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Ultrapure Water Fab Patents: Top Companies & Filing Trends 2026

Ultrapure Water Fab Patents: Top Companies & Filing Trends 2026
https://www.patsnap.com/resources/blog/rd-blog/ultrapure-water-systems-for-semiconductor-fabs-patent-landscape/ · Patsnap · data cut-off 2026-07-31 · downloaded from the live page
Patent Landscape · Environmental & Water Treatment
Ultrapure Water Systems for Semiconductor Fabs: Patent Trends
  • Filing has cooled, not stopped. activity peaked at 73 families in 2018 and has since drifted toward the high-30s/low-40s range by the 2022 midpoint — a mature claim space, not an abandoned one.
  • Japan and the US dominate the filing map. 216 US and 209 Japan-origin records outweigh China's 138, Taiwan's 72 and the 84 EPO filings, pointing to where the enforceable prior art actually sits.
  • The strongest recent-year signal is a pullback. several of the historically largest filers show 0 families in the latest year and -100% YoY, which reads as a pause in claim-building rather than exit from the field.
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921
Published Records
48%
Top-5 Share of All Records
-21%
Filing Growth 2021→2024
US
Leading Jurisdiction

Filing growth compares 2021 (48 records) with 2024 (38) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field. Top-5 share is the combined record count of the five largest assignees divided by all 921 records in scope (CR5), not by the ranked leaders only.

Published byPatsnap Research··7 min readSourced from Patsnap Eureka
Field Overview

What this patent set covers

Ultrapure water (UPW) systems condition feedwater to the extreme purity semiconductor fabs require for wafer cleaning, rinsing and the polishing loop — controlling total organic carbon, particle count and resistivity to sub-parts-per-trillion tolerances. This landscape pulls 921 patent families filed against a search built around those three control parameters, crossed against C02F water-treatment, B01D separation and H01L21 semiconductor-process classifications, so it captures both the water-treatment engineering and the fab-integration side of the technology.

Because publication typically lags filing by around 18 months, the most recent one or two years in the trend chart will always look thinner than they eventually turn out to be — treat the 2026 figure as a partial count, not a real decline point.

Filing activity, 2017-2026
  1. 1KURITA WATER INDUSTRIES LTD206
  2. 2EVOQUA WATER TECHNOLOGIES LLC81
  3. 3ORGANO CORP62
  4. 4NOMURA MICRO SCI CO LTD50
  5. 5MERCK PATENT GMBH45
  6. 6OVIVO INC25
  7. 7SAMSUNG ELECTRONICS CO LTD20
  8. 8VWS UK16
  9. 9CHRIST WATER TECH AG12
  10. 10HITACHI LTD11
Source: Patsnap Eureka. Assignee ranking and totals. Derived from a Patsnap search on Ultrapure Water Systems for Semiconductor Fabs covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
The Numbers

Filing trend and technology composition

921 families span six receiving offices and eight IPC subclasses, giving a reasonably complete view of where UPW engineering claims for fabs have concentrated since 2017.

A 2018 peak followed by a slow decline

Filings ran at 72 in 2017 and peaked at 73 the following year. By the 2022 midpoint the annual count had fallen to 40, and the trajectory since reads flat-to-declining rather than resurgent — consistent with a technology where the core purification architecture is well established and incremental filing has slowed.

A 2018 peak followed by a slow decline020406080722017732018201920202021202220232024202512026Most recent year is partial — publication lag means later filings are not yet visible.

Water treatment dominates, semiconductor integration is secondary

C02F (water and wastewater treatment) appears in 825 of the 921 records, far ahead of B01D separation processes (268) and H01L semiconductor devices (184). That gap shows most applicants are still claiming the purification chemistry and hardware itself; comparatively few families claim the fab-side integration, cleaning protocol (B08B, 86) or the measurement layer (G01N, 67) in detail.

Water treatment dominates, semiconductor integration is secondaryC02F · Water & wastewater treatment82589.6%B01D · Separation processes (filtrati…26829.1%H01L · Semiconductor devices18420.0%B01J · Chemical/physical processes & …13714.9%B08B · Cleaning (general)869.3%H10P697.5%G01N · Material analysis & testing677.3%B01F · Mixing & stirring414.5%Other24426.5%

Shares are the percentage of the 921 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.

Source: Patsnap Eureka. Filing trend and technology composition. Derived from a Patsnap search on Ultrapure Water Systems for Semiconductor Fabs covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.

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Prior Art To Know

The patents everyone in this space cites

Representative Recent Filing
US20260234029A12026-08-13

US20260234029A1 — Ultrapure water production apparatus with inline colloidal particle measurement

NOMURA MICRO SCIENCE CO., LTD.

Filed by Nomura Micro Science, this application chains a water supply pump, ion exchanger and ultrafiltration membrane device in a secondary pure water loop, then places an acoustic particle counter paired with either an optical particle counter or a TOC meter on the upstream or downstream side of the ultrafiltration stage.The combination claim — acoustic counter plus optical counter or TOC meter, positioned relative to the UF membrane — is the novel element to watch, not the base purification train.

US20260234029A1 — patent drawing 1US20260234029A1 — patent drawing 2
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Most-cited records in the corpus
#Publication no.Patent titleCitations
1US4430226AMethod and apparatus for producing ultrapure water195
2US5073268AProcess and system for purifying pure water or ultrapure water171
3US5302356AUltrapure water treatment system133
4US6524447B1Apparatus and method for photocatalytic purification and disinfection of water and ultrapure water102
5US5868924AWater purifier85
6US5707514AWater treating method and apparatus treating waste water by using ion exchange resin81
7US4944875APlural filter tube sequential distribution apparatus74
8US5651894AWater purification system and method73
9JP2016107249AUltrapure water production system and method70
10US5571419AMethod of producing pure water70

Citation counts accumulate over time and favour older filings; read them as markers of foundational influence, not of which claims are commercially active today.

Each row carries its publication number; clicking a row searches Eureka by that number.

Source: Patsnap Eureka. Citation counts and representative records. Derived from a Patsnap search on Ultrapure Water Systems for Semiconductor Fabs covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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Reading The Data

What the filing pattern tells a technical reader

Three things stand out once the trend, geography and citation data are read together.

Filing Trajectory
73 → 40
peak year to midpoint families

The core architecture is settled, not abandoned

The drop from 73 families in the 2018 peak to 40 at the 2022 midpoint is a slowdown in new claim-building, not a collapse in commercial relevance. UPW systems remain mandatory fab infrastructure; the patenting curve simply reflects that the base purification train (ion exchange, RO, UF, polishing loop) has been claimed repeatedly since well before this dataset starts.

Filing trend, 2017-2026
Geographic Split
216 US / 209 JP
leading receiving offices

Enforceable prior art concentrates in two jurisdictions

US and Japan together account for more than 425 of the 921 records, well ahead of China (138), EPO (84) and Taiwan (72). Freedom-to-operate work that only checks Chinese or Taiwanese filings will miss most of the foundational claims in this field.

Receiving office counts
Assignee Momentum
-100% YoY
at several historically large filers

A pause across the largest incumbents, not a single dropout

Multiple of the assignees with the deepest historical portfolios show zero families in the latest year, each at -100% YoY, while at least one mid-size filer still shows a small positive count. That pattern is more consistent with filing timing and publication lag than with any one company exiting UPW technology.

Recent-year momentum by assignee
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Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to ultrapure water systems for semiconductor fabs, with the prior art for and against each one.

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Co-filing is rare and narrow
AssigneeCo-assigneeShared families
Kurita Water Industries Ltd.Mitsubishi Chemical Corporation3
Kurita Water Industries Ltd.IKUNO NOZOMU2
Siemens Water Technologies Corp.COULTER BRUCE LEE2
Mitsubishi Electric CorporationDanco Science Co., Ltd.2
Kurita Water Industries Ltd.Tadahiro Ohmi1
Kurita Water Industries Ltd.YOKOI IKUNORI1
Kurita Water Industries Ltd.OHMI TADAHIRO1
Kurita Water Industries Ltd.KOIZUMI MOTOMU1

Only 10 co-assignee pairs appear across 921 families, and the strongest pair shares just 3 records — UPW patenting in this dataset is overwhelmingly a single-assignee activity rather than a joint-venture or consortium one.

Source: Patsnap Eureka. Co-assignee relationships and derived observations. Derived from a Patsnap search on Ultrapure Water Systems for Semiconductor Fabs covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Who's Filing

The assignee landscape

Patent family counts concentrate among a handful of water-treatment specialists and equipment makers, with a long tail of single- or few-filing entrants — typical of a technology where the core engineering is mature but fab-specific refinements keep generating new applications.

Concentration
10 pairs
co-assignee collaborations found

Filing is mostly solo, collaboration is the exception

With only 10 co-assignee pairs across 921 families and the tightest pair sharing 3 records, most applicants file independently rather than through joint development arrangements — a contrast with technology areas where consortium filing is common.

Co-assignee pair analysis
Recent Activity
1 family
latest-year filing at the most active assignee

Even the most active recent filer is filing thinly

The assignee with the highest latest-year count still shows only 1 family, down 50% YoY. That is a small enough number that it should be read alongside the publication-lag caveat rather than treated as a definitive slowdown signal.

Recent-year momentum by assignee
Historical Depth
195 citations
on the most-cited prior art record

Foundational patents are decades-old, not recent

The most-cited record in the corpus dates from the early architecture of industrial UPW treatment and has accumulated 195 citations — a reminder that citation weight in this field rewards early, broad claims rather than recent refinements.

Most-cited records table
🔍
Under-claimed branches worth checking before filing
These sub-areas show comparatively thin representation relative to the core purification claims and are worth a freedom-to-operate check before assuming the space is open.
Inline colloidal particle countingTOC/particle sensor placement relative to UF membranesPolishing-loop resistivity feedback controlPhotocatalytic disinfection integrationWafer-cleaning supply-line contamination monitoring
Rank all filers by momentum →
Recent-year momentum by assignee
AssigneeRecent yearYoY
Nomura Micro Science Co., Ltd.1-50%
Kurita Water Industries Ltd.0-100%
Evoqua Water Technologies LLC0-100%
Organo Corporation0-100%
Merck Patent GmbH0-100%
Samsung Electronics Co., Ltd.0
Ovivo Inc.0-100%
Siemens Water Technologies Corp.0
Source: Patsnap Eureka. Assignee-level momentum. Derived from a Patsnap search on Ultrapure Water Systems for Semiconductor Fabs covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Next Steps

Where to take this analysis

The dataset points to specific follow-up work depending on whether the goal is freedom-to-operate, competitive tracking, or scouting for open claim space.

Run a freedom-to-operate check on the polishing loop

With C02F and B01D claims this dense, any new polishing-loop or resistivity-control design should be checked against the most-cited records before development, not after.

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Track the incumbents' pullback

Several of the largest historical filers show -100% YoY in the latest year; confirm whether that is publication lag or an actual pause by watching filing activity into the next disclosure cycle.

Set up assignee monitoring in Eureka

Scope a claim around inline particle/TOC sensing

The measurement-layer subclass (G01N) is the thinnest of the eight IPC areas tracked here, and the featured 2026 filing suggests sensor placement is where new claims are still being written.

Draft a claim map in Eureka
Source: Patsnap Eureka. Forward-looking reading of the same dataset. Derived from a Patsnap search on Ultrapure Water Systems for Semiconductor Fabs covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Questions

Frequently asked questions

Answers are grounded in the same dataset. Derived from a Patsnap search on Ultrapure Water Systems for Semiconductor Fabs covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.

Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.

Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.

Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company’s registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.

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