Sputtering Target Advanced Materials covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Competitive Landscape

Assignee activity and where filing has gone quiet

Recent-year momentum figures show a field where established filers have largely stopped adding new families, which changes how a competitor-watch list should be built.

Momentum Signal
0% YoY
Mitsui Mining & Smelting, latest year

Long-standing filers show flat or zero recent activity

Mitsui Mining & Smelting recorded 1 filing in the latest year at 0% year-on-year change, while JX Nippon Mining & Metals, Sanyo Special Steel, Mitsubishi Materials and several others show zero filings in the same window.

Recent-year momentum
Momentum Signal
-100% YoY
Applied Materials, latest year

Even equipment-side filers are pulling back

Applied Materials, whose most-cited prior art anchors the equipment side of this field, shows a -100% year-on-year change in the latest partial year — consistent with the broader post-2017 decline rather than an isolated event.

Recent-year momentum
Collaboration
10 pairs
co-assignee combinations

Filing is largely done alone

The strongest co-assignee pairing in the dataset appears 9 times; most combinations appear far less. That points to in-house material development rather than joint-venture or licensed co-filing as the dominant model.

Co-assignee pairs
🔍
Under-claimed branches worth a closer freedom-to-operate look
Sub-areas where filing density sits well below the C23C core, based on IPC composition counts
Ceramic target sintering routes (C04B)Powder-metallurgy target consolidation (B22F)Rotary target bonding interfacesMagnetic recording alloy targets (G11B-adjacent)Semiconductor-integration target claims (H01L overlap)
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Recent-year filing momentum by assignee
AssigneeRecent yearYoY
Mitsui Mining & Smelting Co., Ltd.10%
JX Nippon Mining & Metals Corporation0
Sanyo Special Steel Co., Ltd.0
Proterial, Ltd.0
Mitsubishi Materials Corporation0
Applied Materials, Inc.0-100%
Sumitomo Chemical Co., Ltd.0-100%
Honeywell International Inc.0-100%
Source: Patsnap Eureka. Assignee-level momentum. Derived from a Patsnap search on Sputtering Target Advanced Materials covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Next Steps

Where to take this analysis

The filing trend and assignee data point to specific next questions depending on whether the goal is freedom-to-operate, licensing, or new material development.

Map claims against the under-claimed branches

Ceramic and powder-metallurgy target routes carry far fewer filings than the coating-deposition core, which may mean either open claim space or simply less commercial activity — worth checking against product literature before filing.

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Track assignees showing zero recent activity

Several established filers show no filings in the latest year. That can mean a portfolio is being maintained rather than expanded, or that R&D has shifted to a different material system entirely.

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Read the top-cited equipment patents before drafting new claims

The most-cited records concern deposition apparatus rather than target composition — any new material claim should be checked against how those apparatus claims constrain achievable target geometries and interfaces.

Review cited prior art in Eureka
Source: Patsnap Eureka. Forward-looking reading of the same dataset. Derived from a Patsnap search on Sputtering Target Advanced Materials covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
FAQ

Common questions about sputtering target patents

Answers are grounded in the same dataset. Derived from a Patsnap search on Sputtering Target Advanced Materials covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.

Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.

Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.

Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company's registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.