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Sputtering Target Patents: Leaders, Trends & White Space 2026

Sputtering Target Patents: Leaders, Trends & White Space 2026
https://www.patsnap.com/resources/blog/rd-blog/sputtering-targets-and-pvd-materials-patent-landscape/ · Patsnap · data cut-off 2026-07-31 · downloaded from the live page
Semiconductors · Patent Landscape
Sputtering Target and PVD Material Patents: Filing Trends, Leading Assignees and White Space
  • Filing has cooled sharply since 2018. the peak year at 48 families has given way to a midpoint of just 11 by 2022, pointing to a matured, consolidated claim map rather than an expanding one.
  • C23C dominates the IPC mix almost completely. 1,539 of 1,569 records sit in coating and surface deposition, with alloys (C22C) and electron/discharge tube applications (H01J) as the next densest layers.
  • The named leading assignees show zero filings in the latest year. momentum has shifted away from the historic incumbents, which is the clearest signal in this dataset that the centre of activity is moving elsewhere or has simply gone quiet.
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1,569
Published Records
50%
Top-5 Share of All Records
-52%
Filing Growth 2021→2024
US
Leading Jurisdiction

Filing growth compares 2021 (25 records) with 2024 (12) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field. Top-5 share is the combined record count of the five largest assignees divided by all 1,569 records in scope (CR5), not by the ranked leaders only.

Published byPatsnap Research··7 min readSourced from Patsnap Eureka
Overview

What this landscape covers

Sputtering targets and PVD source materials sit at the intersection of metallurgy and thin-film deposition: how a target is made, how it bonds to its backing plate, how its grain structure behaves under prolonged use, and how cleanly it avoids particle generation during sputtering. This landscape covers patent families filed between 2015 and 2026 that claim target composition, purity level, bonding methods and grain-structure control, drawn from 1,569 published records across the relevant IPC classes.

Because publication lags filing by roughly 18 months, the most recent one or two years in the filing trend will always look thinner than they eventually turn out to be. Family counts, not raw document counts, are used throughout so that multi-jurisdiction filing strategies do not distort the ranking.

Filing activity, 2017–2026
  1. 1JX NIPPON MINING & METALS CORP490
  2. 2APPLIED MATERIALS INC109
  3. 3HONEYWELL INTERNATIONAL INC99
  4. 4TOSOH SMD INC46
  5. 5PRAXAIR ST TECHNOLOGY INC43
  6. 6H C STARCK INC42
  7. 7INTEVAC INC39
  8. 8TOSOH CORP37
  9. 9TANAKA KIKINZOKU KOGYO KK29
  10. 10TOKYO ELECTRON LTD24
Source: Patsnap Eureka. Assignee ranking and totals. Derived from a Patsnap search on Sputtering Targets and PVD Materials covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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The data

Filing trends and technology composition

The filing curve and the IPC mix together tell a story of a technology area that expanded, peaked, and has been contracting for several years — with claim density concentrated overwhelmingly in one coating subclass.

A peak in 2018, then a steady decline

Filings ran at 33 in 2017, climbed to a peak of 48 in 2018, and had fallen to 11 by the midpoint year of 2022. The trajectory is flat-to-declining across the observed window, consistent with a field where the core composition and manufacturing claims were staked out early and later filings are incremental rather than foundational.

A peak in 2018, then a steady decline013253850332017482018201920202021202220232024202512026Most recent year is partial — publication lag means later filings are not yet visible.

Coating deposition claims dominate the classification mix

C23C (coating and surface deposition) covers 1,539 of the 1,569 records — essentially the entire corpus. C22C (alloys, 474) and H01J (electron and discharge tubes, 375) form the next layer, followed by H01L (semiconductor devices, 230), B22F (powder metallurgy, 207), C22F (non-ferrous metal treatment, 179), G11B (magnetic/optical storage, 161) and C04B (ceramics and refractories, 119). The spread across alloy, powder-metallurgy and ceramics classes shows that target material science, not just deposition process, is a substantial share of the claim space.

Coating deposition claims dominate the classification mixC23C · Coating & surface deposition1,53998.1%C22C · Alloys47430.2%H01J · Electron & discharge tubes37523.9%H01L · Semiconductor devices23014.7%B22F · Powder metallurgy20713.2%C22F · Non-ferrous metal treatment17911.4%G11B · Information storage (magnetic/…16110.3%C04B · Ceramics, cement & refractories1197.6%Other64541.1%

Shares are the percentage of the 1,569 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.

Source: Patsnap Eureka. Filing trend and technology composition. Derived from a Patsnap search on Sputtering Targets and PVD Materials covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.

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Prior art

Key patents shaping this space

Representative filing
US20120273347A12012-11-01

Sputtering target with reduced particle generation and method of producing said target

JX NIPPON MINING & METALS CORPORATION

The target surface is engineered so intermetallic compounds, oxides, carbides and other non-ductile substances sit within a highly ductile matrix phase at a controlled 1-50% volume ratio, with surface defect area held to 0.5% or less. The stated aim is suppressing nodule and particle generation during sputtering by improving how non-ductile-rich regions of the target surface are handled.Filed by JX Nippon Mining & Metals Corporation, published as US20120273347A1.

US20120273347A1 — patent drawing 1US20120273347A1 — patent drawing 2
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Most-cited records in this corpus
#Publication no.Patent titleCitations
1US20020104751A1Method and apparatus for ionized physical vapor deposition503
2US6331233B1Tantalum sputtering target with fine grains and uniform texture and method of manufacture247
3US6287435B1Method and apparatus for ionized physical vapor deposition207
4US5519566AMethod of manufacturing ferroelectric bismuth layered oxides164
5US20080271779A1Fine Grained, Non Banded, Refractory Metal Sputtering Targets with a Uniformly Random Crystallographic Orient…154
6US5855744ANon-planar magnet tracking during magnetron sputtering149
7US5565071AIntegrated sputtering target assembly146
8US20030052000A1Fine grain size material, sputtering target, methods of forming, and micro-arc reduction method133
9US5863398AHot pressed and sintered sputtering target assemblies and method for making same128
10US5433835ASputtering device and target with cover to hold cooling fluid117

Citation counts favour older filings that have had more time to accumulate citations within the searched corpus; they signal historical influence, not present-day relevance.

Each row carries its publication number; clicking a row searches Eureka by that number.

Source: Patsnap Eureka. Citation counts and representative records. Derived from a Patsnap search on Sputtering Targets and PVD Materials covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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Insights

What the numbers mean for filing strategy

Three patterns in the data are directly useful for deciding where to file, where to license, and where prior art risk is highest.

Filing trajectory
48 → 11
peak year (2018) vs. 2022 midpoint

The core claim space was staked out by 2018

Filing volume more than quadrupled between 2017 and its 2018 peak, then fell steadily. A midpoint of 11 in 2022 against a peak of 48 suggests the foundational composition, grain-structure and bonding claims were largely filed in the first half of the observed window.

Read this as claim-space saturation, not shrinking commercial interest.
Classification concentration
1,539 / 1,569
records classified under C23C

Almost the entire corpus sits in one coating subclass

C23C accounts for effectively all records, with C22C alloy claims and H01J tube-related claims forming secondary layers. A filing that only maps against C23C prior art will miss adjacent risk sitting in the alloy and powder-metallurgy classes.

Cross-class search across C22C and B22F is worth the extra step before filing.
Assignee momentum
0 filings
latest year, across the named leading assignees

Historic leaders have gone quiet in the most recent year

Every one of the leading named assignees, including two logging a -100% year-on-year change, shows zero filings in the latest year. Given the ~18-month publication lag, some of this is an artefact of the data cut-off rather than a real halt in R&D.

Treat the most recent year as a floor, not a ceiling, on true activity.
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Looking for what nobody has claimed yet?

Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to sputtering targets and pvd materials, with the prior art for and against each one.

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Co-filing is rare and concentrated
AssigneeCo-assigneeShared families
Intevac, Inc.SHAH VINAY12
Intevac, Inc.BLUCK TERRY12
H.C. Starck GmbHStarck GmbH11
Honeywell International Inc.STROTHERS SUSAN D6
Honeywell International Inc.FERRASSE STEPHANE6
Tosoh SMD, Inc.IVANOV EUGENE Y6
Intevac, Inc.PEDERSON TERRY6
Intevac, Inc.BROWN DAVID WARD6

Only 10 co-assignee pairs appear in the dataset, with the strongest pairings linking a single assignee to named individual inventors rather than to other corporate entities — a sign that cross-company joint filing is the exception in this field, not the norm.

Source: Patsnap Eureka. Co-assignee relationships and derived observations. Derived from a Patsnap search on Sputtering Targets and PVD Materials covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Players

Who holds the ground, and where it is thinning

The named leading assignees span Japanese metals producers, US materials companies and specialty target makers. All of them show flat or declining recent-year filing, which changes how a freedom-to-operate review should weight their portfolios.

Momentum check
-100% YoY
at more than one leading assignee

Recent-year filings have stalled across the board

Applied Materials and Tosoh SMD both show a -100% year-on-year change alongside zero filings in the latest year, matching the pattern seen at JX Nippon Mining & Metals, Honeywell, H.C. Starck and Intevac. This is a corpus-wide slowdown, not one company retreating while others fill the gap.

Verify against each assignee's most recent public filings before assuming exit.
Receiving offices
472 US filings
leading receiving office, ahead of EPO (324) and WIPO (176)

Filing strategy still centres on the US and Europe

The United States leads as receiving office, with the EPO and WIPO/PCT routes close behind, and Singapore, Japan and China trailing. For a company weighing where to seek protection, the US and EPO remain the offices with the deepest existing prior art to clear.

China's 66 filings are comparatively low given global sputtering-target manufacturing volume there.
Co-filing pattern
10 pairs
total co-assignee pairs in the dataset

Joint corporate filing is the exception

The strongest co-assignee links pair a single company with named individual inventors rather than with another corporate assignee, suggesting most IP in this field is developed and held in-house rather than through joint ventures or cross-licensing arrangements.

Diligence on inventor moves may surface more signal than diligence on formal co-filings.
🔍
Under-claimed branches worth a closer look
Sub-areas with comparatively thin direct coverage relative to the core C23C claim mass
backing-plate diffusion bonding methodsgrain-orientation control for refractory metal targetslow-defect-density ceramic target sinteringrecycled target material reclamationtarget purity assay methods for sub-ppm impurities
Rank all filers by momentum →
Recent-year filing momentum by assignee
AssigneeRecent yearYoY
JX Nippon Mining & Metals Corporation0
Applied Materials, Inc.0-100%
Honeywell International Inc.0
H.C. Starck GmbH0
Tosoh SMD, Inc.0-100%
Intevac, Inc.0
Tosoh Corporation0
Nikko Materials Co., Ltd.0
Source: Patsnap Eureka. Assignee-level momentum. Derived from a Patsnap search on Sputtering Targets and PVD Materials covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
What's next

Where to take this next

The trend and composition data point to a mature, consolidated field with specific thin spots. Turning that into a filing or licensing decision means going deeper on the assignees and claim language that matter to your product.

Map your target composition against the C22C alloy layer

If your target material claims sit at the boundary of pure metal and alloy composition, check coverage in C22C alongside C23C — that secondary layer is where cross-class risk hides.

Explore the IPC breakdown in Eureka

Track inventor moves at the quiet incumbents

With leading assignees showing zero recent-year filings, watching where their named inventors move next may surface where the technology is heading before new filings publish.

Search assignee portfolios in Eureka

Stress-test freedom to operate against the most-cited records

The most-cited patents in this corpus, several dating to the early 2000s, remain the backbone of prior art searches for ionized PVD and fine-grain target methods.

Run a clearance search in Eureka
Source: Patsnap Eureka. Forward-looking reading of the same dataset. Derived from a Patsnap search on Sputtering Targets and PVD Materials covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
FAQ

Common questions about sputtering target patents

Answers are grounded in the same dataset. Derived from a Patsnap search on Sputtering Targets and PVD Materials covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.

Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.

Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.

Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company’s registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.

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