https://www.patsnap.com/resources/blog/rd-blog/vacuum-pump-technology-patent-landscape/ · Patsnap · data cut-off 2026-07-31 · downloaded from the live page
Patent Landscape · Vacuum Pump Technology
Vacuum pump patents: mapping who holds ultimate-pressure and corrosive-gas claims
  • Filing has cooled since its 2021 peak. 75 families filed that year against 42 in 2017, but the count sits at 51 by the 2022 midpoint and trails off toward the present, partial year — a maturing claim space rather than a growing one.
  • Rotary-piston mechanics dominate the IPC mix. F04C accounts for 980 of the records against 470 for general positive-displacement pumps (F04B), meaning most contested claim territory sits in rotary and screw-type mechanisms, not in broader displacement architecture.
  • China now outfiles the United States at the receiving office. 300 China filings against 284 US filings signals that the newest claim activity in ultimate-pressure and pumping-speed language is shifting toward the Chinese office.
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1,297
Published Records
26%
Top-5 Share of All Records
-32%
Filing Growth 2021→2024
CN
Leading Jurisdiction

Filing growth compares 2021 (75 records) with 2024 (51) — a three-year span. 2024 is the most recent year we treat as complete: publication lags filing by roughly 18 months, so 2025 onwards are still filling in and any growth rate that ends there would understate the field. Top-5 share is the combined record count of the five largest assignees divided by all 1,297 records in scope (CR5), not by the ranked leaders only.

Published byPatsnap Research··7 min readSourced from Patsnap Eureka
Overview

What this landscape covers

This landscape tracks patent families whose title or abstract names a vacuum pump, dry screw vacuum pump or liquid ring vacuum pump, combined with claim language around ultimate pressure, pumping speed, corrosive gas handling, power consumption or condensable vapor — restricted to the IPC groups covering rotary-piston and positive-displacement pump mechanisms. That combination isolates the mechanical and performance claims that determine whether a pump design can be sold into semiconductor, chemical or vacuum-process markets without infringement risk.

The corpus spans 1,297 patent families filed or published between 2015 and mid-2026. Because publication typically lags filing by around 18 months, the most recent one or two years understate actual filing activity and should be read as a floor, not a ceiling.

Filing activity by year, 2017-2026
  1. 1EDWARDS LTD156
  2. 2EBARA CORP84
  3. 3THE BOC GRP PLC36
  4. 4HITACHI LTD33
  5. 5AGILENT TECHNOLOGIES INC31
  6. 6LEYBOLD AG27
  7. 7PFEIFFER VACUUM SAS27
  8. 8PFEIFFER VACUUM GMBH23
  9. 9ULVAC INC23
  10. 10LEYBOLD VAKUUM GMBH22
Source: Patsnap Eureka. Assignee ranking and totals. Derived from a Patsnap search on Vacuum Pump Technology covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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Data

Filing trends and technology composition

The filing curve and the IPC breakdown together show where claim density has built up and where it has started to thin out.

A peak-and-plateau filing curve

Filings rose from 42 in 2017 to a peak of 75 in 2021, then eased back to 51 by 2022 and continued lower toward the present partial year. That pattern is consistent with a technology whose core mechanical claims — screw geometry, ring-liquid staging, motor integration — are largely staked out, pushing new filers toward narrower performance or control claims rather than new base architectures.

A peak-and-plateau filing curve020406080422017201820192020752021202220232024202552026Most recent year is partial — publication lag means later filings are not yet visible.

Rotary-piston mechanisms carry the claim load

F04C (rotary-piston pumps) covers 980 of the 1,297 records, more than double F04B (positive-displacement pumps, 470) and five times F04D (non-positive-displacement pumps, 193). Smaller but present clusters in H01J, B01D and H02K point to claims that bridge pump mechanics with electron-tube processing, separation stages and motor design — often where the more specific, defensible claims sit.

Rotary-piston mechanisms carry the claim loadF04C · Rotary-piston pumps98075.6%F04B · Positive-displacement pumps47036.2%F04D · Non-positive-displacement pumps19314.9%F01C · Rotary-piston machines927.1%H01J · Electron & discharge tubes503.9%H10P362.8%B01D · Separation processes (filtrati…352.7%H02K · Electric motors & generators342.6%Other33826.1%

Shares are the percentage of the 1,297 records in scope. A patent can carry several IPC classes, so the shares add up to more than 100%.

Source: Patsnap Eureka. Filing trend and technology composition. Derived from a Patsnap search on Vacuum Pump Technology covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.

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Key Patents

The most-cited records and a representative early filing

Representative record
US4225288A1980-09-30

US4225288A — Pump set comprising a liquid ring vacuum pump preceded by a compressor

SIEMENS AKTIENGESELLSCHAFT

A pump set comprising a compressor followed by a liquid ring vacuum pump, with the two pumps matched so that a relatively small liquid ring vacuum pump can draw and maintain vacuum under 40 Torr.Filed by Siemens Aktiengesellschaft, granted 1980-09-30 — illustrates how early staged-compressor-plus-liquid-ring architectures set the template that later ultimate-pressure claims build on.

US4225288A — patent drawing 1US4225288A — patent drawing 2
View full record
Most-cited patents in this corpus
#Publication no.Patent titleCitations
1US5944049AApparatus and method for regulating a pressure in a chamber290
2US5846062ATwo stage screw type vacuum pump with motor in-between the stages166
3US6122921AShield to prevent cryopump charcoal array from shedding during cryo-regeneration154
4US20080267790A1Electronically Controlled Vacuum Pump112
5US5616015AHigh displacement rate, scroll-type, fluid handling apparatus94
6US6022195AElectronically controlled vacuum pump with control module88
7US5871336AThermal transpiration driven vacuum pump80
8US4523897ATwo stage vacuum pump80
9US4757689ACryopump, and a method for the operation thereof78
10US6056510AMultistage vacuum pump unit71

Citation counts favour older, foundational filings within a searched corpus and should be read as a signal of influence rather than of current commercial relevance.

Each row carries its publication number; clicking a row searches Eureka by that number.

Source: Patsnap Eureka. Citation counts and representative records. Derived from a Patsnap search on Vacuum Pump Technology covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
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Insights

What the numbers mean for a filing strategy

Three figures from this dataset matter more than the raw family count when deciding where to file next.

Filing momentum
75 → 51
peak (2021) vs. 2022 midpoint

Growth has flattened, not accelerated

The 2021 peak of 75 families was not sustained; by the 2022 midpoint filings had already fallen to 51 and the decline continues toward the present. Treat this as a mature claim space where incremental filings compete against dense prior art rather than open ground.

Filing trend, 2017-2026
Mechanism concentration
980 of 1,297
records tagged F04C

Rotary-piston claims dominate the corpus

Three out of four records sit under rotary-piston pump classification. Any new filing on screw or vane-type mechanisms is entering the most heavily claimed segment of this landscape, raising the bar for novelty.

IPC composition
Jurisdictional shift
300 vs. 284
China vs. US receiving-office filings

China has edged ahead as a filing destination

China now receives more filings in this space than the United States, with Europe, Japan, WIPO and the UK trailing behind. Freedom-to-operate analysis needs to weight the Chinese register at least as heavily as the US register going forward.

Receiving offices
Collaboration pattern
10 pairs
co-assignee pairs identified

Co-filing is rare and concentrated around one group

Only ten co-assignee pairs appear across the corpus, and the strongest links all involve the same corporate family filing jointly with related entities and individual inventors. Most other assignees file solo, which limits opportunities to track joint-venture signals.

Co-assignee pairs
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Looking for what nobody has claimed yet?

Eureka can read the same corpus for gaps instead of for coverage: under-claimed branches adjacent to vacuum pump technology, with the prior art for and against each one.

Find the white space →
Source: Patsnap Eureka. Co-assignee relationships and derived observations. Derived from a Patsnap search on Vacuum Pump Technology covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
Players

Who holds the ground, and where the momentum has stalled

Recent-year filing activity across the named assignees below shows zero new families in the latest year for every one of them, which either reflects genuine pullback or the reporting lag typical of the most recent filing year.

Momentum check
0 in latest year
across all tracked leading assignees

No leading assignee shows fresh filings

Every assignee with tracked recent-year momentum — including established vacuum equipment manufacturers — shows zero families in the latest year, with one showing a -100% YoY change. Given the 18-month publication lag, this is as likely to reflect reporting delay as a genuine stop in filing.

Recent-year momentum
Co-filing hub
8 shared families
strongest co-assignee pair

One corporate family accounts for the densest collaboration link

The strongest co-assignee pair in the dataset links two entities within the same Ebara corporate group at eight shared families, with a second link to an individual inventor and a third to Toshiba. Collaboration in this landscape is the exception, not the norm.

Co-assignee pairs
Receiving-office spread
6 offices tracked
China, US, EPO, Japan, WIPO, UK

Filing activity is genuinely global but unevenly split

China and the United States lead, Europe and Japan follow at meaningfully lower volumes, and WIPO PCT filings sit below all four major national/regional offices. A design freed to operate in China and the US still faces meaningful exposure in Europe and Japan.

Receiving offices
🔍
Under-claimed sub-areas worth a closer look
These branches show comparatively thin filing density relative to the core rotary-piston and liquid-ring claim clusters.
condensable-vapor handling in dry screw pumpscorrosive-gas-resistant seal geometriesmotor-integrated multistage stagingelectron-tube-compatible pumping stagespower-consumption control electronics for vacuum pumps
Rank all filers by momentum →
Recent-year filing momentum by assignee
AssigneeRecent yearYoY
Edwards Limited0-100%
Ebara Corporation0
The BOC Group plc0
Hitachi, Ltd.0
Lambert Co., Ltd.0
ULVAC, Inc.0
Agilent Technologies, Inc.0
Pfeiffer Vacuum GmbH0
Source: Patsnap Eureka. Assignee-level momentum. Derived from a Patsnap search on Vacuum Pump Technology covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
What's Next

Where to take this analysis

The filing curve and IPC composition point to a landscape with occupied core claims and thinner adjacent branches. The next steps depend on whether the goal is freedom-to-operate or new filing.

Run a freedom-to-operate check against rotary-piston claims

With 980 of 1,297 records in F04C, any new screw or vane-type pump design should be checked against this cluster specifically, not the corpus as a whole.

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Watch the China filing register

China's lead over the US at the receiving office (300 vs. 284) suggests the newest claim language is appearing there first; monitoring should follow accordingly.

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Probe the under-claimed branches before filing

Condensable-vapor handling and corrosive-gas seal geometries show thinner density than the core mechanism classes and may offer more defensible claim space.

Explore in Eureka
Source: Patsnap Eureka. Forward-looking reading of the same dataset. Derived from a Patsnap search on Vacuum Pump Technology covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP
FAQ

Common questions about vacuum pump patents

Answers are grounded in the same dataset. Derived from a Patsnap search on Vacuum Pump Technology covering 2015–2026, data cut-off 2026-07-31. Counts reflect published records only and shift as new filings publish.Run this in Eureka MCP

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Disclaimer. This page is generated from Patsnap Eureka data drawn from a limited snapshot of global patent and scientific-literature records, and is provided for general information and reference only.

Patent data carries inherent limitations: recent filings (typically the most recent 18–24 months) are under-counted due to standard publication lag; counts may be reported at either a patent-family or a patent-record basis and are not always directly comparable; classification, applicant-name, and citation data may contain errors, duplicates, or omissions; and the underlying search query defines and constrains the scope shown. As a result, the analysis may be incomplete or inaccurate and may not reflect the full technology landscape.

Nothing on this page constitutes an exhaustive prior-art, novelty, freedom-to-operate, or validity search, nor does it constitute legal, financial, investment, or professional advice, and it should not be relied upon as such. Any patent, commercial, or strategic decision should be verified independently and reviewed with qualified patent, legal, and domain professionals. Patsnap makes no warranties, express or implied, as to the accuracy, completeness, or fitness for any particular purpose of the information presented.

Machine translation. Assignee and organisation names originally recorded in Chinese, Japanese or Korean have been rendered into English by an AI translation step so that the tables stay readable. These renderings are best-effort and may not match a company's registered English name; the original name is what the underlying patent record carries, and it is what any Eureka query launched from this page uses.