Turbomolecular and Dry Vacuum Pumps Patents: Top Companies & Trends 2026
Turbomolecular and Dry Vacuum Pumps Patents
Concentrated at the top. the five leading assignees hold 365 of 842 records in scope (43.3%), and the ten leading assignees hold 477 (56.7%). Annual filings rose from 8 in 2017 to a peak of 47 in 2022, then declined to 19 by 2024 — a 59% fall from the 2021 level of 46. Readings for 2025 and 2026 are still incomplete and should not be read as a continued decline until later data fills in.
- 1PURDUE RES FOUND123
- 2EDWARDS LTD77
- 3APPLIED MATERIALS INC72
- 4EDWARDS JAPAN51
- 5LAM RES CORP42
See the full turbomolecular and dry vacuum pumps analysis in Eureka
- The complete ranking, not just the top five
- Every IPC branch with its share of the corpus
- The most-cited records, and where claim space is still thin
Common questions about this landscape
Who holds the most patents in turbomolecular and dry vacuum pump technology?
One assignee leads clearly with 123 of the 842 records in scope, more than double the fifth-placed filer’s 42. The leading five assignees together hold 365 records, 43.3% of the field, and the leading ten hold 477, or 56.7%. Beyond that group filing volume drops into a long tail across the remaining ranked assignees, so a freedom-to-operate review should prioritise the concentrated top tier first.
Is patent filing in this field growing or slowing down?
Filings rose from 8 in 2017 to a peak of 47 in 2022, then fell to 19 by 2024, a 59% decline from the 2021 level of 46. That looks like a pullback from peak activity, but publication lags filing by roughly 18 months, so the 2025-2026 figures in the underlying data are still incomplete and should not yet be read as confirming a continued slowdown. A clearer read will only be possible once those years finish publishing.
What technology areas dominate turbomolecular and dry vacuum pump patents?
H01J, covering electron and discharge tubes, appears in 26.8% of the 842 records, and C23C, covering coating and surface deposition, appears in 22.2% — both ahead of the core non-positive-displacement pump class F04D at 17.9%. This shows the field is defined as much by integrating pumps into semiconductor and coating process chambers as by pump mechanism design itself. Records frequently carry more than one class, so these percentages overlap rather than summing to 100%.
Disclaimer. This analysis is based on Patsnap Eureka data drawn from a limited snapshot of global patent records and is provided for general information and reference only. Patent data carries inherent limitations — recent filings are under-counted because of publication lag, counts may be on a record or family basis, classification and applicant-name data may contain errors or duplicates, and the underlying search query defines the scope shown — so the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
Nothing here is an exhaustive prior-art, novelty, freedom-to-operate or validity search, nor does it constitute legal, financial or professional advice, and it should not be relied upon as such. Verify independently and review with qualified patent and legal professionals before acting on it.
Method: Filing trend and technology composition. Derived from a Patsnap search on Turbomolecular and Dry Vacuum Pumps covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish. Every share divides by all records in scope. Data: Patsnap Eureka. See the full landscape report.