Sputtering Target Patents: Leaders, Trends & White Space 2026
- Filing has cooled sharply since 2018. the peak year at 48 families has given way to a midpoint of just 11 by 2022, pointing to a matured, consolidated claim map rather than an expanding one.
- C23C dominates the IPC mix almost completely. 1,539 of 1,569 records sit in coating and surface deposition, with alloys (C22C) and electron/discharge tube applications (H01J) as the next densest layers.
- The named leading assignees show zero filings in the latest year. momentum has shifted away from the historic incumbents, which is the clearest signal in this dataset that the centre of activity is moving elsewhere or has simply gone quiet.
Filing growth compares 2021 (25 records) with 2024 (12) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field. Top-5 share is the combined record count of the five largest assignees divided by all 1,569 records in scope (CR5), not by the ranked leaders only.
What this landscape covers
Sputtering targets and PVD source materials sit at the intersection of metallurgy and thin-film deposition: how a target is made, how it bonds to its backing plate, how its grain structure behaves under prolonged use, and how cleanly it avoids particle generation during sputtering. This landscape covers patent families filed between 2015 and 2026 that claim target composition, purity level, bonding methods and grain-structure control, drawn from 1,569 published records across the relevant IPC classes.
Because publication lags filing by roughly 18 months, the most recent one or two years in the filing trend will always look thinner than they eventually turn out to be. Family counts, not raw document counts, are used throughout so that multi-jurisdiction filing strategies do not distort the ranking.
Let an AI agent run this analysis on your own technology
Pick a task. Every answer cites the patents behind it.
Filing trends and technology composition
The filing curve and the IPC mix together tell a story of a technology area that expanded, peaked, and has been contracting for several years — with claim density concentrated overwhelmingly in one coating subclass.
A peak in 2018, then a steady decline
Filings ran at 33 in 2017, climbed to a peak of 48 in 2018, and had fallen to 11 by the midpoint year of 2022. The trajectory is flat-to-declining across the observed window, consistent with a field where the core composition and manufacturing claims were staked out early and later filings are incremental rather than foundational.
Coating deposition claims dominate the classification mix
C23C (coating and surface deposition) covers 1,539 of the 1,569 records — essentially the entire corpus. C22C (alloys, 474) and H01J (electron and discharge tubes, 375) form the next layer, followed by H01L (semiconductor devices, 230), B22F (powder metallurgy, 207), C22F (non-ferrous metal treatment, 179), G11B (magnetic/optical storage, 161) and C04B (ceramics and refractories, 119). The spread across alloy, powder-metallurgy and ceramics classes shows that target material science, not just deposition process, is a substantial share of the claim space.
Shares are the percentage of the 1,569 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.
Go deeper on Sputtering Targets and PVD Materials with Eureka
This page is one run against one query. Ask Eureka your own question about sputtering targets and pvd materials and every answer comes back with the patent numbers behind it.
Try EurekaKey patents shaping this space
Sputtering target with reduced particle generation and method of producing said target
The target surface is engineered so intermetallic compounds, oxides, carbides and other non-ductile substances sit within a highly ductile matrix phase at a controlled 1-50% volume ratio, with surface defect area held to 0.5% or less. The stated aim is suppressing nodule and particle generation during sputtering by improving how non-ductile-rich regions of the target surface are handled.Filed by JX Nippon Mining & Metals Corporation, published as US20120273347A1.


| # | Publication no. | Patent title | Citations |
|---|---|---|---|
| 1 | US20020104751A1 | Method and apparatus for ionized physical vapor deposition | 503 |
| 2 | US6331233B1 | Tantalum sputtering target with fine grains and uniform texture and method of manufacture | 247 |
| 3 | US6287435B1 | Method and apparatus for ionized physical vapor deposition | 207 |
| 4 | US5519566A | Method of manufacturing ferroelectric bismuth layered oxides | 164 |
| 5 | US20080271779A1 | Fine Grained, Non Banded, Refractory Metal Sputtering Targets with a Uniformly Random Crystallographic Orient… | 154 |
| 6 | US5855744A | Non-planar magnet tracking during magnetron sputtering | 149 |
| 7 | US5565071A | Integrated sputtering target assembly | 146 |
| 8 | US20030052000A1 | Fine grain size material, sputtering target, methods of forming, and micro-arc reduction method | 133 |
| 9 | US5863398A | Hot pressed and sintered sputtering target assemblies and method for making same | 128 |
| 10 | US5433835A | Sputtering device and target with cover to hold cooling fluid | 117 |
Citation counts favour older filings that have had more time to accumulate citations within the searched corpus; they signal historical influence, not present-day relevance.
Each row carries its publication number; clicking a row searches Eureka by that number.
Put your own technology through the same analysis
Eureka on the web
When you want the answer in the next five minutes.
The agent works the prompt against patents and technical literature, citing every source.
Run your analysis now →MCP server & REST API
When it has to run inside your own pipeline.
Patent search, landscape analysis and assignee resolution as MCP tools. Drop them into any agent framework, or call REST directly.
Browse MCP servers →What the numbers mean for filing strategy
Three patterns in the data are directly useful for deciding where to file, where to license, and where prior art risk is highest.
The core claim space was staked out by 2018
Filing volume more than quadrupled between 2017 and its 2018 peak, then fell steadily. A midpoint of 11 in 2022 against a peak of 48 suggests the foundational composition, grain-structure and bonding claims were largely filed in the first half of the observed window.
Almost the entire corpus sits in one coating subclass
C23C accounts for effectively all records, with C22C alloy claims and H01J tube-related claims forming secondary layers. A filing that only maps against C23C prior art will miss adjacent risk sitting in the alloy and powder-metallurgy classes.
Historic leaders have gone quiet in the most recent year
Every one of the leading named assignees, including two logging a -100% year-on-year change, shows zero filings in the latest year. Given the ~18-month publication lag, some of this is an artefact of the data cut-off rather than a real halt in R&D.
Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to sputtering targets and pvd materials, with the prior art for and against each one.
| Assignee | Co-assignee | Shared families |
|---|---|---|
| Intevac, Inc. | SHAH VINAY | 12 |
| Intevac, Inc. | BLUCK TERRY | 12 |
| H.C. Starck GmbH | Starck GmbH | 11 |
| Honeywell International Inc. | STROTHERS SUSAN D | 6 |
| Honeywell International Inc. | FERRASSE STEPHANE | 6 |
| Tosoh SMD, Inc. | IVANOV EUGENE Y | 6 |
| Intevac, Inc. | PEDERSON TERRY | 6 |
| Intevac, Inc. | BROWN DAVID WARD | 6 |
Only 10 co-assignee pairs appear in the dataset, with the strongest pairings linking a single assignee to named individual inventors rather than to other corporate entities — a sign that cross-company joint filing is the exception in this field, not the norm.
Who holds the ground, and where it is thinning
The named leading assignees span Japanese metals producers, US materials companies and specialty target makers. All of them show flat or declining recent-year filing, which changes how a freedom-to-operate review should weight their portfolios.
Recent-year filings have stalled across the board
Applied Materials and Tosoh SMD both show a -100% year-on-year change alongside zero filings in the latest year, matching the pattern seen at JX Nippon Mining & Metals, Honeywell, H.C. Starck and Intevac. This is a corpus-wide slowdown, not one company retreating while others fill the gap.
Filing strategy still centres on the US and Europe
The United States leads as receiving office, with the EPO and WIPO/PCT routes close behind, and Singapore, Japan and China trailing. For a company weighing where to seek protection, the US and EPO remain the offices with the deepest existing prior art to clear.
Joint corporate filing is the exception
The strongest co-assignee links pair a single company with named individual inventors rather than with another corporate assignee, suggesting most IP in this field is developed and held in-house rather than through joint ventures or cross-licensing arrangements.
| Assignee | Recent year | YoY |
|---|---|---|
| JX Nippon Mining & Metals Corporation | 0 | — |
| Applied Materials, Inc. | 0 | -100% |
| Honeywell International Inc. | 0 | — |
| H.C. Starck GmbH | 0 | — |
| Tosoh SMD, Inc. | 0 | -100% |
| Intevac, Inc. | 0 | — |
| Tosoh Corporation | 0 | — |
| Nikko Materials Co., Ltd. | 0 | — |
Where to take this next
The trend and composition data point to a mature, consolidated field with specific thin spots. Turning that into a filing or licensing decision means going deeper on the assignees and claim language that matter to your product.
Map your target composition against the C22C alloy layer
If your target material claims sit at the boundary of pure metal and alloy composition, check coverage in C22C alongside C23C — that secondary layer is where cross-class risk hides.
Explore the IPC breakdown in EurekaTrack inventor moves at the quiet incumbents
With leading assignees showing zero recent-year filings, watching where their named inventors move next may surface where the technology is heading before new filings publish.
Search assignee portfolios in EurekaStress-test freedom to operate against the most-cited records
The most-cited patents in this corpus, several dating to the early 2000s, remain the backbone of prior art searches for ionized PVD and fine-grain target methods.
Run a clearance search in EurekaCommon questions about sputtering target patents
The filing trend in this dataset peaked at 48 families in 2018 and had fallen to 11 by 2022. This pattern typically indicates that the foundational composition, grain-structure and backing-plate bonding claims were staked out early, leaving later filers to compete for narrower, incremental improvements. It does not necessarily mean commercial demand for sputtering targets has fallen; publication lags filing by roughly 18 months, so the most recent one or two years in any dataset like this always understate true activity.
The leading named assignees in this corpus include JX Nippon Mining & Metals, Applied Materials, Honeywell, H.C. Starck, Tosoh SMD and Intevac, spanning Japanese metals producers, US materials companies and specialty target manufacturers. Notably, every one of these leading assignees shows zero filings in the most recent year, with some logging a full year-on-year decline. That makes the historical ranking a better guide to who holds foundational claims than to who is actively filing today.
The dominant classification is C23C (coating and surface deposition), which covers nearly all 1,569 records in this dataset. Secondary classes include C22C (alloys), H01J (electron and discharge tubes), H01L (semiconductor devices), B22F (powder metallurgy), C22F (non-ferrous metal treatment), G11B (magnetic and optical storage) and C04B (ceramics and refractories). A thorough prior-art search should span at least the C23C, C22C and B22F classes, since target material composition claims often sit outside the core coating classification.
US20120273347A1, filed by JX Nippon Mining & Metals, claims a sputtering target surface engineered so non-ductile substances such as intermetallic compounds, oxides and carbides sit within a ductile matrix phase at a 1-50% volume ratio, with surface defect area held to 0.5% or less. This constrains a specific route to reducing particle and nodule generation during sputtering. Anyone designing a target aimed at the same problem should check whether their microstructure falls inside that volume-ratio and defect-area window before assuming a clear path.
Based on the classification density in this dataset, several adjacent branches show comparatively thin direct coverage relative to the core C23C claim mass: backing-plate diffusion bonding methods, grain-orientation control for refractory metal targets, low-defect-density ceramic target sintering, recycled target material reclamation, and sub-ppm purity assay methods. High density in C23C means the core deposition claim space is occupied, not that every adjacent problem has been claimed — these thinner branches are worth a focused freedom-to-operate check before assuming they are blocked.
Research Sputtering Targets and PVD Materials in depth with Eureka
Go past this page: query the whole sputtering targets and pvd materials corpus yourself, in your own scope.
Every answer comes back with patent numbers you can open.
Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.
Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.
Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company’s registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.