Ultrapure Water Fab Patents: Top Companies & Filing Trends 2026
- Filing has cooled, not stopped. activity peaked at 73 families in 2018 and has since drifted toward the high-30s/low-40s range by the 2022 midpoint — a mature claim space, not an abandoned one.
- Japan and the US dominate the filing map. 216 US and 209 Japan-origin records outweigh China's 138, Taiwan's 72 and the 84 EPO filings, pointing to where the enforceable prior art actually sits.
- The strongest recent-year signal is a pullback. several of the historically largest filers show 0 families in the latest year and -100% YoY, which reads as a pause in claim-building rather than exit from the field.
Filing growth compares 2021 (48 records) with 2024 (38) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field. Top-5 share is the combined record count of the five largest assignees divided by all 921 records in scope (CR5), not by the ranked leaders only.
What this patent set covers
Ultrapure water (UPW) systems condition feedwater to the extreme purity semiconductor fabs require for wafer cleaning, rinsing and the polishing loop — controlling total organic carbon, particle count and resistivity to sub-parts-per-trillion tolerances. This landscape pulls 921 patent families filed against a search built around those three control parameters, crossed against C02F water-treatment, B01D separation and H01L21 semiconductor-process classifications, so it captures both the water-treatment engineering and the fab-integration side of the technology.
Because publication typically lags filing by around 18 months, the most recent one or two years in the trend chart will always look thinner than they eventually turn out to be — treat the 2026 figure as a partial count, not a real decline point.
Filing trend and technology composition
921 families span six receiving offices and eight IPC subclasses, giving a reasonably complete view of where UPW engineering claims for fabs have concentrated since 2017.
A 2018 peak followed by a slow decline
Filings ran at 72 in 2017 and peaked at 73 the following year. By the 2022 midpoint the annual count had fallen to 40, and the trajectory since reads flat-to-declining rather than resurgent — consistent with a technology where the core purification architecture is well established and incremental filing has slowed.
Water treatment dominates, semiconductor integration is secondary
C02F (water and wastewater treatment) appears in 825 of the 921 records, far ahead of B01D separation processes (268) and H01L semiconductor devices (184). That gap shows most applicants are still claiming the purification chemistry and hardware itself; comparatively few families claim the fab-side integration, cleaning protocol (B08B, 86) or the measurement layer (G01N, 67) in detail.
Shares are the percentage of the 921 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.
Go deeper on Ultrapure Water Systems for Semiconductor Fabs with Eureka
This page is one run against one query. Ask Eureka your own question about ultrapure water systems for semiconductor fabs and every answer comes back with the patent numbers behind it.
Try EurekaThe patents everyone in this space cites
US20260234029A1 — Ultrapure water production apparatus with inline colloidal particle measurement
Filed by Nomura Micro Science, this application chains a water supply pump, ion exchanger and ultrafiltration membrane device in a secondary pure water loop, then places an acoustic particle counter paired with either an optical particle counter or a TOC meter on the upstream or downstream side of the ultrafiltration stage.The combination claim — acoustic counter plus optical counter or TOC meter, positioned relative to the UF membrane — is the novel element to watch, not the base purification train.
| # | Publication no. | Patent title | Citations |
|---|---|---|---|
| 1 | US4430226A | Method and apparatus for producing ultrapure water | 195 |
| 2 | US5073268A | Process and system for purifying pure water or ultrapure water | 171 |
| 3 | US5302356A | Ultrapure water treatment system | 133 |
| 4 | US6524447B1 | Apparatus and method for photocatalytic purification and disinfection of water and ultrapure water | 102 |
| 5 | US5868924A | Water purifier | 85 |
| 6 | US5707514A | Water treating method and apparatus treating waste water by using ion exchange resin | 81 |
| 7 | US4944875A | Plural filter tube sequential distribution apparatus | 74 |
| 8 | US5651894A | Water purification system and method | 73 |
| 9 | JP2016107249A | Ultrapure water production system and method | 70 |
| 10 | US5571419A | Method of producing pure water | 70 |
Citation counts accumulate over time and favour older filings; read them as markers of foundational influence, not of which claims are commercially active today.
Each row carries its publication number; clicking a row searches Eureka by that number.
Put your own technology through the same analysis
Eureka on the web
When you want the answer in the next five minutes.
The agent works the prompt against patents and technical literature, citing every source.
Run your analysis now →MCP server & REST API
When it has to run inside your own pipeline.
Patent search, landscape analysis and assignee resolution as MCP tools. Drop them into any agent framework, or call REST directly.
Browse MCP servers →What the filing pattern tells a technical reader
Three things stand out once the trend, geography and citation data are read together.
The core architecture is settled, not abandoned
The drop from 73 families in the 2018 peak to 40 at the 2022 midpoint is a slowdown in new claim-building, not a collapse in commercial relevance. UPW systems remain mandatory fab infrastructure; the patenting curve simply reflects that the base purification train (ion exchange, RO, UF, polishing loop) has been claimed repeatedly since well before this dataset starts.
Enforceable prior art concentrates in two jurisdictions
US and Japan together account for more than 425 of the 921 records, well ahead of China (138), EPO (84) and Taiwan (72). Freedom-to-operate work that only checks Chinese or Taiwanese filings will miss most of the foundational claims in this field.
A pause across the largest incumbents, not a single dropout
Multiple of the assignees with the deepest historical portfolios show zero families in the latest year, each at -100% YoY, while at least one mid-size filer still shows a small positive count. That pattern is more consistent with filing timing and publication lag than with any one company exiting UPW technology.
Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to ultrapure water systems for semiconductor fabs, with the prior art for and against each one.
| Assignee | Co-assignee | Shared families |
|---|---|---|
| Kurita Water Industries Ltd. | Mitsubishi Chemical Corporation | 3 |
| Kurita Water Industries Ltd. | IKUNO NOZOMU | 2 |
| Siemens Water Technologies Corp. | COULTER BRUCE LEE | 2 |
| Mitsubishi Electric Corporation | Danco Science Co., Ltd. | 2 |
| Kurita Water Industries Ltd. | Tadahiro Ohmi | 1 |
| Kurita Water Industries Ltd. | YOKOI IKUNORI | 1 |
| Kurita Water Industries Ltd. | OHMI TADAHIRO | 1 |
| Kurita Water Industries Ltd. | KOIZUMI MOTOMU | 1 |
Only 10 co-assignee pairs appear across 921 families, and the strongest pair shares just 3 records — UPW patenting in this dataset is overwhelmingly a single-assignee activity rather than a joint-venture or consortium one.
The assignee landscape
Patent family counts concentrate among a handful of water-treatment specialists and equipment makers, with a long tail of single- or few-filing entrants — typical of a technology where the core engineering is mature but fab-specific refinements keep generating new applications.
Filing is mostly solo, collaboration is the exception
With only 10 co-assignee pairs across 921 families and the tightest pair sharing 3 records, most applicants file independently rather than through joint development arrangements — a contrast with technology areas where consortium filing is common.
Even the most active recent filer is filing thinly
The assignee with the highest latest-year count still shows only 1 family, down 50% YoY. That is a small enough number that it should be read alongside the publication-lag caveat rather than treated as a definitive slowdown signal.
Foundational patents are decades-old, not recent
The most-cited record in the corpus dates from the early architecture of industrial UPW treatment and has accumulated 195 citations — a reminder that citation weight in this field rewards early, broad claims rather than recent refinements.
| Assignee | Recent year | YoY |
|---|---|---|
| Nomura Micro Science Co., Ltd. | 1 | -50% |
| Kurita Water Industries Ltd. | 0 | -100% |
| Evoqua Water Technologies LLC | 0 | -100% |
| Organo Corporation | 0 | -100% |
| Merck Patent GmbH | 0 | -100% |
| Samsung Electronics Co., Ltd. | 0 | — |
| Ovivo Inc. | 0 | -100% |
| Siemens Water Technologies Corp. | 0 | — |
Where to take this analysis
The dataset points to specific follow-up work depending on whether the goal is freedom-to-operate, competitive tracking, or scouting for open claim space.
Run a freedom-to-operate check on the polishing loop
With C02F and B01D claims this dense, any new polishing-loop or resistivity-control design should be checked against the most-cited records before development, not after.
Explore prior art in EurekaTrack the incumbents' pullback
Several of the largest historical filers show -100% YoY in the latest year; confirm whether that is publication lag or an actual pause by watching filing activity into the next disclosure cycle.
Set up assignee monitoring in EurekaScope a claim around inline particle/TOC sensing
The measurement-layer subclass (G01N) is the thinnest of the eight IPC areas tracked here, and the featured 2026 filing suggests sensor placement is where new claims are still being written.
Draft a claim map in EurekaFrequently asked questions
The corpus of 921 families is led by a small group of water-treatment specialists and equipment integrators with the deepest historical filing counts, though several of them show zero filings in the most recent tracked year. Japan-origin and US-origin assignees dominate the receiving-office split, with 209 and 216 records respectively, ahead of China, Taiwan and Europe. Because the most recent year is always undercounted due to publication lag, current rankings should be treated as a snapshot through the 2022-2023 filing years rather than a live leaderboard.
Yes, based on the trend data: filings ran at 72-73 per year through 2017-2018 and had fallen to 40 by the 2022 midpoint, a clear decline rather than growth. That does not mean the technology is losing commercial relevance — UPW systems remain essential fab infrastructure — it more likely reflects that the core purification architecture (ion exchange, reverse osmosis, ultrafiltration, polishing loop) was heavily claimed in earlier years and incremental novelty has become harder to find. Readers should also discount the very last one or two years for publication lag before concluding the slowdown is real.
US20260234029A1, filed by Nomura Micro Science, covers a secondary pure water device that runs a water supply pump, ion exchanger and ultrafiltration membrane in sequence, with an acoustic particle counter combined with either an optical particle counter or a TOC meter placed upstream or downstream of the UF stage. The base purification train it describes is standard and not novel on its own. The part worth checking against any new design is the specific sensor-combination-and-placement claim; a design that measures particles or TOC at a different point in the loop, or with a different sensor combination, likely sits outside its claim scope.
The IPC composition shows C02F water-treatment claims in 825 of 921 records versus only 67 in G01N (analysis and testing) and 86 in B08B (cleaning), which suggests the measurement and cleaning-integration layers are comparatively under-claimed relative to the core treatment chemistry. Inline colloidal particle counting, sensor placement relative to membrane stages, and resistivity feedback control in the polishing loop all look thinner than the base purification claims. A first claim in these areas would likely combine a specific sensor type, its placement point in the loop, and the control action it triggers, rather than claiming a purification method broadly.
The United States and Japan are the two largest receiving offices in this dataset, with 216 and 209 records respectively, followed by China at 138, EPO at 84, Taiwan at 72 and WIPO/PCT filings at 64. A search or clearance exercise that skips US and Japan will miss the majority of the foundational and most-cited prior art in this field. Taiwan's presence, while smaller in volume, is still worth checking given its concentration of semiconductor fabrication capacity.
Research Ultrapure Water Systems for Semiconductor Fabs in depth with Eureka
Go past this page: query the whole ultrapure water systems for semiconductor fabs corpus yourself, in your own scope.
Every answer comes back with patent numbers you can open.
Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.
Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.
Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.
Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company’s registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.